Computationally-Guided Manufacturing of Nanowires and Nanowire Devices

纳米线和纳米线器件的计算引导制造

• 批准号: 1462622
• 负责人: Xianfan Xu
• 金额: $ 19.88万
• 依托单位: Purdue University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2015
• 资助国家: 美国
• 起止时间: 2015-05-01 至 2019-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1462622&HistoricalAwards=false
• 关键词: Computationally; Guided; Manufacturing; Nanowires; Nanowire

Semiconductor nanowires have unique properties that make them prominent candidates for the next generation high-performance electronic devices, chemical and biological sensors, solar cells, and photonics devices that can potentially impact every industrial sector. However, current technologies for producing nanowires are not suitable for commercial scale manufacturing. Because nanowires are often produced as an entangled mesh, complicated fabrication procedures are required to select, position, and align nanowires in placement required for making devices. This award supports research to investigate a novel semiconductor nanowire manufacturing technology that overcomes the above-mentioned obstacles. The research team will develop a unique and first of its kind technology for manufacturing nanowires with controlled dimension, composition, orientation, placement, property, and functionality necessary for large scale manufacturing of nanowire devices. The project will involve multiple disciplines including nanomanufacturing, computational modeling of materials synthesis, high precision control, and manufacturing system integration. As nanowire devices will find a broad range of applications in energy, healthcare, consumer electronics, and defense, results from this research will benefit the U.S. economy and society. In addition, the project will also help broaden participation of underrepresented groups in research, increase impact on education, and increase public awareness of nanoscience and nanotechnology.The enabling technology of the project is a laser-induced chemical vapor deposition (CVD) method recently developed at Purdue University. In this process, a laser beam is incident on a substrate, above which precursor gases such as silane and germane are heated and dissociated. Moving the substrate under computer control allows laser-guided growth of semiconductor nanowires with ultrahigh precision. The key to producing nanowires with dimensions of a few tens of nanometers is to utilize the interference effect between the incident laser beam and the surface scattered laser radiation. The research team will focus on computationally-guided manufacturing. It will generate computational models of the nanowire manufacturing process, and integrate them with advanced metrology tools, and feedback control in to a single manufacturing platform. As a result, this research will realize real-time control of the nanowire dimensions, properties, placements, and properties that is necessary for manufacturing nanowire devices at large scale.

半导体纳米线具有独特的性能，使其成为下一代高性能电子设备、化学和生物传感器、太阳能电池和光子设备的杰出候选者，这些设备可能会影响到每个工业部门。然而，目前生产纳米线的技术不适合商业规模的制造。由于纳米线通常是以缠绕网状的形式生产的，因此需要复杂的制造程序来选择、定位和排列纳米线，使其处于制造设备所需的位置。该奖项支持研究克服上述障碍的新型半导体纳米线制造技术。研究小组将开发一种独特的同类技术，用于制造尺寸、组成、取向、放置、性质和功能可控的纳米线，这是大规模制造纳米线设备所必需的。该项目将涉及多个学科，包括纳米制造、材料合成的计算建模、高精度控制和制造系统集成。由于纳米线设备将在能源、医疗保健、消费电子和国防等领域获得广泛的应用，这项研究的结果将使美国经济和社会受益。此外，该项目还将有助于扩大未被充分代表的群体参与研究，增加对教育的影响，并提高公众对纳米科学和纳米技术的认识。该项目的使能技术是普渡大学最近开发的一种激光诱导化学气相沉积(CVD)方法。在这个过程中，一束激光入射到衬底上，在衬底上方加热和分解硅烷和锗等前体气体。在计算机控制下移动衬底可以实现激光引导生长超高精度的半导体纳米线。制备几十纳米尺寸的纳米线的关键是利用入射激光与表面散射激光辐射之间的干涉效应。研究团队将专注于计算机引导的制造。它将生成纳米线制造过程的计算模型，并将它们与先进的计量工具集成在一起，并将反馈控制整合到一个单一的制造平台中。因此，这项研究将实现对纳米线尺寸、性质、放置和性质的实时控制，这是大规模制造纳米线器件所必需的。