GOALI/Collaborative Research: Precision Control of Nanopositioners

GOALI/合作研究：纳米定位器的精确控制

• 批准号: 1537983
• 负责人: Kam Leang
• 金额: $ 19.75万
• 依托单位: University of Utah
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2015
• 资助国家: 美国
• 起止时间: 2015-09-01 至 2019-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1537983&HistoricalAwards=false
• 关键词: GOALI; Collaborative; Research; Precision; Control

The goal of this collaborative Grant Opportunities for Academic Liaison with Industry (GOALI) research project between the University of Utah (UU), Villanova University (VU), and industry partner Molecular Vista, Inc. (MVI) is to study new design and control system approaches for the development of advanced nanopositioning systems for nanoscale science and engineering applications. Specifically, the research outcomes will lead to improvement in the performance of nanotechnologies, such as video-rate scanning probe microscopy, desktop nano-rapid prototyping and nanomanufacturing systems, precision advanced additive manufacturing systems, and micro rapid inspection and repair systems. The research collaboration and the educational activities will expose graduate and undergraduate engineering students, K-12 students, and the wider community to cutting-edge research and findings in control, nanotechnology, and high-impact industry applications. The focus of this research is on new design and control paradigms for dual-stage nanopositioners that consider both spatial and temporal constraints. Emerging dual-stage nanopositioners have the unique ability to achieve both long-range and high-speed operation. However, typical control strategies rely on frequency-based information to split the control effort between the two actuators, which results in some precision positioning trajectories being unachievable. Specifically, low-speed trajectories are assumed to be long-range and diverted to the long-range, low-speed actuator while high-speed trajectories are assumed to be short-range and diverted to the short-range, high speed actuator. Thus, short-range, low-speed inputs are diverted to the long-range, low-speed actuator, which can be problematic since the long-range actuator has a lower positioning resolution than the short-range, high-speed actuator, which is better suited to track the short-range trajectory (regardless of speed). Therefore, dual-stage nanopositioners cannot achieve high positioning resolution when range and frequency are not inversely correlated. To advance the state-of-the-art, a control-centered design approach will be taken to establish the guidelines and requirements for creating high-performance dual-stage nanopositioners. To enhance the understanding and control system design process, detailed input-output models that capture the dynamics of the system (nonlinear and dynamic effects) and sensor characteristics will be obtained. An innovative control algorithm which systematically considers both spatial and temporal information will be developed to effectively allocate the control input. Finally, with support from the industry partner, the research team will evaluate the technology on a commercial atomic force microscope (AFM) system and consider future commercialization opportunities.

犹他州大学（UU）、维拉诺瓦大学（VU）和行业合作伙伴Molecular Vista，Inc.之间的这一合作资助机会与行业学术联络（GOALI）研究项目的目标是(MVI)是研究新的设计和控制系统的方法，为纳米科学和工程应用的先进纳米定位系统的发展。 具体而言，研究成果将导致纳米技术性能的改善，如视频速率扫描探针显微镜，桌面纳米快速原型和纳米制造系统，精密先进增材制造系统，以及微型快速检测和修复系统。 研究合作和教育活动将使研究生和本科工程专业学生，K-12学生和更广泛的社区接触到控制，纳米技术和高影响力行业应用的前沿研究和发现。 本研究的重点是新的设计和控制范式的双级纳米定位器，考虑空间和时间的限制。新兴的双级纳米定位器具有实现长距离和高速操作的独特能力。 然而，典型的控制策略依赖于基于频率的信息来在两个致动器之间分割控制工作，这导致某些精确定位轨迹无法实现。具体地，低速轨迹被假设为是长距离的并且被转向到长距离、低速致动器，而高速轨迹被假设为是短距离的并且被转向到短距离、高速致动器。因此，短距离、低速输入被转移到长距离、低速致动器，这可能是有问题的，因为长距离致动器具有比短距离、高速致动器更低的定位分辨率，短距离、高速致动器更适合于跟踪短距离轨迹（与速度无关）。因此，当范围和频率不成反比时，双级纳米定位器不能实现高定位分辨率。 为了推进最先进的技术，将采取以控制为中心的设计方法来建立创建高性能双级纳米定位器的指导方针和要求。为了加强对控制系统设计过程的理解，将获得捕获系统动态（非线性和动态效应）和传感器特性的详细输入输出模型。一个创新的控制算法，系统地考虑了空间和时间的信息，将开发有效地分配控制输入。最后，在行业合作伙伴的支持下，研究团队将在商业原子力显微镜（AFM）系统上评估该技术，并考虑未来的商业化机会。