3D On-Chip Hybrid Micropower

3D 片上混合微功耗

• 批准号: 1509735
• 负责人: Chunlei Wang
• 金额: $ 27.77万
• 依托单位: Florida International University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2015
• 资助国家: 美国
• 起止时间: 2015-08-01 至 2019-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1509735&HistoricalAwards=false
• 关键词: 3D; Chip; Hybrid; Micropower

The development of miniaturized electronic systems such as smart cards, wireless sensors and sensor networks, and implantable devices, has stimulated the demand for miniaturized power sources. For these electronic devices, the power need ranges from several microwatts to hundreds of milliwatts, and the energy requirement is from several hundreds of microwatt-hours to several milliwatt-hours. In this project, an advanced and reliable micropower source with high energy density and high power density will be developed and investigated. The nano-enabled miniaturized electrode design is geared to take advantage of the scaling relationship between interface area and overall volume. This project will leverage and transform the PI's past and current research effort on microsupercapacitors and microbatteries into developing and investigating a novel hybrid micropower system. The fabrication method involved in this system is compatible with the semiconductor manufacturing process. The novel system could be integrated with microchips, energy harvesters, power management systems and sensing components. Through fundamental research, key insights into the physical and chemical processes that occur in the electrochemical power system can be obtained. The resulting knowledge is critically needed to achieve breakthroughs that are required for the development of on-chip level micropower. This project will engage graduate and undergraduate students in cutting-edge research, and broaden the participation of minority students and women in science and engineering. The newly developed techniques and research results will be broadly disseminated to the general public. The objective of this project is to develop a hybrid micropower source with high energy density and high power density. An asymmetric on-chip level battery type hybrid microsupercapacitor will be designed, fabricated and investigated. This device will be a combination of a high power handling double-layer electrochemical capacitor microelectrode and a Li-ion based rechargeable battery microelectrode. In this research, an interdigital high-aspect-ratio microelectrode platform will be constructed by photolithography. Electrochemical active materials will be fabricated by electrostatic spray deposition. The design rules of the micropower system will be investigated based on balancing multiple factors, such as: charge, power, cycle life, and voltage window. The performance of the hybrid on-chip micropower system will be evaluated and optimized. The project will deliver a reliable stand-alone power source, that could be used as backup power for other energy harvesting systems. The unique electrode array architecture offers exciting possibilities for the optimization of ion and electron transport and capacity. This project will effectively integrate research and education in emerging micro- and nano-fabrication for on-chip micropower applications, and broaden the participation of minority students and women in science and engineering.

小型电子系统（例如智能卡，无线传感器和传感器网络以及可植入的设备）的开发刺激了对微型电源的需求。对于这些电子设备，功率需要从几微米到数百毫瓦的范围，并且能量需求是从数百个微小的小时到数毫瓦小时的数量。 在这个项目中，将开发和研究具有高能量密度和高功率密度的先进可靠的微型源。纳米启用的微型电极设计旨在利用接口面积和整体体积之间的缩放关系。该项目将利用并改变PI对微生物电容器和微生物的过去和当前研究工作，以开发和研究一种新型的混合微型动力系统。该系统涉及的制造方法与半导体制造过程兼容。新型系统可以与微芯片，能量收割机，电源管理系统和传感组件集成。通过基本研究，可以获得对电化学系统中发生的物理和化学过程的关键见解。最需要的知识是要实现片上微型动力的开发所需的突破。该项目将吸引研究生和本科生参与尖端研究，并扩大少数族裔学生和女性参与科学和工程学。新开发的技术和研究结果将广泛传播给公众。该项目的目的是开发具有高能量密度和高功率密度的混合微型源。将设计，制造和研究一种不对称的片上电池类型的混合微型Perpercapacitor。该设备将是高功率处理双层电化学电容器微电极和基于锂离子的可充电电池微电极的组合。在这项研究中，将通过光刻构造一个跨质量的高度比例小电极平台。电化学活性材料将通过静电喷雾沉积制造。将根据平衡多个因素（例如：电荷，电源，循环寿命和电压窗口）来研究微型动力系统的设计规则。将评估和优化混合片上微型动力系统的性能。该项目将提供可靠的独立电源，可以用作其他能源收集系统的备份功率。独特的电极阵列体系结构为优化离子和电子传输和容量提供了令人兴奋的可能性。该项目将有效地整合用于新兴的微型和纳米制作的芯片微源应用程序，并扩大少数族裔学生和妇女参与科学和工程的参与。