CAREER: Thermally Actuated Nanomechanical Resonators and Self-Sustained Oscillators

目的：本计划的目的是发展高频热致动纳米机电共振装置与系统的综合研究与教育计划。这包括VHF和UHF热压阻谐振器和自维持振荡器的实验演示和表征，以及开发主要技术障碍的解决方案，如纳米级批量制造，以及此类设备的温度和工艺补偿。知识优势：微/纳米机械谐振器件在传感和电子频率参考/滤波应用中拥有前所未有的机会。现有的高频机电谐振器的研究几乎都集中在压电和静电转导机理上。热致动，尽管有几个优点，通常被认为是一个缓慢的机制，只适用于低频应用。然而，最近的理论分析和初步结果表明，热驱动不仅是可行的，而且在高频应用中具有优势和独特性。更广泛的影响：在基础层面上，这一努力可能会为纳米科学和技术开辟许多新的尚未探索的研究途径。在实践层面，这些技术的发展可以为无线通信和传感应用提供新的机会。该项目将通过研究生和本科生研究人员的参与和教育，有助于培养下一代M/NEMS专家。将与研究活动相结合的主要教育活动包括研究生/本科生实验室模块开发，通过纳米训练营和教师讲习班进行K-12扩展，以及向技术界和公众传播结果。将作出特别努力，鼓励代表人数不足群体的学生参与。

Objective: The objective of this project is to develop an integrated research and educational program on high frequency thermally actuated nano-electromechanical resonant devices and systems. This includes experimental demonstration and characterization of VHF and UHF thermal-piezoresistive resonators and self-sustained oscillators and developing solutions to major technological barriers such as nanoscale batch fabrication, and temperature and process compensation of such devices.Intellectual Merit: Micro/nanomechanical resonant devices hold the promise of unprecedented opportunities in sensory and electronic frequency referencing/filtering applications. Almost all the existing research on high frequency electromechanical resonators has been focused on piezoelectric and electrostatic transduction mechanisms. Thermal actuation, despite having several advantages, has generally been considered a slow mechanism only suitable for low-frequency applications. However, recent theoretical analysis and preliminary results have demonstrated not only the viability, but also superiority and uniqueness of thermal actuation for high frequency applications. Broader Impact: At the fundamental level this effort could open-up a number of new unexplored research avenues in nanoscience and technology. At the practical level, the developed technologies can provide new opportunities in wireless communications and sensory applications.This project will contribute to training of the next generation of M/NEMS experts by involving and educating graduate and undergraduate researchers. Major educational activities that will be integrated along with the research activities include graduate/undergraduate lab module developments, K-12 outreach through nano boot-camps and teacher workshops, and dissemination of results to the technical community and general public. Special efforts will be undertaken to encourage participation of students from underrepresented groups.