CAREER: Thermally Actuated Nanomechanical Resonators and Self-Sustained Oscillators

目的：本计画的目标是发展一个整合的研究与教育计画，以研究高频热驱动奈米机电共振装置与系统。这包括VHF和UHF热压阻谐振器和自维持振荡器的实验演示和表征，以及针对主要技术障碍（如纳米级批量制造）开发解决方案，以及此类设备的温度和工艺补偿。智力优势：微/纳米机械谐振设备有望在传感器和电子频率参考/滤波应用中带来前所未有的机会。现有的高频机电谐振器的研究几乎都集中在压电和静电换能机制上。热致动尽管具有若干优点，但通常被认为是仅适用于低频应用的缓慢机制。然而，最近的理论分析和初步结果表明，不仅是可行的，而且热驱动的高频应用的优越性和独特性。更广泛的影响：在基础层面上，这一努力可以开辟一些新的纳米科学和技术的未开发的研究途径。在实践层面上，开发的技术可以在无线通信和传感应用提供新的机会。该项目将有助于通过参与和教育研究生和本科生研究人员来培养下一代M/NEMS专家。将与研究活动沿着整合的主要教育活动包括研究生/本科生实验室模块开发，通过纳米训练营和教师研讨会进行K-12推广，以及向技术界和公众传播结果。将作出特别努力，鼓励代表性不足群体的学生参加。

Objective: The objective of this project is to develop an integrated research and educational program on high frequency thermally actuated nano-electromechanical resonant devices and systems. This includes experimental demonstration and characterization of VHF and UHF thermal-piezoresistive resonators and self-sustained oscillators and developing solutions to major technological barriers such as nanoscale batch fabrication, and temperature and process compensation of such devices.Intellectual Merit: Micro/nanomechanical resonant devices hold the promise of unprecedented opportunities in sensory and electronic frequency referencing/filtering applications. Almost all the existing research on high frequency electromechanical resonators has been focused on piezoelectric and electrostatic transduction mechanisms. Thermal actuation, despite having several advantages, has generally been considered a slow mechanism only suitable for low-frequency applications. However, recent theoretical analysis and preliminary results have demonstrated not only the viability, but also superiority and uniqueness of thermal actuation for high frequency applications. Broader Impact: At the fundamental level this effort could open-up a number of new unexplored research avenues in nanoscience and technology. At the practical level, the developed technologies can provide new opportunities in wireless communications and sensory applications.This project will contribute to training of the next generation of M/NEMS experts by involving and educating graduate and undergraduate researchers. Major educational activities that will be integrated along with the research activities include graduate/undergraduate lab module developments, K-12 outreach through nano boot-camps and teacher workshops, and dissemination of results to the technical community and general public. Special efforts will be undertaken to encourage participation of students from underrepresented groups.