High Throughput Magnetic Optical Nano-Milling of Thin Layer Materials with Designed Nano-Chisels

亚100 nm纳米结构的高通量大规模纳米加工在电子、环境、能源、医疗设备和光学工业中具有许多应用（例如药物递送中的膜、用于分离技术的超滤、用于分离生物分子的纳米流体设备、用于固体氧化物燃料电池的基底）。 对于能够以高精度、高产量并且以成本有效的方式在纳米尺度下图案化表面的技术存在日益增长的需求。目前，可以使用电子束光刻（EBL）、聚焦离子束（FIB）光刻、尖端增强扫描探针显微镜（SPM）和光学纳米光刻来实现期望的纳米级图案化精度。 这些方法通常具有速度慢、面积小和吞吐量低的缺点。 激光加工的分辨率受到激光衍射和波长的限制。 该奖项支持对一种新的纳米加工技术的科学研究，以高通量在各种薄材料中产生超细纳米孔阵列。本项目将混合能量场引入激光材料加工领域，突破激光波长衍射极限对大规模激光微加工的限制，推进纳米加工基础技术的发展。 这项研究的结果可以在许多材料中实现按需纳米加工，具有高效率，产品质量，可调性和灵活性，这在以前被认为是不可能的。PI参与了芸香和RET计划，致力于让妇女和代表性不足的少数民族参与研究活动，并将利用普渡大学的一项计划，让高中教师了解他的研究。本项目旨在开发一种新型的混合纳米加工工艺，即磁-光-纳米铣削，以在薄层衬底上制造大面积纳米通道阵列。研究目的是定量地了解磁光纳米铣削工艺参数和相关物理机制之间的关系，并确定各种薄膜基板中所需图案的加工条件。具体而言，本项目将制定一个基于物理的计算模型的磁-光-纳米铣削，这将描绘在混合加工过程中的激光-纳米颗粒-基板的相互作用和预测的重要物理现象，如铣削速度，光热诱导相变，激光能量传输。本计画将借由高分子膜之磁光奈米研磨过程中重要参数之实验量测来验证所发展之模型。 研究了各种加工条件对纳米孔的温度分布、纳米铣削速率和形貌的影响。 薄膜基板和纳米粒子之间的相互作用在这个过程中也将被调查。 该项目将促进高中教师，研究生和本科生，在印第安纳州代表性不足的群体的研究和教育机会。研究成果将被整合到本科/研究生课程开发中，并通过在线发布该项目产生的研究和学习代码以及完整的文档和教程，为nanoHUB做出贡献。

High throughput large scale nanomachining of sub-100nm nanostructure has lots of applications in electronics, environmental, energy, medical devices, and optical industries (e.g. membranes in drug delivery, ultrafiltration for separations technologies, nanofluidic devices for the separation of biomolecules, substrates for solid oxide fuel cells). There is an increasing demand for technologies capable of patterning surfaces at the nanoscale with high precision, high throughput, and in a cost effective manner. Currently, the desired nanoscale patterning accuracy can be achieved using electron-beam lithography (EBL), focused ion-beam (FIB) lithography, tip enhanced scanning probe microscopy (SPM), and optical nanolithography. These methods usually suffer from being slow, small area and low throughput. The resolution of laser machining is limited by diffraction and the wavelength of lasers. This award supports scientific investigations on a new nanomachining technique to generate ultra-fine nanohole arrays in various thin materials with high throughput. This project will advance fundamental nanomachining technology by bringing hybrid energy field into laser materials processing, and breaking the barrier of large scale laser micromachining from the diffraction limit of laser wavelength. The results from this research can realize on-demand nanomachining in many materials with high efficiency, product quality, tunability, and flexibility that is considered impossible before. The PI is involved in the RUE and RET program, is committed to involving women and underrepresented minorities in research activities, and will leverage a Purdue program to expose high school instructors to his research. The proposed project will benefit many research areas such as electromagnetism, plasmonics and machining.This projects aims to develop on a novel hybrid nanomachining process, namely magnetic-optical-nano-milling, to produce large area nanochannel arrays in thin layer substrates. The research objective is to quantitatively understand the relationship between process parameters and associated physical mechanisms in magnetic-optical-nano-milling and determine processing conditions for desired patterns in various thin film substrates. Specifically, this project will formulate a physics-based computational model for magnetic-optical-nano-milling, which will delineate the laser-nanoparticle-substrate interaction during the hybrid machining process and predict the important physical phenomena such as milling speed, photothermal induced phase change, laser energy transportation. The project will verify the developed model through experimental measurements of important parameters in magnetic-optical-nano-milling of polymer membrane. The effects of various processing conditions on the temperature distribution, nano-milling rate and profile of nanoholes will be studied. The interplay between the thin film substrates and nanoparticles during the process will also be investigated. This project will promote research and education opportunities for high school teachers, graduate and undergraduates, under-represented groups in Indiana. The research outcomes will be integrated into undergraduate/graduate course development, and contributed to nanoHUB by launching research and learning codes resulted from this project online with full documentation and tutorials.