An Advanced Undergraduate Laboratory for Microfabrication

凯文·M·沃尔什应于路易斯维尔大学9551869财年支付217,273美元KY 40292 ILI-实验室发展的领导地位：工程学标题：微细加工的高级本科实验室这个项目是为了开发一门以实验室为基础的普通微细加工技术和过程的本科课程。微制造最初是由微电子工业开发的，用于批量制造微型集成电路。直到最近，它才被应用到其他领域和学科。微电子制造技术在非电子学科中的缓慢渗透是因为微电子制造技术传统上只教授电气工程研究生或专门学习微电子设备的本科生。为了开发微制造的非电子跨学科应用，需要将这项技术适当地转让给感兴趣的受众。正在开发的实验室课程通过将这种多功能和强大的技术介绍给更广泛的受众基础，填补了这一缺失的一环。微制造可以为机械和物理世界所做的事情，就像微电子制造为电子世界所做的那样。微制造领域具有巨大的潜力，许多应用于各种学科都是可能的。然而，除非更广泛的受众接触到微制造，并更早地将其引入学术课程，否则这些应用中的大多数永远不会实现。

Kevin M. Walsh DUE 9551869 University of Louisville FY1995 $ 217,273 Louisville, KY 40292 ILI - Leadership in Laboratory Development: Engineering Title: An Advanced Undergraduate Laboratory for Microfabrication This project is for the development of a laboratory-based undergraduate course in general microfabrication techniques and processes. Microfabrication was originally developed by the microelectronics industry to batch-fabricate miniature integrated circuits. Only recently has it been applied to other fields and disciplines. The slow infiltration of microfabrication technology into the non-electronic disciplines is due to the fact that microelectronic fabrication techniques have traditionally only been taught to graduate electrical engineering students or undergraduate students specifically studying microelectronic devices. In order for non-electronic interdisciplinary applications of microfabrication to be developed, an appropriate transfer of this technology to the interested audience needs to take place. The laboratory course being developed serves as that missing link by introducing this versatile and powerful technology to a broader audience base. Microfabrication can do for the mechanical and physical world what microelectronic fabrication did for the electronic world. The world of microfabrication has tremendous potential, and numerous applications to a wide spectrum of disciplines are possible. However, the majority of those applications will never be realized unless microfabrication is exposed to a broader audience and introduced earlier into the academic curriculum.