High Throughput Magnetic Optical Nano-Milling of Thin Layer Materials with Designed Nano-Chisels

使用设计的纳米凿子对薄层材料进行高通量磁光纳米铣削

• 批准号: 1636101
• 负责人: Gary Cheng
• 金额: $ 5万
• 依托单位: Purdue University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2016
• 资助国家: 美国
• 起止时间: 2016-09-01 至 2019-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1636101&HistoricalAwards=false
• 关键词: Throughput; Magnetic; Optical; Nano; Milling

High throughput large scale nanomachining of sub-100nm nanostructure has lots of applications in electronics, environmental, energy, medical devices, and optical industries (e.g. membranes in drug delivery, ultrafiltration for separations technologies, nanofluidic devices for the separation of biomolecules, substrates for solid oxide fuel cells). There is an increasing demand for technologies capable of patterning surfaces at the nanoscale with high precision, high throughput, and in a cost effective manner. Currently, the desired nanoscale patterning accuracy can be achieved using electron-beam lithography (EBL), focused ion-beam (FIB) lithography, tip enhanced scanning probe microscopy (SPM), and optical nanolithography. These methods usually suffer from being slow, small area and low throughput. The resolution of laser machining is limited by diffraction and the wavelength of lasers. This award supports scientific investigations on a new nanomachining technique to generate ultra-fine nanohole arrays in various thin materials with high throughput. This project will advance fundamental nanomachining technology by bringing hybrid energy field into laser materials processing, and breaking the barrier of large scale laser micromachining from the diffraction limit of laser wavelength. The results from this research can realize on-demand nanomachining in many materials with high efficiency, product quality, tunability, and flexibility that is considered impossible before. The PI is involved in the RUE and RET program, is committed to involving women and underrepresented minorities in research activities, and will leverage a Purdue program to expose high school instructors to his research. The proposed project will benefit many research areas such as electromagnetism, plasmonics and machining.This projects aims to develop on a novel hybrid nanomachining process, namely magnetic-optical-nano-milling, to produce large area nanochannel arrays in thin layer substrates. The research objective is to quantitatively understand the relationship between process parameters and associated physical mechanisms in magnetic-optical-nano-milling and determine processing conditions for desired patterns in various thin film substrates. Specifically, this project will formulate a physics-based computational model for magnetic-optical-nano-milling, which will delineate the laser-nanoparticle-substrate interaction during the hybrid machining process and predict the important physical phenomena such as milling speed, photothermal induced phase change, laser energy transportation. The project will verify the developed model through experimental measurements of important parameters in magnetic-optical-nano-milling of polymer membrane. The effects of various processing conditions on the temperature distribution, nano-milling rate and profile of nanoholes will be studied. The interplay between the thin film substrates and nanoparticles during the process will also be investigated. This project will promote research and education opportunities for high school teachers, graduate and undergraduates, under-represented groups in Indiana. The research outcomes will be integrated into undergraduate/graduate course development, and contributed to nanoHUB by launching research and learning codes resulted from this project online with full documentation and tutorials.

高吞吐量的大规模纳米纳米机械纳米结构在电子，环境，能源，医疗设备和光学行业中有很多应用（例如，药物输送的膜，分离技术的超滤，纳米富集设备的超滤光器，用于分离生物胶质物的固体氧化物燃料细胞的分离）。 对能够以高精度，高通量和具有成本效益的方式在纳米级对表面进行构图的技术的需求不断增加。当前，可以使用电子束光刻（EBL），聚焦离子束（FIB）光刻，尖端增强的扫描探针显微镜（SPM）和光学纳米造影来实现所需的纳米级图案精度。 这些方法通常会遭受缓慢，小面积和低吞吐量的影响。 激光加工的分辨率受激光的衍射和波长的限制。 该奖项支持对一种新的纳米机械技术的科学研究，以产生具有高吞吐量的各种薄薄材料的超细纳米钻阵列。该项目将通过将混合能场加入激光材料处理，并从激光波长的衍射极限中破坏大规模激光微机械的障碍，从而推动基本的纳米机械技术。 这项研究的结果可以实现许多以前被认为是不可能的效率，产品质量，可调节性和灵活性的许多材料中的按需纳米机械加油。 PI参与了RUE和RET计划，致力于使妇女和人数不足的少数群体参与研究活动，并将利用Purdue计划使高中教师接受他的研究。拟议的项目将使许多研究领域受益，例如电磁，等离子间和加工。此项目旨在开发一种新型的混合纳米机械工艺，即磁光纳米磨砂，以在薄层底物中生产大面积的纳米色渠阵列。研究目标是定量地了解磁性纳米填充过程中的过程参数与相关物理机制之间的关系，并确定各种薄膜底物中所需模式的处理条件。具体而言，该项目将制定一个基于物理的计算模型，用于磁性纳米销售，该模型将在混合加工过程中描绘激光 - 纳米粒子 - 基底互动，并预测诸如铣削速度，光热诱导的相位相变的重要物理现象。该项目将通过对聚合物膜的磁光纳米填充重要参数的实验测量来验证开发的模型。 将研究各种加工条件对温度分布，纳米磨砂速率和纳米霍尔斯曲线的影响。 在此过程中，薄膜底物与纳米颗粒之间的相互作用也将进行研究。 该项目将促进印第安纳州高中教师，研究生和本科生的研究和教育机会。研究成果将纳入本科/研究生课程的开发，并通过启动该项目的研究和学习代码为NanoHub提供了贡献，并通过完整的文档和教程。