Development of a Hybrid Nano-Electro-Mechanical Sensor Technology for Nanoscale Aerosol Mass and Momemtumprobing

用于纳米级气溶胶质量和动量探测的混合纳米机电传感器技术的开发

• 批准号: 0800961
• 负责人: Siavash Pourkamali Anaraki
• 金额: $ 24.03万
• 依托单位: University of Denver
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-08-01 至 2012-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0800961&HistoricalAwards=false
• 关键词: Development; Hybrid; Nano; Electro; Mechanical

The objective of this proposal is to develop Micro/Nano-Electro-Mechanical (MEMS/NEMS) resonant sensor arrays enabling measurement of mass and size of individual nanoscale aerosol particles. The sensors will be tested in the laboratory with monodisperse aerosol under conditions similar to those what will occur in the instruments for which they are designed. Intellectual Merit: The proposed silicon-based resonant sensors are extremely mass sensitive due to their small size and high quality factors. The resonance frequencies of the devices change as they are loaded with aerosol particles. On the other hand, the deflection of the elastic structures is used to measure the kinetic energy of particles striking the resonant sensors. Combining the mass and energy measurements for individual particles permits the collision velocity to be determined which leads to the determination of particle size in situations where the velocity is size dependent.Broader Impact: This project is expected to lead to an active and comprehensive research program that fuels several under-development undergraduate and graduate level courses on micro/nano-electromechanical systems and combines them with extensive laboratory experiments and demos. It also allows the PIs to actively contribute in high school outreach programs conducted by the University of Denver as well as employ and educate several undergraduate and graduate students (preferably from underrepresented minorities) to participate in the research activities.

本提案的目的是开发微/纳机电（MEMS/NEMS）谐振传感器阵列，使单个纳米级气溶胶颗粒的质量和尺寸的测量。传感器将在实验室中用单分散气溶胶进行测试，测试条件类似于它们设计的仪器中发生的情况。智力优点：所提出的硅基谐振传感器由于其小尺寸和高品质因数而对质量非常敏感。装置的共振频率随着它们装载有气溶胶颗粒而改变。另一方面，弹性结构的偏转用于测量撞击谐振传感器的粒子的动能。结合单个粒子的质量和能量测量，可以确定碰撞速度，从而在速度取决于粒子大小的情况下确定粒子大小。该项目预计将导致一个积极和全面的研究计划，燃料几个发展中的本科和研究生水平的课程，对微/纳米，机电系统，并将其与广泛的实验室实验和演示相结合。它还允许PI积极参与丹佛大学开展的高中外展计划，并雇用和教育几名本科生和研究生（最好来自代表性不足的少数民族）参加研究活动。