Far-From-Equilibrium Processing of Ferroelectric Thin Films on Glass and Polymeric Substrates
玻璃和聚合物基板上铁电薄膜的非平衡加工
基本信息
- 批准号:1537262
- 负责人:
- 金额:$ 38.63万
- 依托单位:
- 依托单位国家:美国
- 项目类别:Standard Grant
- 财政年份:2015
- 资助国家:美国
- 起止时间:2015-09-01 至 2020-08-31
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
Ferroelectric materials are multifunctional materials exhibiting large response to external mechanical, electrical and thermal fields. As devices are driven towards miniaturization and multifunctionality, ferroelectric thin films become increasingly important as a multifunctional means for actuation and sensing, non-volatile memories, and energy harvesting, integrated within micro and nano-electromechanical systems. However, ferroelectric thin films typically require a high-temperature processing step, incompatible with microelectronic component fabrication, required for the full miniaturization of the device and control units. This award supports the investigation of a novel, far-from-equilibrium processing method, enabling direct processing of ferroelectric materials on polymer and other flexible substrates. This processing method will enable fully integrated, miniaturized, multifunctional sensors and actuators, with a wide range of applications in healthcare (imaging pills, self-powered implanted sensors), automotive (vibration energy harvesting powered pressure sensors, accelerometers, thermal cameras), security (mm-sized autonomous robots), flexible electronics, and high-resolution conformal, peel-and-stick sensors.The overarching goal of this work is to enable direct integration of ferroelectric thin films with CMOS-compatible and flexible substrates, through understanding of processing-structure-property relationships in ferroelectric thin films manufactured through far-from-equilibrium processing conditions. Such a processing method (specifically pulsed thermal processing, PTP) allows direct crystallization of perovskite thin films on polymeric and flexible substrates. It is expected that both the large concentration of defects arising from the very far-from-equilibrium processing conditions as well as minimal residual stresses in these electroceramic films processed on glass and polymeric substrates will significantly influence their ultimate functional response. The samples will be synthesized through chemical solution deposition and crystallized through PTP. Structural and microstructural characterization will be coupled with micro- and macroscopic functional response evaluation of the films. Understanding mesoscale processing-structure-property relationships will enable transformative new device applications, and pave the way for a fundamental understanding of the atomistic defect landscape correlation with the macroscopic response of these functional materials.
铁电材料是对外部机械、电和热场表现出较大响应的多功能材料。随着设备向小型化和多功能化方向发展,铁电薄膜作为集成在微和纳米机电系统中的驱动和传感、非易失性存储器和能量收集的多功能手段变得越来越重要。然而,铁电薄膜通常需要高温处理步骤,与器件和控制单元完全小型化所需的微电子元件制造不兼容。该奖项支持对一种新颖的非平衡加工方法的研究,该方法能够在聚合物和其他柔性基板上直接加工铁电材料。这种处理方法将实现完全集成、小型化、多功能的传感器和执行器,在医疗保健(成像药丸、自供电植入传感器)、汽车(振动能量采集供电压力传感器、加速度计、热像仪)、安全(毫米级自主机器人)、柔性电子和高分辨率共形、 这项工作的首要目标是通过了解在远非平衡加工条件下制造的铁电薄膜的加工-结构-性能关系,实现铁电薄膜与 CMOS 兼容的柔性基板的直接集成。这种处理方法(特别是脉冲热处理,PTP)允许钙钛矿薄膜在聚合物和柔性基板上直接结晶。预计在玻璃和聚合物基板上加工的这些电陶瓷膜中,由于远离平衡的加工条件而产生的大量缺陷以及最小的残余应力将显着影响其最终的功能响应。样品将通过化学溶液沉积合成并通过 PTP 结晶。结构和微观结构表征将与薄膜的微观和宏观功能响应评估相结合。了解介观尺度的加工-结构-性能关系将实现变革性的新器件应用,并为从根本上理解原子缺陷景观与这些功能材料的宏观响应的相关性铺平道路。
项目成果
期刊论文数量(0)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
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Nazanin Bassiri-Gharb其他文献
Ferroelectricity at the extreme thickness limit in the archetypal antiferroelectric PbZrO3
在原型反铁电体 PbZrO3 中极端厚度极限下的铁电性
- DOI:
10.1038/s41524-025-01520-w - 发表时间:
2025-02-25 - 期刊:
- 影响因子:11.900
- 作者:
Nikhilesh Maity;Milan Haddad;Nazanin Bassiri-Gharb;Amit Kumar;Lewys Jones;Sergey Lisenkov;Inna Ponomareva - 通讯作者:
Inna Ponomareva
Investigation of AFM-based machining of ferroelectric thin films at the nanoscale
基于 AFM 的纳米级铁电薄膜加工研究
- DOI:
10.1063/1.5133018 - 发表时间:
2020 - 期刊:
- 影响因子:3.2
- 作者:
Fengyuan Zhang;David Edwards;Xiong Deng;Yadong Wang;Jason I. Kilpatrick;Nazanin Bassiri-Gharb;Amit Kumar;Deyang Chen;Xingsen Gao;Brian J. Rodriguez - 通讯作者:
Brian J. Rodriguez
Nazanin Bassiri-Gharb的其他文献
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{{ truncateString('Nazanin Bassiri-Gharb', 18)}}的其他基金
CAREER: Geometric Control of Flexoelectricity in Patterned Dielectric Thin Films
职业:图案化介电薄膜中弯曲电的几何控制
- 批准号:
1255379 - 财政年份:2013
- 资助金额:
$ 38.63万 - 项目类别:
Continuing Grant
Magnetic Field-Assisted Processing of Piezoelectric/Magnetostrictive Thin Film Composites to Enhance Properties
压电/磁致伸缩薄膜复合材料的磁场辅助加工以增强性能
- 批准号:
0927689 - 财政年份:2009
- 资助金额:
$ 38.63万 - 项目类别:
Standard Grant
SGER: Enhanced Magnetoelectric Behavior in Piezoelectric/Magnetostrictive Composites via Magnetic Field-Assisted Processing
SGER:通过磁场辅助处理增强压电/磁致伸缩复合材料的磁电行为
- 批准号:
0909460 - 财政年份:2009
- 资助金额:
$ 38.63万 - 项目类别:
Standard Grant
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