Collaborative Research: Nonlinear Coupling and Relaxation Mechanisms in Micro-mechanics

合作研究：微观力学中的非线性耦合和弛豫机制

• 批准号: 1662500
• 负责人: Kimberly Foster
• 金额: $ 35.4万
• 依托单位: University of California-Santa Barbara
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2017
• 资助国家: 美国
• 起止时间: 2017-09-01 至 2023-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1662500&HistoricalAwards=false
• 关键词: Collaborative; Research; Nonlinear; Coupling; Relaxation

Micro-scale electro-mechanical-systems are at the cutting edge of modern technology. They have small size and mass and allow the implementation of various types of control. Many consumer, industrial, and military devices rely on these systems for sensing and signal conditioning. Speed, precision, stability, and reliability are important characteristics of their performance. Vibrations are at the core of the operation of many of these micro-electro-mechanical systems. This project involves a fundamental study of the vibrations of these systems, with the goal to establish what properties limit their performance and how this performance can be improved. The development of physics-based models for these vibrations, using both theoretical and experimental tools, will provide key understanding that will allow for new modes of operation and enhanced capabilities. And, while the experimental aspects of the project will focus on micro-electro-mechanical systems, the vibration and noise models developed will be general and applicable to optical systems and to even smaller mechanical devices that operate at the nanoscale, paving the way for further progress in nanotechnology. The broader impacts of the project include outreach, mentoring and training of undergraduate and graduate students, inclusion of students from underrepresented groups, development of classroom materials motivated by the research, and dissemination of results. The project will result in multidisciplinary training of students at four universities who will benefit from the combined analytical, computational, and experimental research experiences.Because of their small size, micro-electro-mechanical vibrational systems are intrinsically noisy. Another consequence of the small size is that obtaining a sufficiently strong signal requires operating in a regime where the vibration amplitudes are large, making the vibrations nonlinear. The interplay of nonlinearity and noise leads to new phenomena, and these must be understood in order to avoid them, or to utilize them in applications. In this context, nonlinear resonant phenomena are particularly interesting, rich, intellectually challenging, and promising for implementation in micro-scale devices. The behavior of resonating nonlinear modes in the presence of decay and noise, as well as the fundamental microscopic mechanisms of noise, decay, and nonlinearity are poorly understood. Nor is it understood how to detect and characterize fluctuations in nonlinear systems, as they are intervened with the nonlinearity in a nontrivial way. The work will address these issues both theoretically and in experiments. It will also develop new techniques for experimental control and characterization of resonating modes using optical and electrostatic methods. The principal investigators have an established record of collaboration, which will strengthen a close connection between the theoretical and experimental work.

微尺度机电系统是现代技术的前沿。它们具有小的尺寸和质量，并允许实施各种类型的控制。 许多消费者、工业和军事设备都依赖这些系统进行传感和信号调理。 速度、精度、稳定性和可靠性是其性能的重要特征。 振动是许多这些微机电系统的操作的核心。 该项目涉及对这些系统的振动进行基础研究，目的是确定哪些特性限制了它们的性能以及如何提高性能。使用理论和实验工具为这些振动开发基于物理的模型，将提供关键的理解，这将允许新的操作模式和增强的能力。 而且，虽然该项目的实验方面将集中在微电子机械系统，但开发的振动和噪声模型将是通用的，适用于光学系统和在纳米尺度上运行的更小的机械设备，为纳米技术的进一步发展铺平了道路。 该项目更广泛的影响包括对本科生和研究生进行外联、辅导和培训，将代表性不足群体的学生纳入其中，编写以研究为动机的课堂材料，以及传播研究结果。 该项目将对四所大学的学生进行多学科培训，他们将从分析、计算和实验研究经验中受益。小尺寸的另一个结果是，获得足够强的信号需要在振动幅度大的状态下操作，使得振动非线性。非线性和噪声的相互作用会导致新的现象，必须理解这些现象才能避免它们，或在应用中利用它们。 在这种情况下，非线性谐振现象是特别有趣的，丰富的，智力上的挑战，并有希望在微尺度器件的实施。在衰减和噪声的存在下，共振非线性模式的行为，以及噪声，衰减和非线性的基本微观机制知之甚少。人们也不知道如何检测和表征非线性系统中的波动，因为它们以非平凡的方式与非线性进行干预。这项工作将在理论和实验中解决这些问题。 它还将开发新的技术，利用光学和静电方法对共振模式进行实验控制和表征。主要研究人员有一个既定的合作记录，这将加强理论和实验工作之间的密切联系。

项目成果

Amplitude stabilization of micromechanical oscillators using engineered nonlinearity

• DOI: 10.1103/physrevresearch.3.033268
• 发表时间: 2021-09
• 期刊: Physical Review Research
• 影响因子: 4.2
• 作者: J. M. Miller;Ariosto Gomez-Franco;D. D. Shin-D.;Hyun-Keun Kwon;T. Kenny

Tuning Frequency Stability in Micromechanical Resonators with Parametric Pumping

使用参数泵浦调节微机械谐振器的频率稳定性

• DOI: 10.1109/mems51670.2022.9699669
• 发表时间: 2022
• 期刊: 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS
• 作者: Bousse, Nicholas E.;Miller, James M.L.;Vukasin, Gabrielle D.;Kwon, Hyun-Keun;Shaw, Steven W.;Kenny, Thomas W.
• 通讯作者: Kenny, Thomas W.

Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators

远程边界条件对微机械谐振器钳位损耗的影响

• DOI: 10.1109/jmems.2021.3136885
• 发表时间: 2022
• 期刊: Journal of Microelectromechanical Systems
• 影响因子: 2.7
• 作者: Miller, James M.;Vukasin, Gabrielle D.;Zhang, Ze;Kwon, Hyun-Keun;Majumdar, Arun;Kenny, Thomas W.;Shaw, Steven W.
• 通讯作者: Shaw, Steven W.

Dispersive readout of a high-Q encapsulated micromechanical resonator

高 Q 值封装微机械谐振器的色散读数

• DOI: 10.1063/5.0101402
• 发表时间: 2022
• 期刊: Applied Physics Letters
• 影响因子: 4
• 作者: Bousse, Nicholas E.;Kuenstner, Stephen E.;Miller, James M. L.;Kwon, Hyun-Keun;Vukasin, Gabrielle D.;Teufel, John D.;Kenny, Thomas W.
• 通讯作者: Kenny, Thomas W.