Fully Micromachined Cascade Impactors with Integrated Resonant Nanobalances

带有集成共振纳米天平的全微机械级联冲击器

• 批准号: 1300143
• 负责人: Siavash Pourkamali Anaraki
• 金额: $ 35万
• 依托单位: University of Texas at Dallas
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2013
• 资助国家: 美国
• 起止时间: 2013-06-01 至 2018-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1300143&HistoricalAwards=false
• 关键词: Fully; Micromachined; Cascade; Impactors; Integrated

The objective of this award is to develop a low-cost silicon-based microsystem technology for real-time monitoring of concentration and size distribution of airborne micro/nano-particles as well as limited composition analysis on such. The envisioned outcome is a new microsystem technology for highly integrated particulate monitoring systems. Such microsystems can be the size of a pen or even smaller and are implemented by assembling a number of batch fabricated silicon components within a small package. The system can sample the surrounding air, separate airborne particles based on their size, measure the individual and/or cumulative mass of particles in each size range, and finally provide information on the water and organic content of the collected particulate matter in each size range. Particle size segregation is performed using micro-orifice cascade impactors while arrays of micro/nanoscale resonating mass balances perform the real time mass measurement.Upon successful development and commercialization, this technology could revolutionize the airborne particulate monitoring industry by enabling real time monitoring of nanoscale airborne particles down to a few nanometers size range using low cost, light weight instruments. Potential applications can be divided into three main categories: 1. Controlled environment/cleanroom monitoring for pharmaceutical and semiconductor industry; 2. Industrial hygiene and particulate exposure monitoring in mines, construction sites, and nanomaterial processing plants; 3. Environmental research and air pollution monitoring. For example, every worker in a cleanroom facility or high particulate processing plant could carry one of the envisioned monitoring instruments for better quality control or health hazard management. Monitoring of air pollution in large metropolitan areas is another area that could be highly impacted by this technology.

该奖项的目的是开发一种低成本的硅基微系统技术，用于实时监测空气中微米/纳米颗粒的浓度和尺寸分布，以及对其进行有限的成分分析。设想的结果是一种新的微系统技术，高度集成的颗粒监测系统。这种微系统可以是笔的大小或甚至更小，并且通过在小封装内组装多个批量制造的硅部件来实现。该系统可以对周围空气进行采样，基于其尺寸分离空气中的颗粒，测量每个尺寸范围内的颗粒的个体和/或累积质量，并最终提供关于每个尺寸范围内收集的颗粒物质的水和有机物含量的信息。颗粒尺寸分离使用微孔级联冲击器进行，而微/纳米级谐振质量天平阵列执行真实的时间质量测量。在成功开发和商业化后，该技术可以通过使用低成本，重量轻的仪器实现纳米级空气颗粒的真实的时间监测，从而彻底改变空气颗粒监测行业。潜在的应用可以分为三个主要类别：1。制药和半导体行业的受控环境/洁净室监测; 2.矿山、建筑工地和纳米材料加工厂的工业卫生和颗粒物暴露监测; 3.环境研究和空气污染监测。例如，洁净室设施或高颗粒物处理厂的每个工人都可以携带一种预期的监测仪器，以更好地进行质量控制或健康危害管理。大都市地区的空气污染监测是另一个可能受到该技术高度影响的领域。