Directed Self-Assembly of Block Copolymer Thin Films into Useful Organized Patterns for Microelectronics and Nanofabrication.

将嵌段共聚物薄膜定向自组装成微电子和纳米制造有用的组织图案。

• 批准号: 2011254
• 负责人: Michael Arnold
• 金额: $ 34.59万
• 依托单位: University of Wisconsin-Madison
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2020
• 资助国家: 美国
• 起止时间: 2020-09-01 至 2024-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2011254&HistoricalAwards=false
• 关键词: Directed; Self; Assembly; Block; Copolymer

This grant supports research that creates new understanding and capabilities regarding a manufacturing process enabling the fabrication of patterns and features on surfaces that are extremely small -- only a few billionths of a meter (a few nanometers) in extent. Precision fabrication at these lengths is driving manufacturing advances in areas of national importance including microelectronics, optical materials, sensors, chemical purification membranes, and quantum materials. This award supports fundamental research on block copolymer-based nanofabrication. When two different conventional polymers that do not “like” each other are mixed, the two polymers separate – like oil and water. However, when these two polymers are bonded to each other – to form a block copolymer – macroscopic separation is inhibited, and nanoscale segregation occurs instead. Features smaller than hundred (100), ten (10), and even five (5) nanometers are generated automatically, that cannot be easily created otherwise. This project focuses on spatially directing this nanoscale segregation on surfaces so that rationally organized and useful (as opposed to random) patterns can be formed. An example is nanopatterning the surfaces of semiconductors for computer chips so that they perform faster, are more energy efficient, and can be more complex. The research integrates advanced concepts from materials science and engineering, chemistry, and nanomanufacturing. The interdisciplinary research helps widen the involvement of diverse groups in fundamental research and constructively influences science and engineering education.This research specifically addresses the challenge of registering and directing the self-assembly of vertically oriented block copolymer lamellar domains into rationally controlled sub-lithographic patterns through the exploitation of boundary-directed epitaxy. Boundary-directed epitaxy uses the abrupt chemical contrast that is inherent at spatial boundaries between regions on a substrate with different surface composition to direct the registration, alignment, and self-assembly of block copolymers. The advantages are substantial: the boundaries can be defined between features that are planar and relatively large – circumventing the need for trenches or high-resolution chemical patterns. The mechanisms that drive self-assembly are highly unexplored. The project determines the chemical composition / preferentiality window for boundary-directed epitaxy; quantifies the impact of boundary-roughness on assembly; characterizes how defects arise; and understands how the assembly evolves over time. The project studies and demonstrates boundary-directed epitaxy for nanofabrication, materials synthesis, and nanolithography; investigates assembly on templates with curved boundaries and complex shapes – essential for many applications; and, broadens the library of template materials that can be exploited to advance the generality of the phenomenon.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

这项资助支持的研究创造了新的理解和能力，使制造过程能够在极小的表面上制造图案和特征-只有几十亿分之一米（几纳米）的范围。这些长度的精密制造正在推动国家重要领域的制造业进步，包括微电子，光学材料，传感器，化学净化膜和量子材料。该奖项支持基于嵌段共聚物的纳米制造的基础研究。当两种不同的传统聚合物，不“喜欢”对方混合，两种聚合物分离-像油和水。然而，当这两种聚合物彼此键合形成嵌段共聚物时，宏观分离被抑制，而发生纳米级分离。小于一百（100），十（10），甚至五（5）纳米的特征是自动生成的，否则无法轻松创建。这个项目的重点是空间定向表面上的这种纳米级分离，以便合理组织和有用的（而不是随机的）模式可以形成。一个例子是对计算机芯片的半导体表面进行纳米图案化，以便它们执行得更快，更节能，并且可以更复杂。该研究整合了材料科学与工程，化学和纳米制造的先进概念。跨学科的研究有助于拓宽基础研究中的不同群体的参与和建设性地影响科学和工程教育。本研究特别解决了通过利用边界定向外延将垂直取向的嵌段共聚物片层结构域自组装成合理控制的亚光刻图案的挑战。边界定向外延使用在具有不同表面组成的衬底上的区域之间的空间边界处固有的突变化学对比来指导嵌段共聚物的配准、对准和自组装。其优点是实质性的：可以在平坦且相对较大的特征之间限定边界，从而避免了对沟槽或高分辨率化学图案的需要。驱动自组装的机制还非常未被探索。该项目确定了边界定向外延的化学成分/优先窗口;量化了边界粗糙度对组装的影响;表征了缺陷是如何产生的;并了解了组装如何随着时间的推移而演变。该项目研究和演示纳米纤维、材料合成和纳米光刻的边界定向外延;研究在具有弯曲边界和复杂形状的模板上的组装-这对许多应用至关重要;并且，在本发明中，该奖项反映了NSF的法定使命，并被认为值得通过使用基金会的学术价值和更广泛的影响审查标准。

项目成果

Boundary-Directed Epitaxy of Block Copolymers Toward Sub-10 nm Fabrication

面向亚 10 nm 制造的嵌段共聚物的边界定向外延

• DOI: 10.1149/11101.0011ecst
• 发表时间: 2023
• 期刊: ECS Transactions
• 作者: Su, Katherine Anna;Jacobberger, Robert;Stan, Liliana;Arnold, Michael Scott
• 通讯作者: Arnold, Michael Scott