GOALI: Lateral-Mode MEMS Filter Arrays on Ultrananocrystalline Diamond for Multi-Band Communication

GOALI：用于多频段通信的超纳米晶金刚石横向模式 MEMS 滤波器阵列

• 批准号: 1202523
• 负责人: Reza Abdolvand
• 金额: $ 25.49万
• 依托单位: Oklahoma State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2012
• 资助国家: 美国
• 起止时间: 2012-05-15 至 2014-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1202523&HistoricalAwards=false
• 关键词: GOALI; Lateral; Mode; MEMS; Filter

ObjectiveThe objective of the proposed research is to significantly advance the field of MEMS filters by putting forward innovative solutions that tackle the issues hindering widespread deployment of MEMS filters such as high insertion loss, low power handling, and limited bandwidth. Our approach is to exploit high-coupling-factor thin-film piezoelectric materials in combination with novel impedance matching techniques to improve the performance of acoustically-coupled monolithic filters, which are fabricated on ultra-nanocrystalline diamond (UNCD) substrates. Intellectual MeritThis research is expected to overcome current limitations of MEMS filters and establish lateral-mode MEMS filters as a viable candidate for emerging multi-band transceivers. Specifically, the significance of the proposed activities is as follows: Finite element models are developed that can fully capture the frequency response of a piezoelectric MEMS filter. UNCD is utilized to scale up the frequency and improve the power handling of MEMS filters. Impedance matching networks are integrated with thin-film piezoelectric-on-UNCD filters. Novel processes for direct deposition of high-coupling-factor piezoelectric films on UNCD are developed.Broader Impacts The successful demonstration of low-loss thin-film piezoelectric-on-UNCD filters proposed in this work will have a significant impact on how future RF transceiver architectures will be designed. This proposal will provide opportunities for OSU graduate and undergraduate students (with priority given to students from under-represented groups) to work with industrial scientists and gain experience in an industrial setting at Advanced Diamond Technologies Inc. Results from the project will be disseminated through presentation in prestigious conferences and publication in high-impact journals.

拟议研究的目标是通过提出创新的解决方案来解决阻碍MEMS滤波器广泛部署的问题，如高插入损耗，低功率处理和有限的带宽，从而显着推进MEMS滤波器领域。我们的方法是利用高耦合系数的薄膜压电材料结合新颖的阻抗匹配技术，以提高性能的声耦合单片滤波器，这是制造在超纳米金刚石（UNCD）基板。智能优点这项研究有望克服目前MEMS滤波器的局限性，并建立横向模式MEMS滤波器作为一个可行的候选人，新兴的多波段收发器。 具体而言，所提出的活动的意义如下：有限元模型的开发，可以完全捕获的压电MEMS滤波器的频率响应。 UNCD被用于按比例增加频率和改善MEMS滤波器的功率处理。 阻抗匹配网络集成了薄膜压电上UNCD滤波器。新颖的工艺，直接沉积的高耦合系数的压电薄膜上UNCD的开发。更广泛的影响低损耗的薄膜压电UNCD滤波器在这项工作中提出的成功示范将产生重大影响，未来的RF收发器架构将如何设计。该提案将为俄勒冈州立大学的研究生和本科生（优先考虑来自代表性不足群体的学生）提供与工业科学家合作的机会，并在先进钻石技术公司的工业环境中获得经验。该项目的成果将通过在著名会议上介绍和在影响力大的期刊上发表来传播。