SGER: DESIGN AND OPTIMIZATION OF HIGH FREQUENCY SILICON CAPACITIVE RESONATORS FOR HIGH-Q OPERATION IN LIQUID MEDIA

SGER：用于液体介质中高 Q 操作的高频硅电容谐振器的设计和优化

• 批准号: 0839951
• 负责人: Siavash Pourkamali Anaraki
• 金额: --
• 依托单位: University of Denver
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-08-01 至 2010-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0839951&HistoricalAwards=false
• 关键词: SGER; DESIGN; OPTIMIZATION; FREQUENCY; SILICON

DESIGN AND OPTIMIZATION OF HIGH FREQUENCY SILICON CAPACITIVERESONATORS FOR HIGH-Q OPERATION IN LIQUID MEDIAABSTRACT1. ObjectivesThis proposal is aimed at the design, fabrication, and characterization of bulk-mode capacitivesilicon resonators capable of high-Q operation in liquid for high-resolution label-free biochemicaldetection and analysis. The goal is to demonstrate quality factors as high as 1000 in DI water forresonators in the 10-200MHz frequency range.2. Intellectual Merit:Despite recent developments in the silicon resonator technologies and speculations on thesuitability of such devices as high-precision mass sensors, no viable design or architecture forpractical sensory applications has been demonstrated for such devices. In particular, operation ofcapacitive micro-resonators in liquid with an acceptably high quality factor remains an openproblem. This effort will develop and demonstrate new design concepts and fabricationapproaches for minimization of viscous damping caused by the surrounding liquid. The proposedpartially encapsulated resonators will be designed, fabricated and characterized in aqueous liquidmedia.3. Broader ImpactSuccessful development of the proposed resonators will pave the way towards implementation ofhighly sensitive label-free biochemical sensor arrays with numerous applications in biology,medicine and health sciences.The expected outcomes of the proposed activities will fuel the PI?s ongoing lecture and lab coursedevelopment activities under the NSF NUE grant. The PI will have research assistantshipopenings for undergraduate students under this project. The financial support for theundergraduate students will be provided by the University of Denver through the Partners inScholarship (PINS) program. In selection of the undergraduate research assistants priority will begiven to students from the minority and under-represented groups

用于液体介质中高Q值工作的高频硅电容谐振器的设计与优化ObjectivesThis建议是针对体模电容硅谐振器的设计，制造和表征，能够在液体中的高Q操作的高分辨率无标记生化检测和分析。目标是在10- 200 MHz频率范围内，在去离子水中，谐振器的品质因数高达1000.智力优点：尽管硅谐振器技术的最新发展和对高精度质量传感器等设备的适用性的猜测，没有可行的设计或架构为实际的传感器应用已被证明为这样的设备。特别是，操作ofcapacitive微谐振器在液体中具有可接受的高品质因数仍然是一个悬而未决的问题。这项工作将开发和展示新的设计概念和制造方法，以最大限度地减少由周围液体引起的粘性阻尼。所提出的部分封装谐振器将在水性液体介质中设计、制造和表征.更广泛的影响成功开发的拟议谐振器将铺平道路，实现高灵敏度的无标记生物化学传感器阵列与众多的应用在生物学，医学和健康科学。在NSF NUE资助下，正在进行的讲座和实验室课程开发活动。PI将在本项目下为本科生提供研究助理。丹佛大学将通过奖学金合作伙伴（PINS）计划为本科生提供财政支持。在选择本科生研究助理时，将优先考虑来自少数民族和代表性不足群体的学生