Directed Self Assembly of Triblock Terpolymer Films

三嵌段三元共聚物薄膜的定向自组装

• 批准号: 1606911
• 负责人: Caroline Ross
• 金额: $ 36万
• 依托单位: Massachusetts Institute of Technology
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2016
• 资助国家: 美国
• 起止时间: 2016-06-01 至 2019-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1606911&HistoricalAwards=false
• 关键词: Directed; Self; Assembly; Triblock; Terpolymer

NON-TECHNICAL SUMMARY: Block copolymers are a class of polymeric materials whose molecules can come together when cast from solution to form intricate, regular three-dimensional internal structures called microdomains. These microdomains can have dimensions of a few nanometers (billionths of a meter) and above, and their geometry and chemistry can be controlled through the design of the block copolymer. Most work has focused on block copolymers with two types of microdomains, but this project examines the behavior of block copolymers in which three different types of microdomain are simultaneously present, producing a wide range of complex geometries. It investigates the conditions under which different arrangements of microdomains are formed in thin films of these materials, and it demonstrates their technological usefulness, in particular for semiconductor device manufacturing, where the microdomain patterns can be used to define features smaller than those available from conventional manufacturing processes. This may allow future scaling of devices to higher densities, producing cheaper and faster memories or microprocessors. Other applications include catalysis or filtration where surfaces are required with particular chemistry or porosity. The work will involve graduate and undergraduate students in an interdisciplinary environment combining experiment and theory. Outreach will include the creation of online learning materials, summer projects for teachers and community college students, and public activities at the Cambridge Science Festival.TECHNICAL SUMMARY: Block copolymers microphase separate into periodic nanoscale structures, making them candidates for a range of applications including nanolithography and filtration. The great majority of work on thin film block copolymers has focused on diblock copolymers, but triblock terpolymers, which include three different blocks in a linear or star architecture, enable a much wider range of thin film morphologies including tiling patterns, square symmetry patterns, and structures with 90 degree bends. The proposed work will show how the morphologies of triblock terpolymer films can be controlled via interplay between the polymer composition and the processing conditions, and how specific morphologies can be templated using topographical substrate features, using coordinated experiments and theoretical investigations using self consistent field theory. The combination of triblock terpolymer volume fractions, molecular architecture, interaction parameters, film thickness, and solvent annealing with template geometry and substrate surface chemistry provides a rich parameter space within which an understanding of the kinetics and thermodynamics of microphase separation as well as the formation of technologically useful structures can be accomplished. The broader impacts of this work originate from the transformative potential of triblock terpolymers to produce nanoscale patterns relevant to nanolithography and nanomanufacturing, both in the microelectronics industry and in fields where a chemically heterogeneous surface with specific geometry is required. The work will involve graduate and undergraduate students in an interdisciplinary environment combining experiment and theory. Outreach will include the creation of online learning materials, summer projects for teachers and community college students, and public activities at the Cambridge Science Festival.

非技术性总结：嵌段共聚物是一类聚合物材料，当从溶液中浇铸时，其分子可以聚集在一起，形成称为微区的复杂，规则的三维内部结构。这些微区可以具有几纳米（十亿分之一米）及以上的尺寸，并且它们的几何形状和化学性质可以通过嵌段共聚物的设计来控制。大多数工作都集中在具有两种类型微区的嵌段共聚物上，但该项目研究了嵌段共聚物的行为，其中同时存在三种不同类型的微区，产生了广泛的复杂几何形状。它研究了在这些材料的薄膜中形成不同排列的微区的条件，并证明了它们的技术实用性，特别是对于半导体器件制造，其中微区图案可用于定义比传统制造工艺中可用的特征更小的特征。这可能允许将来将设备扩展到更高的密度，生产更便宜和更快的存储器或微处理器。其他应用包括催化或过滤，其中表面需要具有特定的化学性质或多孔性。这项工作将涉及研究生和本科生在实验和理论相结合的跨学科环境。外联活动将包括创建在线学习材料，为教师和社区学院学生开展暑期项目，以及在剑桥科学节上开展公共活动。技术概要：嵌段共聚物微相分离成周期性纳米级结构，使其成为包括纳米光刻和过滤在内的一系列应用的候选者。关于薄膜嵌段共聚物的绝大多数工作集中在二嵌段共聚物上，但是三嵌段三元共聚物（其包括线性或星星结构中的三个不同嵌段）能够实现更宽范围的薄膜形态，包括平铺图案、正方形对称图案和具有90度弯曲的结构。拟议的工作将显示如何通过聚合物组合物和加工条件之间的相互作用，以及如何特定的形态可以使用地形基板功能模板，使用协调的实验和理论研究，使用自洽场理论的三嵌段双金属薄膜的形态可以控制。三嵌段共聚物的体积分数，分子结构，相互作用参数，膜厚度，和溶剂退火与模板的几何形状和基板表面化学的组合提供了一个丰富的参数空间内的微相分离的动力学和热力学的理解，以及技术上有用的结构的形成可以完成。这项工作的更广泛的影响源于三嵌段三元共聚物的变革潜力，以产生与纳米光刻和纳米制造相关的纳米级图案，无论是在微电子行业还是在需要具有特定几何形状的化学异质表面的领域。这项工作将涉及研究生和本科生在实验和理论相结合的跨学科环境。推广活动将包括创建在线学习材料，为教师和社区大学学生开展暑期项目，以及在剑桥科学节上开展公共活动。