NNCI:The Kentucky Multi-scale Manufacturing and Nano Integration Node (MMNIN)

国家纳米技术协调基础设施(NNCI)肯塔基州多尺度制造和纳米集成节点(MMNIN)是路易斯维尔大学和肯塔基州大学之间的合作，专注于在广泛不同的长度尺度上集成制造技术。随着纳米技术现在成为科学发现和工程的组成部分，迫切需要基础设施来支持宏观系统中纳米级设备的快速和有效的原型制作。MMNIN的目标是将微/纳米制造工艺与最新的3D添加剂制造技术相结合，使研究人员能够探索针对医疗保健、能源、环境、通信和安全等现实问题的纳米技术解决方案。除了有机会获得最先进的工具和专业知识外，MMNIN的参与者还将进行新颖的研究，以解决多尺度制造和集成挑战，特别关注不同长度尺度、材料和制造工艺之间的接口。MMNIN最先进的多学科基础设施将为不断增长的用户群服务，这些用户群的本土机构包括高中、大学实验室、政府设施、初创企业和财富100强公司。通过新的教育和种子研究计划，MMNIN将为来自传统上代表性不足的地区和群体的用户提供独特的机会，包括美国的阿巴拉契亚地区。MMNIN的独特焦点和中心位置(一天车程内60%的美国人口)将极大地鼓励外部使用。通过这些努力，MMNIN寻求改变纳米尺度和人类尺度之间的界面，并通过迅速提供新的多尺度技术解决方案来影响社会。MMNIN将是全国第一个开放的用户设施，专注于3D微纳制造和真正的多尺度集成。用户将可以访问从纳米到米级的设计、模拟和制造资源，以及有效集成这些工艺的专业知识。在纳米尺度上，MMNIN将提供基于电子束和离子束诱导过程以及双光子聚合的快速原型制造能力，以及将原型结构转换为功能器件的专业知识。在微尺度上，用户将可以使用各种独特的制造工艺，包括用于自编程2D到3D制造的应力工程薄膜沉积、用于复杂3D结构快速原型的128级灰度光刻、使用导电、电阻、介电和生物材料的微气溶胶喷射3D打印，以及使用MMNIN的新100 CLASS 30,000平方英尺的各种传统半导体和MEMS制造工艺。英国《金融时报》洁净室设施。在中观/宏观层面，MMNIN提供自动化卷对卷制造流程和最新的添加剂制造工具，用于使用金属和/或聚合物进行3D打印定制结构和外壳。MMNIN还提供从透射电子显微镜到SQUID磁测量的各种表征技术。所有这些努力都涉及令人兴奋的研究挑战，不仅涉及工艺本身，还涉及这些工艺的集成，以在长度尺度之间建立可靠的电气、机械、光学和流体界面。因此，用户将能够创造出诸如生物兼容外壳中的纳米级传感器、具有高密度互连的人造晶体滤光片，以及从衬底扩展到与外部世界交互的纳米电子设备等系统。最终，这些能力与MMNIN教员在多规模制造和集成方面的专业知识相结合，将使用户能够快速、经济地生产产品和解决方案，以应对社会的紧迫挑战。

The National Nanotechnology Coordinated Infrastructure (NNCI) Kentucky Multi-scale Manufacturing and Nano Integration Node (MMNIN) is a collaboration between the University of Louisville and the University of Kentucky focused on integrating manufacturing technology over widely different length scales. With nanotechnology now integral to scientific discovery and engineering, there is a pressing need for infrastructure that supports the rapid and effective prototyping of nano-scale devices in macro-scale systems. The goal of the MMNIN is to combine micro/nano fabrication processes with the latest in 3D additive manufacturing technology to allow researchers to explore nanotechnology solutions to real-life problems in healthcare, energy, the environment, communication, and security. In addition to having access to state-of-the-art tools and expertise, MMNIN participants will conduct novel research addressing multi-scale manufacturing and integration challenges with a particular focus on the interfaces between different length scales, materials and manufacturing processes. The MMNIN's state-of-the-art multidisciplinary infrastructure will serve a growing user base whose home institutions include high schools, university laboratories, government facilities, startup ventures, and Fortune 100 companies. Through new educational and seed research programs, MMNIN will offer unique opportunities to users from traditionally underrepresented regions and groups, including the Appalachian region of the United States. The MMNIN's unique focus and central location (60% of the US population within a day's drive) will greatly encourage external usage. Through these efforts MMNIN seeks to transform the interfaces between the nano-scale and the human scale and impact society by rapidly providing new multi-scale technological solutions. The MMNIN will be the first open user facility nationwide with a focus on 3D micro/nano fabrication and true multi-scale integration. Users will have access to design, simulation, and fabrication resources that span the nanometer to meter scales, and the expertise to effectively integrate these processes. At the nano-scale, MMNIN will provide rapid prototyping capabilities based on election- and ion-beam induced processes and two-photon polymerization along with the expertise to convert the prototyped structures to functional devices. At the micro-scale, users will have access to a variety of unique fabrication processes including stress engineered thin-film deposition for self-programmed 2D to 3D fabrication, 128 level grayscale lithography for rapid prototyping of complex 3D structures, micro aerosol jet 3D printing using conductive, resistive, dielectric and biological materials, as well as a diversity of traditional semiconductor and MEMS fabrication processes using MMNIN's new class 100 $30M, 10,000 sq. ft. cleanroom facility. At the meso/macro-scale, MMNIN offers automated roll-to-roll manufacturing processes and the latest in additive manufacturing tools for 3D printing custom structures and enclosures using metals and/or polymers. MMNIN also offers a variety of characterization techniques ranging from transmission electron microscopy to squid magnetometry. All of these efforts involve exciting research challenges, not only on the processes themselves, but also on the integration of these processes to make reliable electrical, mechanical, optical, and fluidic interfaces between the length scales. As a result, users will be able to create systems such as nano-scale sensors in biocompatible enclosures, artificial crystalline optical filters with high density interconnects, and nano-electronics that expand from the substrate to interact with the external world. Ultimately, these capabilities, combined with the MMNIN faculty expertise in multi-scale manufacturing and integration, will allow users to rapidly and economically produce products and solutions addressing society's pressing challenges.