MRI: Acquisition of a Focused Ion Beam Instrument for Research and Education

这项来自主要研究仪器（MRI）项目的奖励，将使印第安纳大学化学系获得一台聚焦离子束（FIB）仪器，用于开发和表征具有分子水平定制和控制特性的结构。研究应用是跨学科的，涵盖从化学合成到物理性质测量到生物自组装的主题。更具体地说，FIB将影响以下研究活动：(1)纳米光子力致动器的近场孔径阵列；(2)用于光强映射和传感的纳米结构；(3)用于液相分离的纳米流体通道；(4)纳米孔化学传感器；(5)纳米纤维和有机凝胶的结构分析；(6)计数和关联金纳米颗粒，研究表面增强拉曼散射（SERS）增强；(7)建筑控制材料的表征；(8)低维纳米结构中的量子相变；(9)纳米受限液相体系的结构与动力学；（10）纳米电子学中超分子材料的表面接触；（11）冷冻透射电镜分析的切片样品。FIB仪器用于制造尺寸小于100纳米的结构，并用于制备高分辨率透射电子显微镜的薄片样品。该仪器由场发射扫描电子显微镜（FESEM）柱和液镓聚焦离子束（FIB）柱组成，它们以“双光束”模式一起工作。镓离子在离子柱中产生、加速和聚焦，撞击样品，在离子束的焦点处烧蚀材料。实际上，这个过程创造了一个高分辨率（低于100纳米）的磨机，可以用FESEM进行“实时”监控。在没有聚焦离子束的情况下，该仪器也是一台功能齐全的扫描电子显微镜。该系统将被整合到几个研究生课程以及微纳米制造技术的教程中。教师用户很好地整合了现有的大学范围内的项目，目标是增加代表性不足群体的参与。本科生也可以通过正在进行的实验课程和独立研究项目使用该仪器。纳米制造的概念将通过基于网络的演示广泛传播。

With this award from the Major Research Instrumentation (MRI) program, the Department of Chemistry at Indiana University will acquire a Focused Ion Beam (FIB) instrument for the development and characterization of structures with properties that are tailored and controlled at the molecular level. The research applications are strongly interdisciplinary spanning topics from chemical synthesis to physical property measurements to biological self-assembly. More specifically, the FIB will impact the following research activities: (1) near-field aperture arrays for nanophotonic force actuators; (2) nanostructures for light intensity mapping and sensing; (3) nanofluidic channels for liquid phase separations; (4) nanopore-based chemical sensors; (5) structural analysis of nanofibers and organogels; (6) counting and correlating gold nanoparticles to investigate surface enhanced Raman scattering (SERS) enhancement; (7) characterization of architecturally controlled materials; (8) quantum phase transitions in low-dimensional nanostructures; (9) structure and dynamics of nano-confined liquid-phase systems; (10) surface contacts for supramolecular materials in nano-electronics; and (11) sectioning samples for cryo-TEM analysis.A FIB instrument is used for fabricating structures with dimensions below 100 nm and for the preparation of thin section samples for high-resolution transmission electron microscopy. The instrument consists of a field emission scanning electron microscope (FESEM) column and a liquid gallium focused ion beam (FIB) column, which operate together in a "dual beam" mode. Gallium ions are produced, accelerated, and focused in the ion column, strike the sample, ablating material at the focus of the ion beam. The process, in effect, creates a mill with high (sub 100 nm) resolution that can be monitored in "real time" with the FESEM. The instrument is also a fully functional scanning electron microscope when operated without the focused ion beam. The system will be integrated into several graduate courses as well as a tutorial on micro and nanofabrication techniques. The faculty users are well integrated with existing university wide programs that target increased participation from underrepresented groups. Undergraduates will also have access to this instrumentation through ongoing lab courses and independent research projects. The concepts of nanofabrication will be broadly disseminated via web based demos.