MRI: Development of a THz Frequency On-Wafer Probe Station

该计划的目标是开发世界上第一个太赫兹频率（0.5 THz）的晶圆探测站。拟议的仪器开发计划将组装一个完整的两端口太赫兹频率矢量网络分析仪（VNA）系统，并将频率扩展模块安装到探测平台上。由弗吉尼亚大学制造的晶圆探头将直接安装在频率扩展模块上，以实现在500至750 GHz范围内工作的完整太赫兹频率晶圆探头站。知识上的优点是，太赫兹频率范围在射电天文学、化学光谱学和材料表征领域的科学发现以及在大气臭氧监测、隐藏武器和化学/生物危害探测以及紧凑型雷达系统中的应用方面具有巨大的潜力。然而，一个重要的障碍是无法通过晶圆上测试快速表征电路和器件。当前的测试程序涉及耗时的连接原型开发或自由空间测量。更广泛的影响使更广泛的科学和工程界受益，因为它使设备技术的快速发展成为可能，以便实现用于先进成像系统的太赫兹集成电路，对有害化学品和爆炸物的远距离探测以及远远超出现在可能的短程通信。此外，太赫兹频率探测站的开发将提供一个巨大的机会，通过展示工程教育可以在关键应用方面取得的进展，激励年轻的潜在工程师进入工程领域。

The objective of this program is to develop the first terahertz frequency (0.5 THz) on-wafer probe station in the world. The proposed instrument development plan will assemble a full two-port terahertz frequency vector network analyzer (VNA) system with frequency extension modules mounted to a probing platform. The wafer probes, fabricated by the University of Virginia, will be mounted directly to the frequency extension modules in order to realize a complete terahertz-frequency on-wafer probe station operating from 500 to 750 GHz.The intellectual merit is that the terahertz frequency range has enormous potential for both scientific discoveries in the areas of radio astronomy, chemical spectroscopy, and material characterization as well as applications in atmospheric ozone monitoring, concealed weapons and chemical / biological hazards detection, and compact-range radar systems. However, a significant hurdle has been the inability to rapidly characterize circuits and devices through on-wafer testing. Current test procedures involve time-consuming development of connectorized prototypes or free-space measurements.The broader impacts are benefiting the wider scientific and engineering communities by enabling the rapid advances in device technology required in order to realize terahertz integrated circuits for advanced imaging systems, stand-off detection of harmful chemicals and explosives and short-range communication that is far beyond what is now possible. In addition, the development of a terahertz frequency probe station will provide a tremendous opportunity for motivating young prospective engineers to enter the field of engineering by demonstrating the progress that can be made towards critical applications through an engineering education.