SNM: Scalable Nanomanufacturing Machine Based on Parallel Optical Antenna Array

此可扩展纳米制造（SNM）赠款为开发高通量，可扩展的纳米制造机器提供资金，用于并行纳米光刻和纳米材料和器件的并行制造。过去二十年的研究已经证明了纳米材料和器件的优越性能。然而，生产基于纳米材料的器件的技术受到低吞吐量的困扰。为了将纳米科学技术的进步带给社会，需要可扩展到经济和工业相关生产水平的纳米制造方法。该机器将大大扩展商用机器在高通量、高分辨率和高精度制造方面的能力，并将成为第一台能够并行纳米光刻和并行纳米材料合成的商用规模制造机器。该机器的开发将基于在纳米制造中使用纳米级光学天线的进展。纳米级天线产生高强度的局部光斑；天线阵列用于平行纳米制造。为了合成纳米材料，来自天线的局部能量将创造局部化学反应环境，以便在精确的位置生产纳米材料，为使用标准半导体制造工具制造器件做好准备。如果成功，该项目将产生一个独特的和同类中的第一台用于纳米光刻和纳米材料制造的机器，可以很容易地用于开发多种类型的纳米/多尺度设备。这种商用高通量纳米制造机器的开发将使纳米级器件的制造达到经济和工业相关的生产水平，这将影响工业的每个部门。该项目将解决机器发展的基础和工程挑战，包括纳米光学、在线计量、制造工程和系统集成。该项目还将推动相关的科学和工程。高效率地将光集中到纳米光斑上的能力不仅对纳米制造有重大影响，而且对其他科学技术领域也有重大影响，从生物/化学传感到下一代数据存储。该项目还将为研究生和本科生，包括来自代表性不足群体的学生，提供跨学科领域的培训，并通过在工业实习获得工业经验。该项目将通过普渡大学本科生研究奖学金项目招募本科生。研究成果将作为新模块或专题介绍到一些课程和本科高年级设计项目中，并将通过普渡大学的外展项目向高中生推广。因此，该项目将对人力资源开发产生更广泛的影响。

This Scalable NanoManufacturing (SNM) grant provides funding for the development of a high throughput, scalable nanomanufacturing machine for parallel nanolithography and parallel manufacturing of nanomaterials and devices. Research in the past two decades has demonstrated superior properties and performances of nanomaterials and devices. However, technologies for producing nanomaterial-based devices suffer from low throughput. To bring the advances in nano-science and technology to society, nanomanufacturing methods scalable to economically and industrially relevant production levels are needed. This machine will greatly expand the capability of commercial machines in terms of high throughput, high resolution, and high precision manufacturing, and will be the first commercial scale manufacturing machine capable of both parallel nanolithography and parallel nanomaterials synthesis. The development of the machine will be based on advances in using nanoscale optical antennas for nanomanufacturing. The nanoscale antenna produces high intensity, localized light spot; and an array of antennas is used for parallel nanomanufacturing. To synthesize nanomaterials, the localized energy from antenna will create localized chemical reaction environment for producing nanomaterials at precise locations, ready for device fabrication using standard semiconductor manufacturing tools. If successful, the project will result in a unique and first of its kind machine for nanolithography and for manufacturing of nanomaterials that can be readily used for developing many types of nano/multi-scale devices. The development of such a commercial high throughput nanomanufacturing machine will enable manufacturing of nanoscale devices at economically and industrially relevant production levels, which will impact every sector in industry. The project will address fundamental and engineering challenges critical for the development of the machine, including nano-optics, on-line metrology, manufacturing engineering, and system integration. The project will also advance the relevant science and engineering. The ability to concentrate light into a nanometer spot with high efficiency has significant impact not only on nanomanufacturing but also on other areas in science and technology, from biological/chemical sensing to next-generation data storage. The project will also provide graduate and undergraduate students, including students from under-represented groups with trainings in interdisciplinary areas and industrial experience through internships in industry. Undergraduate students will be recruited to the project through Purdue undergraduate research fellowship programs. Research results will be introduced as new modules or special topics in a number of courses and undergraduate senior design projects, and will be outreached to high school students through Purdue outreach programs. Therefore, this project will have broader impacts on human resource development.