Sensing and Imaging with Motion in Structured Optical Illumination

结构化光学照明中的运动传感和成像

• 批准号: 1610068
• 负责人: Kevin Webb
• 金额: $ 34万
• 依托单位: Purdue University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2016
• 资助国家: 美国
• 起止时间: 2016-07-01 至 2019-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1610068&HistoricalAwards=false
• 关键词: Sensing; Imaging; Motion; Structured; Optical

Title: Sensing and Imaging with Motion in Structured Optical Illumination AbstractNon-technical: Enhanced information about an object is available with optical measurements as a function of object position, with either natural motion or controlled adjustment of position. This concept is being exploited in an imaging and detection method having two facets. In one, speckled patterns of scattered laser light measured as a function of object position are being used to reconstruct the obscured moving object. The initial experiments use scanned dielectric objects between scattering acrylic sheets, allowing control over all relevant variables, which will enable applications including optical imaging in living subjects, such as cells and contrast agents deep within the brain, and imaging given environmental clutter. The safety, convenience, resolution, and information available from optical imaging in these applications are paramount. Of particular significance, the method will be effective for very heavy scatter, making it possible to image through substantial amounts of tissue. At a more general level, the effort relates to new opportunities for communication in a scattering environment that exploit natural motion and spatial diversity. The other aspect of the work involves use of optical measurements as a function of the precise position of a semiconductor wafer in a spatially varying optical intensity to find defects at an early stage of manufacture. This addresses a major need in industry, because there is no satisfactory method to find defects in three-dimensional devices that have become important in consumer electronics. This approach is being evaluated using example material arrangements with an introduced defect. Understanding from this aspect of the project will also be useful in other applications related to structure and material characterization. Technical: Laser optical speckle patterns as a function of object position are being used to form intensity correlations over position. This data has been shown to provide access to information about the moving object, and through a reconstruction method, to an image of the hidden object. For example, the image of a hidden aperture has been obtained. The key aspect being sought is evidence that the object's dielectric constant as a function of position can be obtained, thereby establishing the general principle of imaging in heavily scattering media. Experiments use scattering media with controlled properties and a translation stage. Information on the possible resolution is also being investigated. The other aspect of this project involves use of a model material arrangement representative of a semiconductor wafer with a defect, whereby the sample is scanned using a piezoelectric stage in an optical standing wave field created by illumination with a laser and reflection from a mirror. Detected light as a function of sample position, coupled with a model, allows the presence of a defect to be determined. The efficacy of this approach is being evaluated for application in the semiconductor wafer inspection industry. Because existing optical inspection methods are incapable of adequately detecting small defects in three-dimensional semiconductor structures, the prospect that this approach will provide a solution could address a multi-billion-dollar inspection market need.

职务名称：结构化光学照明中的运动传感和成像摘要非技术性：通过自然运动或位置的受控调整，可以利用作为对象位置的函数的光学测量来获得关于对象的增强信息。该概念在具有两个方面的成像和检测方法中被利用。在一个，散斑模式的散射激光测量作为对象位置的函数被用来重建被遮挡的移动对象。最初的实验使用散射丙烯酸片之间的扫描电介质对象，允许控制所有相关变量，这将使应用包括活体中的光学成像，如大脑深处的细胞和造影剂，以及给定环境杂波的成像。在这些应用中，光学成像的安全性、便利性、分辨率和可用信息至关重要。特别重要的是，该方法对于非常重的散射将是有效的，使得可以通过大量的组织成像。在更一般的层面上，这项工作涉及到利用自然运动和空间多样性的散射环境中的通信新机会。工作的另一方面涉及使用光学测量作为半导体晶片在空间变化的光强度中的精确位置的函数，以在制造的早期阶段发现缺陷。这解决了工业中的主要需求，因为没有令人满意的方法来发现在消费电子产品中变得重要的三维器件中的缺陷。这种方法正在使用引入缺陷的示例材料布置进行评估。从项目的这一方面的理解也将是有用的，在其他相关的结构和材料表征的应用。技术：作为物体位置函数的激光光学散斑图案被用于形成位置上的强度相关性。该数据已经被示出为提供对关于移动对象的信息的访问，并且通过重建方法提供对隐藏对象的图像的访问。例如，已经获得了隐藏光圈的图像。正在寻求的关键方面是证据表明，对象的介电常数作为位置的函数可以获得，从而建立在严重散射介质中成像的一般原则。实验使用具有受控特性的散射介质和平移台。关于可能的解决方案的信息也正在调查中。该项目的另一方面涉及使用代表具有缺陷的半导体晶片的模型材料布置，由此使用压电台在由激光照射和反射镜反射产生的光学驻波场中扫描样品。检测到的光作为样品位置的函数，与模型相结合，允许确定缺陷的存在。这种方法的有效性正在评估应用在半导体晶圆检测行业。由于现有的光学检测方法不能充分检测三维半导体结构中的小缺陷，因此这种方法将提供解决方案的前景可以解决数十亿美元的检测市场需求。