GOALI: Spectroscopic Ellipsometry of Transition Metal Silicides

技术：GOALI项目旨在研究过渡金属和相关金属间化合物，特别是硅化物的光学性质。金属和金属间化合物薄膜生长在硅和氧化硅使用物理气相沉积在IBM。对样品进行退火以促进晶粒生长、金属间反应和团聚（奥斯特瓦尔德熟化）。利用椭圆偏振光谱仪在从远红外到真空紫外的宽光谱范围内研究了薄膜材料的复介电函数。光学测量与半导体计量技术相结合，特别是X射线测量和原子力显微镜，以了解薄膜的性质，金属间化合物的形成，以及材料和器件加工过程中薄膜的演变。非技术性：该项目涉及材料科学领域的基础研究问题，具有高度的技术相关性。纳米电子器件的低电阻接触需要具有上级化学、物理和热稳定性的欧姆金属半导体结。椭圆偏振法允许非接触式研究薄金属膜的性质、金属间化合物的形成和加工过程中的材料演变。研究生和本科生，包括那些代表性不足的群体，将接受椭圆偏振，计量，半导体加工和设备制造的培训，并了解工业中的材料物理学。为高年级本科生精心设计的顶石设计项目是该项目的重要组成部分。

Technical: This GOALI project is to study optical properties of transition metals and related intermetallic compounds, especially silicides. Metal and intermetallic compound films are grown on silicon and silicon oxide using physical vapor deposition at IBM. Samples are annealed to encourage grain growth, intermetallic reactions, and agglomeration (Ostwald ripening). The complex dielectric functions of the thin film materials are investigated using spectroscopic ellipsometry over a wide spectral range from the far infrared to the vacuum ultraviolet. Optical measurements are combined with semiconductor metrology techniques, particularly x-ray measurements and atomic force microscopy, to understand the film properties, intermetallic formation, and evolution of the films during materials and device processing.Non-technical: The project addresses basic research issues in a topical area of materials science with high technological relevance. Low-resistance contacts to nanoelectronic devices require ultrathin Ohmic metal-semiconductor junctions with superior chemical, physical, and thermal stabilities. Ellipsometry allows non-contact investigations of the properties of thin metal films, intermetallic formation, and materials evolution during processing. Graduate and undergraduate students, including those in under-represented groups, will be trained for ellipsometry, metrology, semiconductor processing, and device fabrication, and learn about materials physics in industry. Well-designed capstone design projects for senior undergraduate students are an important component of the project.