Collaborative Research: Three-Dimensional Laser Holographic Nanopatterning Using Metamaterial Phase Masks

合作研究：使用超材料相位掩模的三维激光全息纳米图案

• 批准号: 1661842
• 负责人: Yuankun Lin
• 金额: $ 21.75万
• 依托单位: University of North Texas
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2017
• 资助国家: 美国
• 起止时间: 2017-08-01 至 2021-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1661842&HistoricalAwards=false
• 关键词: Collaborative; Research; Three; Dimensional; Laser

There is a strong need for nanomanufacturing technologies that are digitally controllable in space and in laser wavelength. These new technologies are desired to generate spatially varying nanostructures for a wide range of applications from electronics to photonics to energy storage. Examples include gradient multiple-symmetry nanostructures to improve light extraction efficiency of organic light emitting devices, light coupling efficiency in photovoltaic devices, and light absorption in photo-detectors. This award investigates nanostructure and process design principles involving laser beam steering through a metamaterial photomask and selective laser material removal, leading to the formation of complex functional nanosystems. Despite progress at single wavelengths, a photomask-based nanofabrication technology that can steer lasers at multiple wavelengths at high resolution is lacking. This project paves the way for future parallel, multi-wavelength, spatially varying three-dimensional nanopatterning that can significantly simplify the photolithography process used by the semiconductor industry. The project provides education opportunities in the fields of nanomanufacturing, optical design, simulation and characterization to students at both undergraduate and graduate levels. It also includes outreach activities engaging women and under-represented minorities in research and targeting the general public via the Fort Worth Museum of Science and History.This project investigates laser holographic nanofabrication of a new type of spatially-gradient nanostructure using new metamaterial phase masks designed and operated at multiple laser wavelengths. The current phase mask patterning technology controls light sequentially. For example, in traditional dielectric phase masks with gratings in two layers, the light modulated by the first layer grating is modulated again by the second layer grating. In order to realize selective laser modulation in space and in wavelength, the new phase mask concept consists of resonators distributed in one or two layers that can be used to realize desired phase and amplitude profiles at multiple wavelengths independently and simultaneously, namely, in parallel. Using the new plasmonic resonator-based metamaterial phase mask, the laser light is only modulated by resonators pre-determined by design, leading to the manufacturing of 3D nano-architectures with high spatial resolution and feature size reduction from microns to 100 nm in spatially-gradient photonic super-crystal structures. Overall, the single plasmonic element and single exposure-based nanofabrication process provides a highly efficient approach with a simple optical setup for realizing spatially-gradient nanostructures for many applications.

迫切需要在空间和激光波长上进行数字控制的纳米制造技术。这些新技术需要生成空间变化的纳米结构，用于从电子学到光子学再到能源存储的广泛应用。例子包括梯度多重对称纳米结构，以提高有机发光器件的光提取效率、光伏器件中的光耦合效率以及光电探测器中的光吸收。该奖项研究纳米结构和工艺设计原理，涉及通过超材料光掩模进行激光束控制和选择性激光材料去除，从而形成复杂的功能纳米系统。尽管在单一波长方面取得了进展，但仍缺乏一种基于光掩模的纳米加工技术，能够以高分辨率控制多个波长的激光。该项目为未来并行、多波长、空间变化的三维纳米图案铺平了道路，可以显着简化半导体行业使用的光刻工艺。该项目为本科生和研究生提供纳米制造、光学设计、模拟和表征领域的教育机会。它还包括通过沃斯堡科学历史博物馆吸引女性和代表性不足的少数群体参与研究并针对公众的外展活动。该项目研究了一种新型空间梯度纳米结构的激光全息纳米加工，使用在多个激光波长下设计和操作的新型超材料相位掩模。当前的相位掩模图案化技术顺序地控制光。例如，在具有两层光栅的传统电介质相位掩模中，由第一层光栅调制的光再次由第二层光栅调制。 为了实现空间和波长上的选择性激光调制，新的相位掩模概念由分布在一层或两层中的谐振器组成，可用于独立且同时（即并行）地在多个波长上实现所需的相位和幅度分布。使用基于等离激元谐振器的新型超材料相位掩模，激光仅由设计预先确定的谐振器调制，从而可以制造具有高空间分辨率的3D纳米结构，并且在空间梯度光子超晶结构中特征尺寸从微米减小到100纳米。总体而言，单等离子体元件和基于单次曝光的纳米制造工艺提供了一种高效的方法和简单的光学设置，可实现许多应用的空间梯度纳米结构。

项目成果

Holographic fabrication of graded photonic super-crystals using an integrated spatial light modulator and reflective optical element laser projection system

使用集成空间光调制器和反射光学元件激光投影系统全息制造分级光子超晶体

• DOI: 10.1364/ao.56.009888
• 发表时间: 2017
• 期刊: Applied Optics
• 影响因子: 1.9
• 作者: Lowell, David;Hassan, Safaa;Adewole, Murthada;Philipose, Usha;Chen, Banglin;Lin, Yuankun
• 通讯作者: Lin, Yuankun

Effects of Photonic Band Structure and Unit Super-Cell Size in Graded Photonic Super-Crystal on Broadband Light Absorption in Silicon

渐变光子超晶中光子能带结构和单位超晶尺寸对硅宽带光吸收的影响

• DOI: 10.3390/photonics6020050
• 发表时间: 2019
• 期刊: Photonics
• 影响因子: 2.4
• 作者: Hassan, Safaa;Alnasser, Khadijah;Lowell, David;Lin, Yuankun
• 通讯作者: Lin, Yuankun

Enhanced light extraction from organic light-emitting diodes by reducing plasmonic loss through graded photonic super-crystals

• DOI: 10.1364/josab.387780
• 发表时间: 2020-05-01
• 期刊: JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS
• 影响因子: 1.9
• 作者: Alnasser, Khadijah;Hassan, Safaa;Lin, Yuankun
• 通讯作者: Lin, Yuankun

Broadband light-matter interaction due to resonance cavities in graded photonic super-crystals

分级光子超晶体中共振腔引起的宽带光与物质相互作用

• DOI: 10.1364/osac.2.003272
• 发表时间: 2019
• 期刊: OSA Continuum
• 影响因子: 1.6
• 作者: Hassan, Safaa;Sale, Oliver;Alnasser, Khadijah;Hurley, Noah;Zhang, Hualiang;Philipose, Usha;Lin, Yuankun
• 通讯作者: Lin, Yuankun

Holographic fabrication of graded photonic super-crystals using spatial light modulator

使用空间光调制器全息制造分级光子超晶体

• 发表时间: 2019
• 期刊: OSA Technical Digest
• 作者: Lin, Y;Lowell, D;Hassan, S.
• 通讯作者: Hassan, S.