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Chemical Mechanical Paired Grinding

化学机械配对磨削

基本信息

批准号：
1100066
负责人：
Abhijit Chandra
金额：
$ 41.5万
依托单位：
Iowa State University
依托单位国家：
美国
项目类别：
Standard Grant
财政年份：
2011
资助国家：
美国
起止时间：
2011-07-01 至 2015-06-30
项目状态：
已结题

来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=1100066&HistoricalAwards=false
关键词：
Chemical Mechanical Paired Grinding

项目摘要

The objective of this project is to take key insights from grinding and polishing, and create a novel Chemical Mechanical Paired Grinding technology that combines the strengths of fixed abrasive grinding with those of free abrasive polishing, while avoiding their weaknesses. This is achieved by combining a key weakness avoidance insight from grinding, namely defect mitigation via minimization of maximum force per grit, with two strength enhancement insights from polishing, effective planarization via profile-driven determination of force gradient and robustness via homogenization. The resulting entity is embodied in a chemical mechanical paired grinding machine that will be designed and built in this project.Currently, relatively expensive free-abrasive polishing is the process of choice when surface quality and integrity are of primary concern, while fixed abrasive grinding with lower surface quality and integrity is used if cost is the primary design driver. If successful, chemical mechanical paired grinding will obviate this trade-off by delivering the product quality of polishing at a cost of operation for grinding. It will also introduce a new technique for combining strengths and avoiding weaknesses in hybrid process design. Educational activities will include infusion of research insights into graduate and undergraduate courses in design and manufacturing, and providing lab internships to undergraduate students where the resulting chemical mechanical paired grinding machine will be used as a teaching aid in hybrid process design. Recruitment of under-represented women and minority students will be facilitated by leveraging existing programs at Iowa State University and exchange programs with other universities.

该项目的目标是从磨削和抛光中获得关键的见解，并创造一种新型的化学机械配对磨削技术，该技术结合了固定磨料磨削和自由磨料抛光的优点，同时避免了它们的缺点。这是通过结合磨削的关键缺陷避免洞察力，即通过最小化每个磨粒的最大力来减少缺陷，以及通过抛光的两个强度增强洞察力来实现的，通过轮廓驱动的力梯度确定来实现有效的平坦化，通过均化来实现稳健性。最终的实体体现在将在本项目中设计和建造的化学机械配对磨床中。目前，当表面质量和完整性是主要考虑因素时，选择相对昂贵的无磨料抛光工艺，而如果成本是主要设计驱动因素，则使用表面质量和完整性较低的固定磨料磨削。如果成功，化学机械配对研磨将通过以研磨的操作成本提供抛光的产品质量来避免这种权衡。它还将介绍一种在混合工艺设计中结合优势和避免劣势的新技术。教育活动将包括将研究见解注入设计与制造的研究生和本科生课程，并向本科生提供实验室实习机会，由此产生的化学机械配对磨床将用作混合工艺设计的教学辅助工具。通过利用爱荷华州立大学的现有项目以及与其他大学的交流项目，将为招收代表不足的女性和少数族裔学生提供便利。