Ultra-precise electromagnetic linear guide

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The objective of this proposed project is a contribution to ultra-precision high-performance- cutting which will be realized for the first time worldwide with the use of a high-precision electromagnetic linear slide, which compensates for static, dynamic and thermal errors during the milling process. The electromagnetic guide will be designed, built and explored in the first application period. Of prime interest is the qualification of the magnetic guidance for accuracies in the nanometer range. For this purpose, novel methods for increasing the measurement accuracy and bandwidth, the control sample rate and the dynamics of the actuators will be explored. The focus in the second application period lies in the investigation of methods for compensating static, dynamic and thermally caused errors. Thus, the slide will be actuated to compensate for any linearity or assembly errors. In addition to the reduction of set-up and adjustment times, compensating for manufacturing errors of the guide and the slide will also become possible, which will result in a significant cost reduction of component manufacturing in view of the linearity requirement of 500nm deviation over 300mm travel. The degrees of freedom of the slide orthogonal to the guide direction further allow compensate for positioning errors of the supporting axis. When increasing the tool spindle speed (from 2,000min-1 to 20,000min-1) also increased parasitic oscillations of the tool are expected due to minimal residual imbalances. These will be suppressed by the exploration of methods for active vibration damping in the nanometer range as far as possible.