3D On-Chip Hybrid Micropower

智能卡、无线传感器和传感器网络等小型化电子系统以及植入式设备的发展刺激了对小型化电源的需求。对于这些电子设备，电力需求从几微瓦到数百毫瓦不等，能源需求从几百微瓦时到几毫瓦时不等。在本项目中，将开发和研究一种先进可靠的高能量密度和高功率密度的微型电源。纳米级的微型化电极设计充分利用了界面面积和总体积之间的比例关系。该项目将利用和转化PI过去和目前在微型超级电容器和微型电池方面的研究成果，开发和研究一种新型的混合微型电力系统。该系统所涉及的制造方法与半导体制造工艺兼容。这种新型系统可以与微芯片、能量收集器、电源管理系统和传感组件集成在一起。通过基础研究，可以获得对电化学电力系统中发生的物理和化学过程的关键见解。由此产生的知识对于实现芯片级微能源发展所需的突破至关重要。该项目将吸引研究生和本科生从事尖端研究，并扩大少数民族学生和女性在科学和工程领域的参与。新开发的技术和研究成果将广泛传播给公众。本项目的目标是研制一种具有高能量密度和高功率密度的混合微功率源。设计、制作和研究了一种不对称的片上电池型混合型微超级电容器。这种装置将是一个高功率处理的双层电化学电容器微电极和一个锂离子充电电池微电极的组合。在这项研究中，我们将利用光刻技术构建一个交叉指高深宽比微电极平台。采用静电喷雾沉积法制备电化学活性材料。在平衡电荷、功率、循环寿命和电压窗口等多种因素的基础上，研究微电源系统的设计规则。将对混合片上微能源系统的性能进行评估和优化。该项目将提供可靠的独立电源，可用作其他能源收集系统的后备电源。独特的电极阵列结构为优化离子和电子的传输和容量提供了令人兴奋的可能性。该项目将有效地整合用于芯片上微电源应用的新兴微米和纳米制造方面的研究和教育，并扩大少数民族学生和妇女对科学和工程的参与。

The development of miniaturized electronic systems such as smart cards, wireless sensors and sensor networks, and implantable devices, has stimulated the demand for miniaturized power sources. For these electronic devices, the power need ranges from several microwatts to hundreds of milliwatts, and the energy requirement is from several hundreds of microwatt-hours to several milliwatt-hours. In this project, an advanced and reliable micropower source with high energy density and high power density will be developed and investigated. The nano-enabled miniaturized electrode design is geared to take advantage of the scaling relationship between interface area and overall volume. This project will leverage and transform the PI's past and current research effort on microsupercapacitors and microbatteries into developing and investigating a novel hybrid micropower system. The fabrication method involved in this system is compatible with the semiconductor manufacturing process. The novel system could be integrated with microchips, energy harvesters, power management systems and sensing components. Through fundamental research, key insights into the physical and chemical processes that occur in the electrochemical power system can be obtained. The resulting knowledge is critically needed to achieve breakthroughs that are required for the development of on-chip level micropower. This project will engage graduate and undergraduate students in cutting-edge research, and broaden the participation of minority students and women in science and engineering. The newly developed techniques and research results will be broadly disseminated to the general public. The objective of this project is to develop a hybrid micropower source with high energy density and high power density. An asymmetric on-chip level battery type hybrid microsupercapacitor will be designed, fabricated and investigated. This device will be a combination of a high power handling double-layer electrochemical capacitor microelectrode and a Li-ion based rechargeable battery microelectrode. In this research, an interdigital high-aspect-ratio microelectrode platform will be constructed by photolithography. Electrochemical active materials will be fabricated by electrostatic spray deposition. The design rules of the micropower system will be investigated based on balancing multiple factors, such as: charge, power, cycle life, and voltage window. The performance of the hybrid on-chip micropower system will be evaluated and optimized. The project will deliver a reliable stand-alone power source, that could be used as backup power for other energy harvesting systems. The unique electrode array architecture offers exciting possibilities for the optimization of ion and electron transport and capacity. This project will effectively integrate research and education in emerging micro- and nano-fabrication for on-chip micropower applications, and broaden the participation of minority students and women in science and engineering.