High Throughput Magnetic Optical Nano-Milling of Thin Layer Materials with Designed Nano-Chisels

亚100nm纳米结构的高通量大规模纳米加工在电子、环境、能源、医疗设备和光学工业（如药物输送膜、分离技术的超滤、分离生物分子的纳米流体装置、固体氧化物燃料电池的衬底）中有着广泛的应用。对于能够以高精度、高通量和低成本的方式在纳米尺度上对表面进行图像化的技术的需求越来越大。目前，可以使用电子束光刻（EBL）、聚焦离子束光刻（FIB）、尖端增强扫描探针显微镜（SPM）和光学纳米光刻来实现所需的纳米级图像化精度。这些方法的缺点是速度慢、面积小、吞吐量低。激光加工的分辨率受衍射和激光波长的限制。该奖项支持对一种新的纳米加工技术的科学研究，该技术可以在各种高通量的薄材料中产生超细纳米孔阵列。本项目将把混合能量场引入到激光材料加工中，突破激光波长衍射极限对大规模激光微加工的限制，推动纳米加工基础技术的发展。本研究的结果可以实现许多材料的按需纳米加工，具有高效率、高产品质量、可调性和灵活性，这在以前是不可能的。PI参与了RUE和RET项目，致力于让女性和未被充分代表的少数民族参与研究活动，并将利用普渡大学的一个项目向高中教师展示他的研究。该项目将对电磁学、等离子体学和机械加工等多个领域的研究产生积极影响。本项目旨在开发一种新型的混合纳米加工工艺，即磁-光-纳米铣削，以在薄层衬底上生产大面积纳米通道阵列。研究目的是定量地了解磁光纳米铣削过程中工艺参数与相关物理机制之间的关系，并确定各种薄膜衬底所需图案的加工条件。具体而言，本项目将建立一个基于物理的磁光纳米铣削计算模型，该模型将描述混合加工过程中激光-纳米颗粒-衬底相互作用，并预测铣削速度、光热诱导相变、激光能量输运等重要物理现象。该项目将通过对聚合物膜磁光纳米铣削过程中重要参数的实验测量来验证所开发的模型。研究了不同的加工条件对温度分布、纳米铣削速率和纳米孔轮廓的影响。在此过程中，薄膜衬底和纳米颗粒之间的相互作用也将被研究。该项目将促进印第安纳州高中教师、研究生和本科生等代表性不足群体的研究和教育机会。研究成果将被整合到本科/研究生课程开发中，并通过将研究和学习代码发布到nanoHUB，并提供完整的文档和教程。

High throughput large scale nanomachining of sub-100nm nanostructure has lots of applications in electronics, environmental, energy, medical devices, and optical industries (e.g. membranes in drug delivery, ultrafiltration for separations technologies, nanofluidic devices for the separation of biomolecules, substrates for solid oxide fuel cells). There is an increasing demand for technologies capable of patterning surfaces at the nanoscale with high precision, high throughput, and in a cost effective manner. Currently, the desired nanoscale patterning accuracy can be achieved using electron-beam lithography (EBL), focused ion-beam (FIB) lithography, tip enhanced scanning probe microscopy (SPM), and optical nanolithography. These methods usually suffer from being slow, small area and low throughput. The resolution of laser machining is limited by diffraction and the wavelength of lasers. This award supports scientific investigations on a new nanomachining technique to generate ultra-fine nanohole arrays in various thin materials with high throughput. This project will advance fundamental nanomachining technology by bringing hybrid energy field into laser materials processing, and breaking the barrier of large scale laser micromachining from the diffraction limit of laser wavelength. The results from this research can realize on-demand nanomachining in many materials with high efficiency, product quality, tunability, and flexibility that is considered impossible before. The PI is involved in the RUE and RET program, is committed to involving women and underrepresented minorities in research activities, and will leverage a Purdue program to expose high school instructors to his research. The proposed project will benefit many research areas such as electromagnetism, plasmonics and machining.This projects aims to develop on a novel hybrid nanomachining process, namely magnetic-optical-nano-milling, to produce large area nanochannel arrays in thin layer substrates. The research objective is to quantitatively understand the relationship between process parameters and associated physical mechanisms in magnetic-optical-nano-milling and determine processing conditions for desired patterns in various thin film substrates. Specifically, this project will formulate a physics-based computational model for magnetic-optical-nano-milling, which will delineate the laser-nanoparticle-substrate interaction during the hybrid machining process and predict the important physical phenomena such as milling speed, photothermal induced phase change, laser energy transportation. The project will verify the developed model through experimental measurements of important parameters in magnetic-optical-nano-milling of polymer membrane. The effects of various processing conditions on the temperature distribution, nano-milling rate and profile of nanoholes will be studied. The interplay between the thin film substrates and nanoparticles during the process will also be investigated. This project will promote research and education opportunities for high school teachers, graduate and undergraduates, under-represented groups in Indiana. The research outcomes will be integrated into undergraduate/graduate course development, and contributed to nanoHUB by launching research and learning codes resulted from this project online with full documentation and tutorials.