Collaborative Research: Three-Dimensional Laser Holographic Nanopatterning Using Metamaterial Phase Masks

合作研究:使用超材料相位掩模的三维激光全息纳米图案

基本信息

  • 批准号:
    1661842
  • 负责人:
  • 金额:
    $ 21.75万
  • 依托单位:
  • 依托单位国家:
    美国
  • 项目类别:
    Standard Grant
  • 财政年份:
    2017
  • 资助国家:
    美国
  • 起止时间:
    2017-08-01 至 2021-07-31
  • 项目状态:
    已结题

项目摘要

There is a strong need for nanomanufacturing technologies that are digitally controllable in space and in laser wavelength. These new technologies are desired to generate spatially varying nanostructures for a wide range of applications from electronics to photonics to energy storage. Examples include gradient multiple-symmetry nanostructures to improve light extraction efficiency of organic light emitting devices, light coupling efficiency in photovoltaic devices, and light absorption in photo-detectors. This award investigates nanostructure and process design principles involving laser beam steering through a metamaterial photomask and selective laser material removal, leading to the formation of complex functional nanosystems. Despite progress at single wavelengths, a photomask-based nanofabrication technology that can steer lasers at multiple wavelengths at high resolution is lacking. This project paves the way for future parallel, multi-wavelength, spatially varying three-dimensional nanopatterning that can significantly simplify the photolithography process used by the semiconductor industry. The project provides education opportunities in the fields of nanomanufacturing, optical design, simulation and characterization to students at both undergraduate and graduate levels. It also includes outreach activities engaging women and under-represented minorities in research and targeting the general public via the Fort Worth Museum of Science and History.This project investigates laser holographic nanofabrication of a new type of spatially-gradient nanostructure using new metamaterial phase masks designed and operated at multiple laser wavelengths. The current phase mask patterning technology controls light sequentially. For example, in traditional dielectric phase masks with gratings in two layers, the light modulated by the first layer grating is modulated again by the second layer grating. In order to realize selective laser modulation in space and in wavelength, the new phase mask concept consists of resonators distributed in one or two layers that can be used to realize desired phase and amplitude profiles at multiple wavelengths independently and simultaneously, namely, in parallel. Using the new plasmonic resonator-based metamaterial phase mask, the laser light is only modulated by resonators pre-determined by design, leading to the manufacturing of 3D nano-architectures with high spatial resolution and feature size reduction from microns to 100 nm in spatially-gradient photonic super-crystal structures. Overall, the single plasmonic element and single exposure-based nanofabrication process provides a highly efficient approach with a simple optical setup for realizing spatially-gradient nanostructures for many applications.
人们迫切需要在太空和激光波长上可数字控制的纳米制造技术。这些新技术被期望产生空间变化的纳米结构,用于从电子学到光子学到能量存储的广泛应用。例如,梯度多重对称纳米结构可提高有机发光器件的光提取效率,光伏器件中的光耦合效率,以及光电探测器中的光吸收。该奖项研究纳米结构和工艺设计原则,涉及激光光束通过超材料光掩模和选择性激光材料去除,导致复杂功能纳米系统的形成。尽管在单一波长方面取得了进展,但还缺乏一种基于光掩模的纳米制造技术,可以高分辨率地引导多个波长的激光。该项目为未来并行、多波长、空间变化的三维纳米刻蚀铺平了道路,可以显著简化半导体行业使用的光刻工艺。该项目为本科生和研究生提供纳米制造、光学设计、模拟和表征领域的教育机会。它还包括通过沃斯堡科学和历史博物馆吸引妇女和未被充分代表的少数群体参与研究和针对普通公众的外联活动。该项目研究使用在多个激光波长下设计和操作的新型超材料相位掩模来制造新型空间梯度纳米结构的激光全息纳米制造。当前的相位掩模图案化技术顺序地控制光。例如,在传统的具有两层光栅的介电相位掩模中,由第一层光栅调制的光再次被第二层光栅调制。为了实现激光在空间和波长上的选择性调制,新的相位掩模概念由分布在一层或两层的谐振器组成,这些谐振器可以独立地、同时地、即并行地实现所需的多个波长的相位和幅度分布。利用基于等离子体谐振器的新型超材料相位掩模,激光只需通过设计预先确定的谐振器进行调制,就可以在空间梯度光子超晶体结构中制造出具有高空间分辨率和特征尺寸从微米到100 nm的三维纳米结构。总体而言,单等离子体元件和基于单次曝光的纳米制造工艺为实现空间梯度纳米结构提供了一种高效的方法,具有简单的光学设置,可用于许多应用。

项目成果

期刊论文数量(16)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
Holographic fabrication of graded photonic super-crystals using an integrated spatial light modulator and reflective optical element laser projection system
使用集成空间光调制器和反射光学元件激光投影系统全息制造分级光子超晶体
  • DOI:
    10.1364/ao.56.009888
  • 发表时间:
    2017
  • 期刊:
  • 影响因子:
    1.9
  • 作者:
    Lowell, David;Hassan, Safaa;Adewole, Murthada;Philipose, Usha;Chen, Banglin;Lin, Yuankun
  • 通讯作者:
    Lin, Yuankun
Effects of Photonic Band Structure and Unit Super-Cell Size in Graded Photonic Super-Crystal on Broadband Light Absorption in Silicon
渐变光子超晶中光子能带结构和单位超晶尺寸对硅宽带光吸收的影响
  • DOI:
    10.3390/photonics6020050
  • 发表时间:
    2019
  • 期刊:
  • 影响因子:
    2.4
  • 作者:
    Hassan, Safaa;Alnasser, Khadijah;Lowell, David;Lin, Yuankun
  • 通讯作者:
    Lin, Yuankun
Enhanced light extraction from organic light-emitting diodes by reducing plasmonic loss through graded photonic super-crystals
Broadband light-matter interaction due to resonance cavities in graded photonic super-crystals
分级光子超晶体中共振腔引起的宽带光与物质相互作用
  • DOI:
    10.1364/osac.2.003272
  • 发表时间:
    2019
  • 期刊:
  • 影响因子:
    1.6
  • 作者:
    Hassan, Safaa;Sale, Oliver;Alnasser, Khadijah;Hurley, Noah;Zhang, Hualiang;Philipose, Usha;Lin, Yuankun
  • 通讯作者:
    Lin, Yuankun
Holographic fabrication of graded photonic super-crystals using spatial light modulator
使用空间光调制器全息制造分级光子超晶体
  • DOI:
  • 发表时间:
    2019
  • 期刊:
  • 影响因子:
    0
  • 作者:
    Lin, Y;Lowell, D;Hassan, S.
  • 通讯作者:
    Hassan, S.
{{ item.title }}
{{ item.translation_title }}
  • DOI:
    {{ item.doi }}
  • 发表时间:
    {{ item.publish_year }}
  • 期刊:
  • 影响因子:
    {{ item.factor }}
  • 作者:
    {{ item.authors }}
  • 通讯作者:
    {{ item.author }}

数据更新时间:{{ journalArticles.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ monograph.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ sciAawards.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ conferencePapers.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ patent.updateTime }}

Yuankun Lin其他文献

High-pressure Raman spectra of lithium triborate crystal and pressure-induced phase transitions
三硼酸锂晶体的高压拉曼光谱和压力诱导的相变
Resonant Raman scattering and electron-phonon coupling in the organic superconductor (BEDT-TTF)2[Cu(NCS)2]
有机超导体中的共振拉曼散射和电子声子耦合 (BEDT-TTF)2[Cu(NCS)2]
  • DOI:
    10.1016/s0379-6779(97)81030-2
  • 发表时间:
    1997
  • 期刊:
  • 影响因子:
    0
  • 作者:
    J. Eldridge;Y. Xie;Yuankun Lin;H. H. Wang;J. Williams;J. Schlueter
  • 通讯作者:
    J. Schlueter
Polarization sensitive near-complete reflection from photonic crystal slab in centered rectangular lattice
中心矩形晶格中光子晶体板的偏振敏感近全反射
  • DOI:
    10.1063/1.3610518
  • 发表时间:
    2011
  • 期刊:
  • 影响因子:
    3.2
  • 作者:
    Simon Padron;Kris Ohlinger;K. Lozano;Yuankun Lin
  • 通讯作者:
    Yuankun Lin
Design and fabrication of local fill fraction in photonic crystal templates using a spatial light modulator
使用空间光调制器设计和制造光子晶体模板中的局部填充分数
  • DOI:
  • 发表时间:
    2016
  • 期刊:
  • 影响因子:
    0
  • 作者:
    Jeffrey Lutkenhaus;D. George;David Lowell;Hualiang Zhang;Yuankun Lin
  • 通讯作者:
    Yuankun Lin
Flexible Holographic Fabrication of 3D Photonic Crystal Templates with Polarization Control through a 3D Printed Reflective Optical Element
通过 3D 打印反射光学元件实现偏振控制的 3D 光子晶体模板的灵活全息制造
  • DOI:
  • 发表时间:
    2016
  • 期刊:
  • 影响因子:
    3.4
  • 作者:
    David Lowell;D. George;Jeffrey Lutkenhaus;C. Tian;M. Adewole;U. Philipose;Hualiang Zhang;Yuankun Lin
  • 通讯作者:
    Yuankun Lin

Yuankun Lin的其他文献

{{ item.title }}
{{ item.translation_title }}
  • DOI:
    {{ item.doi }}
  • 发表时间:
    {{ item.publish_year }}
  • 期刊:
  • 影响因子:
    {{ item.factor }}
  • 作者:
    {{ item.authors }}
  • 通讯作者:
    {{ item.author }}

{{ truncateString('Yuankun Lin', 18)}}的其他基金

Collaborative Research: Digitally Addressable and Scalable Laser Fabrication of 3D Gradient Index Nanostructures and Nanophotonic Circuits
合作研究:3D 梯度折射率纳米结构和纳米光子电路的数字可寻址和可扩展激光制造
  • 批准号:
    1266251
  • 财政年份:
    2013
  • 资助金额:
    $ 21.75万
  • 项目类别:
    Standard Grant
NIRT: 3D Hierarchical Nanomanufacturing for Active Photonics-on-chip
NIRT:用于主动片上光子学的 3D 分层纳米制造
  • 批准号:
    1115903
  • 财政年份:
    2010
  • 资助金额:
    $ 21.75万
  • 项目类别:
    Standard Grant
Collaborative Research: Laser Manufacturing of Three-Dimensional Lightwave Circuits and Nano-Optical Devices
合作研究:三维光波电路和纳米光学器件的激光制造
  • 批准号:
    1109971
  • 财政年份:
    2010
  • 资助金额:
    $ 21.75万
  • 项目类别:
    Standard Grant
Collaborative Research: Laser Manufacturing of Three-Dimensional Lightwave Circuits and Nano-Optical Devices
合作研究:三维光波电路和纳米光学器件的激光制造
  • 批准号:
    0900458
  • 财政年份:
    2009
  • 资助金额:
    $ 21.75万
  • 项目类别:
    Standard Grant
MRI: Acquisition of an Ar Ion Laser for Photonic Bandgap Materials Research and Education
MRI:获取用于光子带隙材料研究和教育的 Ar 离子激光器
  • 批准号:
    0722754
  • 财政年份:
    2007
  • 资助金额:
    $ 21.75万
  • 项目类别:
    Standard Grant
NIRT: 3D Hierarchical Nanomanufacturing for Active Photonics-on-chip
NIRT:用于主动片上光子学的 3D 分层纳米制造
  • 批准号:
    0609345
  • 财政年份:
    2006
  • 资助金额:
    $ 21.75万
  • 项目类别:
    Standard Grant

相似国自然基金

Research on Quantum Field Theory without a Lagrangian Description
  • 批准号:
    24ZR1403900
  • 批准年份:
    2024
  • 资助金额:
    0.0 万元
  • 项目类别:
    省市级项目
Cell Research
  • 批准号:
    31224802
  • 批准年份:
    2012
  • 资助金额:
    24.0 万元
  • 项目类别:
    专项基金项目
Cell Research
  • 批准号:
    31024804
  • 批准年份:
    2010
  • 资助金额:
    24.0 万元
  • 项目类别:
    专项基金项目
Cell Research (细胞研究)
  • 批准号:
    30824808
  • 批准年份:
    2008
  • 资助金额:
    24.0 万元
  • 项目类别:
    专项基金项目
Research on the Rapid Growth Mechanism of KDP Crystal
  • 批准号:
    10774081
  • 批准年份:
    2007
  • 资助金额:
    45.0 万元
  • 项目类别:
    面上项目

相似海外基金

Collaborative Research: IHBEM: Three-way coupling of water, behavior, and disease in the dynamics of mosquito-borne disease systems
合作研究:IHBEM:蚊媒疾病系统动力学中水、行为和疾病的三向耦合
  • 批准号:
    2327816
  • 财政年份:
    2023
  • 资助金额:
    $ 21.75万
  • 项目类别:
    Standard Grant
Collaborative Research: IHBEM: Three-way coupling of water, behavior, and disease in the dynamics of mosquito-borne disease systems
合作研究:IHBEM:蚊媒疾病系统动力学中水、行为和疾病的三向耦合
  • 批准号:
    2327814
  • 财政年份:
    2023
  • 资助金额:
    $ 21.75万
  • 项目类别:
    Continuing Grant
Collaborative Research: IHBEM: Three-way coupling of water, behavior, and disease in the dynamics of mosquito-borne disease systems
合作研究:IHBEM:蚊媒疾病系统动力学中水、行为和疾病的三向耦合
  • 批准号:
    2327815
  • 财政年份:
    2023
  • 资助金额:
    $ 21.75万
  • 项目类别:
    Standard Grant
Collaborative Research: Active and Passive Seismic Imaging of the Three-Dimensional Structure and Magma System beneath the Summit of Kilauea Volcano
合作研究:基拉韦厄火山顶下三维结构和岩浆系统的主动和被动地震成像
  • 批准号:
    2218645
  • 财政年份:
    2023
  • 资助金额:
    $ 21.75万
  • 项目类别:
    Standard Grant
Collaborative Research: IHBEM: Three-way coupling of water, behavior, and disease in the dynamics of mosquito-borne disease systems
合作研究:IHBEM:蚊媒疾病系统动力学中水、行为和疾病的三向耦合
  • 批准号:
    2327817
  • 财政年份:
    2023
  • 资助金额:
    $ 21.75万
  • 项目类别:
    Standard Grant
CAS: Collaborative Research: Design, Characterization, and Modeling of Metal Nanocluster Electrocatalysts Linked to Three-Dimensional Graphene
CAS:合作研究:与三维石墨烯相关的金属纳米团簇电催化剂的设计、表征和建模
  • 批准号:
    2247574
  • 财政年份:
    2023
  • 资助金额:
    $ 21.75万
  • 项目类别:
    Standard Grant
CAS: Collaborative Research: Design, Characterization, and Modeling of Metal Nanocluster Electrocatalysts Linked to Three-Dimensional Graphene
CAS:合作研究:与三维石墨烯相关的金属纳米团簇电催化剂的设计、表征和建模
  • 批准号:
    2247575
  • 财政年份:
    2023
  • 资助金额:
    $ 21.75万
  • 项目类别:
    Standard Grant
Collaborative Research: Active and Passive Seismic Imaging of the Three-Dimensional Structure and Magma System beneath the Summit of Kilauea Volcano
合作研究:基拉韦厄火山顶下三维结构和岩浆系统的主动和被动地震成像
  • 批准号:
    2218646
  • 财政年份:
    2023
  • 资助金额:
    $ 21.75万
  • 项目类别:
    Standard Grant
Collaborative Research: Interfacing Students at Three Universities to Elucidate Enzymatic Transformations of Guanide Compounds that Impact Health and the Environment
合作研究:与三所大学的学生合作,阐明影响健康和环境的胍化合物的酶促转化
  • 批准号:
    2203751
  • 财政年份:
    2022
  • 资助金额:
    $ 21.75万
  • 项目类别:
    Continuing Grant
Collaborative Research: Integrated Moment-Based Descriptors and Deep Neural Network for Screening Three-Dimensional Biological Data
合作研究:集成基于矩的描述符和深度神经网络用于筛选三维生物数据
  • 批准号:
    2151678
  • 财政年份:
    2022
  • 资助金额:
    $ 21.75万
  • 项目类别:
    Standard Grant
{{ showInfoDetail.title }}

作者:{{ showInfoDetail.author }}

知道了