MRI: Development of a THz Frequency On-Wafer Probe Station

MRI：太赫兹频率晶圆探针台的开发

• 批准号: 1126677
• 负责人: Nicolas Barker
• 金额: $ 36.2万
• 依托单位: University of Virginia Main Campus
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2011
• 资助国家: 美国
• 起止时间: 2011-09-01 至 2013-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1126677&HistoricalAwards=false
• 关键词: MRI; Development; THz; Frequency; Wafer

The objective of this program is to develop the first terahertz frequency (0.5 THz) on-wafer probe station in the world. The proposed instrument development plan will assemble a full two-port terahertz frequency vector network analyzer (VNA) system with frequency extension modules mounted to a probing platform. The wafer probes, fabricated by the University of Virginia, will be mounted directly to the frequency extension modules in order to realize a complete terahertz-frequency on-wafer probe station operating from 500 to 750 GHz.The intellectual merit is that the terahertz frequency range has enormous potential for both scientific discoveries in the areas of radio astronomy, chemical spectroscopy, and material characterization as well as applications in atmospheric ozone monitoring, concealed weapons and chemical / biological hazards detection, and compact-range radar systems. However, a significant hurdle has been the inability to rapidly characterize circuits and devices through on-wafer testing. Current test procedures involve time-consuming development of connectorized prototypes or free-space measurements.The broader impacts are benefiting the wider scientific and engineering communities by enabling the rapid advances in device technology required in order to realize terahertz integrated circuits for advanced imaging systems, stand-off detection of harmful chemicals and explosives and short-range communication that is far beyond what is now possible. In addition, the development of a terahertz frequency probe station will provide a tremendous opportunity for motivating young prospective engineers to enter the field of engineering by demonstrating the progress that can be made towards critical applications through an engineering education.

该计划的目标是开发世界上第一个太赫兹频率（0.5 THz）的晶圆探针站。拟议的仪器开发计划将组装一个完整的双端口太赫兹频率矢量网络分析仪（VNA）系统，频率扩展模块安装在探测平台上。由弗吉尼亚大学制造的晶圆探针将直接安装在频率扩展模块上，以实现一个完整的太赫兹频率晶圆探针站，工作频率从500到750 GHz。其智力优势在于太赫兹频率范围对射电天文学，化学光谱学，以及在大气臭氧监测、隐藏武器和化学/生物危害探测以及紧凑范围雷达系统中的应用。然而，一个重要的障碍是无法通过晶圆上测试快速表征电路和器件。目前的测试程序涉及耗时的连接器化原型开发或自由空间测量，其广泛影响使所需的器件技术迅速进步，从而使更广泛的科学和工程界受益，以便实现用于先进成像系统的太赫兹集成电路、有害化学品和爆炸物的远距离探测以及远超目前可能实现的短程通信。此外，太赫兹频率探测站的开发将提供一个巨大的机会，通过展示通过工程教育可以在关键应用方面取得的进展，激励年轻的潜在工程师进入工程领域。