Collaborative Research: MEMS from Organized Mesoscale Architectures of Carbon Nanotubes

这项研究的目的是利用微电子机械系统MEMS平台，利用高度定向的多壁碳纳米管的驱动和传感的有组织的中尺度结构的中尺度组件。特别是，我们将在硅基MEMS结构上使用优先生长的碳纳米管来创建一类新的器件和微系统。碳纳米管-MEMS混合结构将通过Si/SiO_2工艺和独特的多方向碳纳米管生长工艺相结合来制备。然后，我们将测量各种结构的机械驱动和响应动力学，包括悬臂梁、扭梁、各种形状的薄膜在惰性和电化学活性环境中的应用，如基于电脉冲的触发和传感。机械系统中的转换方案。这项工作的智力优势使我们能够通过标准的微米和纳米制造，将单个碳纳米管的吸引人的特性转化为一种全新的“突破性”技术，即基于硅上纳米管-介观结构的微器件。这项拟议的研究有可能展示一种全新的“突破性”技术，为将碳纳米管集成到MEMS平台铺平道路，从而产生各种基于纳米技术的新型微设备、致动器和传感器。更广泛的影响涉及到许多教育层面的互动。通过以前在MESA(CA Science Expansion Program)的支持下建立的联系，PI和这笔赠款支持的研究生和/或REU计划访问初中的科学课程，并进行与纳米研究有关的科学实验。这个新出现的令人兴奋的领域将作为我们外展活动的媒介，以吸引聪明的高中生进入科学和工程专业。

The objective of this research is to harness mesoscale assemblies of organized mesoscale architectures of highly oriented multi-walled CNT's actuation and sensing using the microelectromechanical systems MEMS platform. In particular, we will create a new class of devices and microsystems using preferentially grown CNTs on Si-based MEMS structures. The CNT-MEMS hybrid structures will be fabricated by a combination of Si/SiO2 processing and a unique multidirectional CNT growth process. We will then measure the mechanical actuation and response dynamics of a wide variety of structures including cantilevers, torsion beams, membranes of various shapes in inert and electrochemically active environments for applications such as electrical-pulse based triggering and sensing. transduction schemes in mechanical systems. The intellectual merits of this work enable the translation of the attractive properties of individual CNTs into a completely new "break-through" technology of nanotube-mesostructrure-based microdevices on silicon via standard micro and nanofabrication. The proposed research has the potential to demonstrate a completely new "break-through" technology that will pave the path for integration of CNTs into MEMS platforms, yielding a variety of new nanotechnology-based microdevices actuators and sensors. The broader impacts involve interaction at many educational levels. Through connections previously established with the support of MESA(CA Science outreach program), the PI and the graduate students and/or REU's supported by this grant plan to visit science classes in the Junior high, and conduct science experiments related to nanoscale research. This newly emerging and exciting area will serve as a medium in our outreach activities to attract bright high-school students to science and engineering.