3D On-Chip Hybrid Micropower

小型化电子系统如智能卡、无线传感器和传感器网络以及可植入装置的发展刺激了对小型化电源的需求。对于这些电子设备，功率需求从几微瓦到几百毫瓦不等，能量需求从几百微瓦小时到几毫瓦小时不等。 本项目将研制和研究一种先进可靠的高能量密度和高功率密度的微功率源。纳米使能的微型化电极设计适于利用界面面积和总体积之间的比例关系。该项目将利用和转换PI过去和目前在微型超级电容器和微型电池方面的研究成果，开发和研究一种新型的混合微动力系统。该系统中涉及的制造方法与半导体制造工艺兼容。该新型系统可以与微芯片、能量收集器、电源管理系统和传感元件集成。通过基础研究，可以获得对电化学电力系统中发生的物理和化学过程的关键见解。由此产生的知识是迫切需要实现突破，需要为芯片级微功耗的发展。该项目将使研究生和本科生参与尖端研究，并扩大少数民族学生和妇女对科学和工程的参与。新开发的技术和研究成果将向公众广泛传播。本计画的目标是发展一种具有高能量密度与高功率密度的混合微功率源。设计、制作并研究了一种非对称的片上电池型混合微型超级电容器。该器械将是高功率处理双层电化学电容器微电极和锂离子可充电电池微电极的组合。在本研究中，将利用微影技术建构一叉指型高深宽比微电极平台。电化学活性材料将通过静电喷雾沉积来制备。基于平衡多个因素，如：电荷，功率，循环寿命和电压窗口，将研究微功率系统的设计规则。将评估和优化混合芯片上微功率系统的性能。该项目将提供可靠的独立电源，可用作其他能量收集系统的备用电源。独特的电极阵列结构为优化离子和电子传输和容量提供了令人兴奋的可能性。该项目将有效整合芯片微功率应用新兴微纳米制造的研究和教育，并扩大少数民族学生和妇女对科学和工程的参与。

The development of miniaturized electronic systems such as smart cards, wireless sensors and sensor networks, and implantable devices, has stimulated the demand for miniaturized power sources. For these electronic devices, the power need ranges from several microwatts to hundreds of milliwatts, and the energy requirement is from several hundreds of microwatt-hours to several milliwatt-hours. In this project, an advanced and reliable micropower source with high energy density and high power density will be developed and investigated. The nano-enabled miniaturized electrode design is geared to take advantage of the scaling relationship between interface area and overall volume. This project will leverage and transform the PI's past and current research effort on microsupercapacitors and microbatteries into developing and investigating a novel hybrid micropower system. The fabrication method involved in this system is compatible with the semiconductor manufacturing process. The novel system could be integrated with microchips, energy harvesters, power management systems and sensing components. Through fundamental research, key insights into the physical and chemical processes that occur in the electrochemical power system can be obtained. The resulting knowledge is critically needed to achieve breakthroughs that are required for the development of on-chip level micropower. This project will engage graduate and undergraduate students in cutting-edge research, and broaden the participation of minority students and women in science and engineering. The newly developed techniques and research results will be broadly disseminated to the general public. The objective of this project is to develop a hybrid micropower source with high energy density and high power density. An asymmetric on-chip level battery type hybrid microsupercapacitor will be designed, fabricated and investigated. This device will be a combination of a high power handling double-layer electrochemical capacitor microelectrode and a Li-ion based rechargeable battery microelectrode. In this research, an interdigital high-aspect-ratio microelectrode platform will be constructed by photolithography. Electrochemical active materials will be fabricated by electrostatic spray deposition. The design rules of the micropower system will be investigated based on balancing multiple factors, such as: charge, power, cycle life, and voltage window. The performance of the hybrid on-chip micropower system will be evaluated and optimized. The project will deliver a reliable stand-alone power source, that could be used as backup power for other energy harvesting systems. The unique electrode array architecture offers exciting possibilities for the optimization of ion and electron transport and capacity. This project will effectively integrate research and education in emerging micro- and nano-fabrication for on-chip micropower applications, and broaden the participation of minority students and women in science and engineering.