GOALI: Lateral-Mode MEMS Filter Arrays on Ultrananocrystalline Diamond for Multi-Band Communication

GOALI：用于多频段通信的超纳米晶金刚石横向模式 MEMS 滤波器阵列

• 批准号: 1202523
• 负责人: Reza Abdolvand
• 金额: $ 25.49万
• 依托单位: Oklahoma State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2012
• 资助国家: 美国
• 起止时间: 2012-05-15 至 2014-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1202523&HistoricalAwards=false
• 关键词: GOALI; Lateral; Mode; MEMS; Filter

ObjectiveThe objective of the proposed research is to significantly advance the field of MEMS filters by putting forward innovative solutions that tackle the issues hindering widespread deployment of MEMS filters such as high insertion loss, low power handling, and limited bandwidth. Our approach is to exploit high-coupling-factor thin-film piezoelectric materials in combination with novel impedance matching techniques to improve the performance of acoustically-coupled monolithic filters, which are fabricated on ultra-nanocrystalline diamond (UNCD) substrates. Intellectual MeritThis research is expected to overcome current limitations of MEMS filters and establish lateral-mode MEMS filters as a viable candidate for emerging multi-band transceivers. Specifically, the significance of the proposed activities is as follows: Finite element models are developed that can fully capture the frequency response of a piezoelectric MEMS filter. UNCD is utilized to scale up the frequency and improve the power handling of MEMS filters. Impedance matching networks are integrated with thin-film piezoelectric-on-UNCD filters. Novel processes for direct deposition of high-coupling-factor piezoelectric films on UNCD are developed.Broader Impacts The successful demonstration of low-loss thin-film piezoelectric-on-UNCD filters proposed in this work will have a significant impact on how future RF transceiver architectures will be designed. This proposal will provide opportunities for OSU graduate and undergraduate students (with priority given to students from under-represented groups) to work with industrial scientists and gain experience in an industrial setting at Advanced Diamond Technologies Inc. Results from the project will be disseminated through presentation in prestigious conferences and publication in high-impact journals.

本研究的目的是通过提出创新的解决方案来解决阻碍MEMS滤波器广泛部署的问题，如高插入损耗、低功耗处理和有限带宽，从而显著推进MEMS滤波器领域。我们的方法是利用高耦合系数薄膜压电材料与新型阻抗匹配技术相结合，以提高在超纳米晶金刚石（UNCD）衬底上制造的声耦合单片滤波器的性能。本研究有望克服当前MEMS滤波器的局限性，并建立横向模MEMS滤波器作为新兴多波段收发器的可行候选。具体来说，所提出的活动的意义如下：开发了可以完全捕获压电MEMS滤波器频率响应的有限元模型。UNCD被用于扩大MEMS滤波器的频率和改善功率处理。阻抗匹配网络与薄膜压电- uncd滤波器集成。提出了在UNCD上直接沉积高耦合系数压电薄膜的新工艺。本研究中提出的低损耗薄膜uncd压电滤波器的成功演示将对未来射频收发器架构的设计产生重大影响。该提案将为俄勒冈州立大学的研究生和本科生（优先考虑来自代表性不足群体的学生）提供机会，与工业科学家一起工作，并在先进钻石技术公司的工业环境中获得经验。该项目的成果将通过在有声望的会议上介绍和在高影响力的期刊上发表来传播。