A Novel Multifunctional SPM Probe with Modular Quick-Change Tips for Fully Automated Probe-Based Nanomanufacturing

本研究的目标是通过设计，制造和测试一种新型的主动悬臂梁探针，具有自动交换探针尖端（工具）的能力，来解决基于探针的纳米纤维的吞吐量，可重复性，可扩展性和有限功能的关键问题。基于探针的制造实现了无与伦比的空间/特征分辨率以及组装和图案化混合（无机和有机）器件架构的能力。然而，具有探针尖端的实际纳米制造受到生产量、尖端磨损、尖端化学交叉污染和可扩展性的问题的限制，所有这些都降低了基于探针的制造的质量、可靠性和效率。这种独特的纳米探针系统通过实现探针尖端的自动互换来解决这些问题。通过简单地切换尖端，探针可以用于纳米沉积、图案化、加工、计量和各种其他纳米加工工艺。位于SPM悬臂的远端是一个电激活的MEMS微夹持器，其设计用于自动加载/卸载来自模块化探针尖端（工具）阵列的尖端。自动化实现了使用一种新的控制方案，以确定微夹持器和工具尖端之间的相对位置。这项研究将通过以下可行性研究提供新的知识：（1）用于SPM探针制造的有源杠杆和（2）热接近传感。该系统是一个纳米级的模拟宏观计算机数控（CNC）制造机器，具有全自动快速更换工具，而无需操作员中断的能力。提供完全自动化的按需探针尖端更换的能力将提高基于探针的纳米织物的整体效率，允许多功能探针能力，并且通过使得能够以有效的方式补充/更换磨损或化学污染的尖端来提高工艺可靠性和质量。此外，这项研究计划将扩大在工程的代表性不足的学生的参与，通过提供纳米技术的本科生和研究生的培训，参与代表性不足的学生通过招聘和研究生研究助理和本科生研究人员的指导支持，并推广到K-12学校在更大的里士满地区通过一个独特的“纳米日在VCU”事件。此外，拟议的研究将通过创建纳米级控制系统，传感和基于探针的纳米纤维的教学模块来整合到机械工程课程中。

The goal of this research is to address the critical issues of throughput, repeatability, scalability, and limited functionality of probe-based nanofabrication by designing, fabricating, and testing a novel active cantilever probe with an automated ability to interchange probe tips (tools). Probe-based fabrication enables unmatched spatial/feature resolution and the ability to assemble and pattern hybrid (inorganic and organic) device architectures. However, practical nanofabrication with probe tips is limited by the issues of throughput, tip wear, tip chemical cross contamination, and scalability all of which act to decrease the quality, reliability, and efficiency of probe-based fabrication. This unique nano probe system addresses these issues by enabling automated interchanging of probe tips. By simply switching tips, the probe can be used for nano deposition, patterning, machining, metrology, and various other nanofabrication processes. Located at the distal end of an SPM cantilever is an electrically activated MEMS-based microgripper, which is designed to automatically load/unload tips from an array of modular probe tips (tools). Automation is achieved using a novel control scheme to determine the relative location between the microgripper and tool tip. This research will contribute new knowledge via feasibility studies of (1) active cantilevers for SPM probe-based fabrication and (2) thermal-proximity sensing. This system is a nanoscale analog of macroscale computer numerical control (CNC) manufacturing machines that have the ability for fully-automated rapid tool changes without operator interruption. The ability to provide fully automated on-demand probe tip changes will improve the overall efficiency of probe-based nanofabrication, allow for multifunctional probe capabilities, and improve process reliability and quality by enabling the ability to replenish/replace worn or chemically fouled tips in an efficient manner. In addition, this research program will broaden participation of underrepresented students in engineering by providing training for undergraduate and graduate students in nanotechnology, participation of underrepresented students through recruitment and support of graduate research assistants and mentoring of undergraduate researchers, and outreach to K-12 schools in the greater Richmond area through a unique "Nano Day at VCU" event. Additionally, the proposed research will be integrated into the mechanical engineering curriculum by creating teaching modules in nanoscale control systems, sensing, and probe-based nanofabrication.