Collaborative Research: Improving Capabilities of Micro-scale Vibratory Systems by Embracing and Accounting for Large-Amplitude Responses

该项目考虑开发技术来帮助设计和优化利用共振振动的微电子机械系统(MEMS)。这些微型设备是许多消费电子产品和产品中的重要元素，包括无线电话、汽车和娱乐设备。这些系统的能力往往受到许多因素的限制，这些因素限制了它们的运行范围，例如它们的最大振动幅度。这项研究致力于从根本上理解这些限制，并开发系统的工具来改善这些设备的性能。该项目的更广泛影响包括外联、指导和培训、吸纳代表性不足群体的学生、编写受研究激励的课堂材料以及传播成果。该项目将对学生进行多学科培训，他们将受益于私人投资机构的密切合作以及综合的理论和实验研究方法。此外，PI及其研究生将继续长期参与针对初中生和高中生的暑期外展计划，并包括本科生研究助理。PIS还计划为研究生创建一个校友指导计划，在该计划中，当前的研究生将与提供专业建议和支持的校友联系起来。大多数采用振动MEMS的商业设备的设计使谐振元件在其线性范围内工作，设计师可以依靠简单的模型来分析它们的响应。然而，这对它们的工作范围设置了限制，没有充分利用它们的潜力。最近的研究表明，当系统地将非线性效应包括在MEMS设计过程中时，性能会有显著的改善。这个项目的重点是拥抱谐振器中的非线性行为，发展对随之而来的限制的理解，并开发和实验演示允许人们在这一领域优化性能的设计方法。研究的重点是工作在一个或两个基本振动模式的MEMS，这些模式可以用弱非线性模型来描述，以便应用分析方法，即摄动技术和规范形理论。这些模型与多种物理计算工具和优化技术联系在一起，使用范式为感兴趣的应用程序制定目标函数。使用这些工具开发的设备将被制造、表征和测试，以验证该方法。应用将包括频率产生、频率转换和惯性传感。

This project considers the development of techniques to assist in the design and optimization of micro-electro-mechanical-systems (MEMS) that utilize resonant vibrations. These micro-scale devices are important elements in many consumer electronics and products including wireless telephones, automobiles, and entertainment devices. The capabilities of these systems are often limited by a number of factors that restrict their range of operation, such as their maximum amplitude of vibration. This research pursues a fundamental understanding of these limitations and developing systematic tools for improving the performance of these devices. The broader impact of this project includes outreach, mentoring and training, inclusion of students from underrepresented groups, development of classroom materials motivated by the research, and dissemination of results. This project will result in multidisciplinary training of students, who benefit from the close collaboration and integrated theoretical and experimental research approach of the PIs. Also, the PIs and their graduate students will continue their longstanding participation in summer outreach programs to middle- and high-school students, and the inclusion of undergraduate research assistants. The PIs also plan to create an alumni mentoring program for graduate students, in which current graduate students will be connected with alumni who will offer professional advice and support.Most commercial devices that employ vibratory MEMS are designed so that the resonant elements operate in their linear range and the designer can rely on simple models to analyze their response. However, this sets limits on their operating range that do not take full advantage of their potential. There have been recent efforts demonstrating significantly improved performance when nonlinear effects are systematically included in the MEMS design process. The focus of this project is to embrace nonlinear behavior in resonators, to develop an understanding of the attendant limits, and to develop and experimentally demonstrate design methods that allow one to optimize performance in this realm. The research focus is on MEMS that operate with one or two fundamental vibratory modes that can be described by weakly nonlinear models so that analytical methods, namely perturbation techniques, and the theory of normal forms, are applicable. These models are linked with multi-physics computational tools and optimization techniques, using normal forms to formulate objective functions for the applications of interest. Devices developed with these tools will be fabricated, characterized, and tested to validate the approach. Applications will include frequency generation, frequency conversion, and inertial sensing.