A Novel Multifunctional SPM Probe with Modular Quick-Change Tips for Fully Automated Probe-Based Nanomanufacturing

一种新型多功能 SPM 探针,具有模块化快速更换针尖,适用于基于探针的全自动纳米制造

基本信息

项目摘要

The goal of this research is to address the critical issues of throughput, repeatability, scalability, and limited functionality of probe-based nanofabrication by designing, fabricating, and testing a novel active cantilever probe with an automated ability to interchange probe tips (tools). Probe-based fabrication enables unmatched spatial/feature resolution and the ability to assemble and pattern hybrid (inorganic and organic) device architectures. However, practical nanofabrication with probe tips is limited by the issues of throughput, tip wear, tip chemical cross contamination, and scalability all of which act to decrease the quality, reliability, and efficiency of probe-based fabrication. This unique nano probe system addresses these issues by enabling automated interchanging of probe tips. By simply switching tips, the probe can be used for nano deposition, patterning, machining, metrology, and various other nanofabrication processes. Located at the distal end of an SPM cantilever is an electrically activated MEMS-based microgripper, which is designed to automatically load/unload tips from an array of modular probe tips (tools). Automation is achieved using a novel control scheme to determine the relative location between the microgripper and tool tip. This research will contribute new knowledge via feasibility studies of (1) active cantilevers for SPM probe-based fabrication and (2) thermal-proximity sensing. This system is a nanoscale analog of macroscale computer numerical control (CNC) manufacturing machines that have the ability for fully-automated rapid tool changes without operator interruption. The ability to provide fully automated on-demand probe tip changes will improve the overall efficiency of probe-based nanofabrication, allow for multifunctional probe capabilities, and improve process reliability and quality by enabling the ability to replenish/replace worn or chemically fouled tips in an efficient manner. In addition, this research program will broaden participation of underrepresented students in engineering by providing training for undergraduate and graduate students in nanotechnology, participation of underrepresented students through recruitment and support of graduate research assistants and mentoring of undergraduate researchers, and outreach to K-12 schools in the greater Richmond area through a unique "Nano Day at VCU" event. Additionally, the proposed research will be integrated into the mechanical engineering curriculum by creating teaching modules in nanoscale control systems, sensing, and probe-based nanofabrication.
这项研究的目标是通过设计、制造和测试一种具有自动交换探头尖端(工具)能力的新型有源悬臂式探头来解决基于探头的纳米制造的吞吐量、重复性、可扩展性和有限功能等关键问题。基于探头的制造实现了无与伦比的空间/特征分辨率,以及组装和图案化混合(无机和有机)设备架构的能力。然而,探针针尖的实际纳米制造受到吞吐量、针尖磨损、针尖化学交叉污染和可扩展性等问题的限制,所有这些都降低了基于探针的制造的质量、可靠性和效率。这一独特的纳米探头系统通过实现探头尖端的自动互换解决了这些问题。通过简单地切换针尖,该探头可以用于纳米沉积、图案化、机械加工、计量和各种其他纳米制造工艺。位于SPM悬臂远端的是一个基于MEMS的电动微夹持器,其设计用于自动加载/卸载来自一组模块化探头尖端(工具)的尖端。使用一种新的控制方案来确定微夹持器和刀尖之间的相对位置,从而实现了自动化。这项研究将通过(1)基于SPM探针的有源悬臂梁的制造和(2)热接近传感的可行性研究来提供新的知识。该系统是宏尺度计算机数控(CNC)制造机床的纳米级模拟,具有全自动快速更换刀具的能力,无需操作员中断。提供全自动按需更换探头尖端的能力将提高基于探头的纳米制造的整体效率,允许多功能探头能力,并通过能够以有效方式补充/更换磨损或化学污染的尖端来提高工艺可靠性和质量。此外,这项研究计划将通过为本科生和研究生提供纳米技术方面的培训,通过招聘和支持研究生研究助理以及指导本科生研究人员来扩大代表不足的学生在工程学领域的参与,并通过独特的“VCU纳米日”活动扩展到大里士满地区的K-12学校。此外,拟议的研究将通过创建纳米级控制系统、传感和基于探针的纳米制造的教学模块来整合到机械工程课程中。

项目成果

期刊论文数量(0)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)

数据更新时间:{{ journalArticles.updateTime }}

{{ item.title }}
{{ item.translation_title }}
  • DOI:
    {{ item.doi }}
  • 发表时间:
    {{ item.publish_year }}
  • 期刊:
  • 影响因子:
    {{ item.factor }}
  • 作者:
    {{ item.authors }}
  • 通讯作者:
    {{ item.author }}

数据更新时间:{{ journalArticles.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ monograph.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ sciAawards.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ conferencePapers.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ patent.updateTime }}

Kam Leang其他文献

Kam Leang的其他文献

{{ item.title }}
{{ item.translation_title }}
  • DOI:
    {{ item.doi }}
  • 发表时间:
    {{ item.publish_year }}
  • 期刊:
  • 影响因子:
    {{ item.factor }}
  • 作者:
    {{ item.authors }}
  • 通讯作者:
    {{ item.author }}

{{ truncateString('Kam Leang', 18)}}的其他基金

Collaborative Research: Microengineered electroactive polymer strain sensors towards soft self-powered wearable cyber-physical systems
合作研究:面向软自供电可穿戴网络物理系统的微工程电活性聚合物应变传感器
  • 批准号:
    1809455
  • 财政年份:
    2018
  • 资助金额:
    $ 25.24万
  • 项目类别:
    Standard Grant
GOALI/Collaborative Research: Precision Control of Nanopositioners
GOALI/合作研究:纳米定位器的精确控制
  • 批准号:
    1537983
  • 财政年份:
    2015
  • 资助金额:
    $ 25.24万
  • 项目类别:
    Standard Grant
COLLABORATIVE RESEARCH: HIGH-SPEED AFM IMAGING OF DYNAMICS ON BIOPOLYMERS THROUGH NON-RASTER SCANNING
合作研究:通过非光栅扫描对生物聚合物动力学进行高速 AFM 成像
  • 批准号:
    1461593
  • 财政年份:
    2014
  • 资助金额:
    $ 25.24万
  • 项目类别:
    Standard Grant
COLLABORATIVE RESEARCH: HIGH-SPEED AFM IMAGING OF DYNAMICS ON BIOPOLYMERS THROUGH NON-RASTER SCANNING
合作研究:通过非光栅扫描对生物聚合物动力学进行高速 AFM 成像
  • 批准号:
    1353101
  • 财政年份:
    2014
  • 资助金额:
    $ 25.24万
  • 项目类别:
    Standard Grant
PFI:BIC: Enhanced Situational Awareness Using Unmanned Autonomous Systems for Disaster Remediation
PFI:BIC:利用无人自治系统增强态势感知以进行灾难修复
  • 批准号:
    1430328
  • 财政年份:
    2014
  • 资助金额:
    $ 25.24万
  • 项目类别:
    Standard Grant
New: The NSF GK-12 E-Fellowship Program: Toward Energy-Aware STEM Leaders for the 21st Century
新内容:NSF GK-12 电子奖学金计划:迈向 21 世纪具有能源意识的 STEM 领导者
  • 批准号:
    1045584
  • 财政年份:
    2011
  • 资助金额:
    $ 25.24万
  • 项目类别:
    Standard Grant
NUE: Integration of Nanotechnology into the ME curriculum via Energy Efficient Systems and Dynamic Structures
NUE:通过节能系统和动态结构将纳米技术整合到 ME 课程中
  • 批准号:
    0939261
  • 财政年份:
    2009
  • 资助金额:
    $ 25.24万
  • 项目类别:
    Standard Grant
Collaborative Project: Integration of Modeling and Control of Smart Actuators for Nano/Bio Technology into Mechanical Engineering Curriculum
合作项目:将纳米/生物技术智能执行器的建模和控制融入机械工程课程
  • 批准号:
    0852756
  • 财政年份:
    2008
  • 资助金额:
    $ 25.24万
  • 项目类别:
    Standard Grant
A Novel Multifunctional SPM Probe with Modular Quick-Change Tips for Fully Automated Probe-Based Nanomanufacturing
一种新型多功能 SPM 探针,具有模块化快速更换针尖,适用于基于探针的全自动纳米制造
  • 批准号:
    0726778
  • 财政年份:
    2007
  • 资助金额:
    $ 25.24万
  • 项目类别:
    Standard Grant
Collaborative Project: Integration of Modeling and Control of Smart Actuators for Nano/Bio Technology into Mechanical Engineering Curriculum
合作项目:将纳米/生物技术智能执行器的建模和控制融入机械工程课程
  • 批准号:
    0633098
  • 财政年份:
    2007
  • 资助金额:
    $ 25.24万
  • 项目类别:
    Standard Grant

相似国自然基金

相似海外基金

Multifunctional polymers for combined algal inactivation and flocculation
用于组合藻类灭活和絮凝的多功能聚合物
  • 批准号:
    DE240100987
  • 财政年份:
    2024
  • 资助金额:
    $ 25.24万
  • 项目类别:
    Discovery Early Career Researcher Award
ERI: Self-Recognizing Composite Structural Elements (SR-CSEs): Multifunctional, Sustainable and Reliable
ERI:自我识别复合结构元件 (SR-CSE):多功能、可持续且可靠
  • 批准号:
    2347554
  • 财政年份:
    2024
  • 资助金额:
    $ 25.24万
  • 项目类别:
    Standard Grant
Multifunctional High Entropy Carbide and Boride (HECARBO) Ceramic Composites: Compositional Space, Novel Synthesis, and Property Tailoring
多功能高熵碳化物和硼化物 (HECARBO) 陶瓷复合材料:成分空间、新颖合成和性能定制
  • 批准号:
    EP/Y020804/1
  • 财政年份:
    2024
  • 资助金额:
    $ 25.24万
  • 项目类别:
    Research Grant
Multifunctional sustainable adsorbents for water treatment assisted with plasma technologies and for health protection from xenobiotics
多功能可持续吸附剂,用于等离子体技术辅助的水处理和外源性健康保护
  • 批准号:
    EP/Y037170/1
  • 财政年份:
    2024
  • 资助金额:
    $ 25.24万
  • 项目类别:
    Research Grant
Designing a Multifunctional Nanoculture System for High-throughput in situ Assessment of Microbial Communities
设计用于微生物群落高通量原位评估的多功能纳米培养系统
  • 批准号:
    2409648
  • 财政年份:
    2024
  • 资助金额:
    $ 25.24万
  • 项目类别:
    Continuing Grant
CAREER: Cyberinfrastructure for Printable Multifunctional Microstructural Materials
职业:可打印多功能微结构材料的网络基础设施
  • 批准号:
    2339764
  • 财政年份:
    2024
  • 资助金额:
    $ 25.24万
  • 项目类别:
    Standard Grant
Multifunctional nanomedicine prototypes acting as prophylactics and virus-assisted targeted drug delivery vehicle (NANOPROV)
作为预防剂和病毒辅助靶向药物输送载体的多功能纳米药物原型(NANOPROV)
  • 批准号:
    MR/Y50337X/1
  • 财政年份:
    2024
  • 资助金额:
    $ 25.24万
  • 项目类别:
    Research Grant
RII Track-4:@NASA: Process-Structure-Property Relationship of the Hybrid Manufactured Multifunctional Mechano-Luminescence-Optoelectronic Fibers
RII Track-4:@NASA:混合制造的多功能机械-发光-光电纤维的工艺-结构-性能关系
  • 批准号:
    2327493
  • 财政年份:
    2024
  • 资助金额:
    $ 25.24万
  • 项目类别:
    Standard Grant
CAREER: Development of Novel High-Performance Carbon Sink Concrete Materials Using Sustainable Multifunctional Hybrid Additives
职业:使用可持续多功能混合添加剂开发新型高性能碳汇混凝土材料
  • 批准号:
    2335878
  • 财政年份:
    2024
  • 资助金额:
    $ 25.24万
  • 项目类别:
    Standard Grant
Graphene Alliance for Sustainable Multifunctional Materials to Tackle Environmental Challenges
可持续多功能材料石墨烯联盟应对环境挑战
  • 批准号:
    10090645
  • 财政年份:
    2023
  • 资助金额:
    $ 25.24万
  • 项目类别:
    EU-Funded
{{ showInfoDetail.title }}

作者:{{ showInfoDetail.author }}

知道了