Ultra-precise electromagnetic linear guide

超精密电磁直线导轨

• 批准号: 233421395
• 负责人: Professor Dr.-Ing. Berend Denkena
• 金额: --
• 依托单位: Institut für Fertigungstechnik und Werkzeugmaschinen (IFW)
• 依托单位国家: 德国
• 项目类别: Research Units
• 财政年份: 2014
• 资助国家: 德国
• 起止时间: 2013-12-31 至 2020-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/233421395?language=en
• 关键词: Ultra; precise; electromagnetic; linear; guide

The objective of this proposed project is a contribution to ultra-precision high-performance- cutting which will be realized for the first time worldwide with the use of a high-precision electromagnetic linear slide, which compensates for static, dynamic and thermal errors during the milling process. The electromagnetic guide will be designed, built and explored in the first application period. Of prime interest is the qualification of the magnetic guidance for accuracies in the nanometer range. For this purpose, novel methods for increasing the measurement accuracy and bandwidth, the control sample rate and the dynamics of the actuators will be explored. The focus in the second application period lies in the investigation of methods for compensating static, dynamic and thermally caused errors. Thus, the slide will be actuated to compensate for any linearity or assembly errors. In addition to the reduction of set-up and adjustment times, compensating for manufacturing errors of the guide and the slide will also become possible, which will result in a significant cost reduction of component manufacturing in view of the linearity requirement of 500nm deviation over 300mm travel. The degrees of freedom of the slide orthogonal to the guide direction further allow compensate for positioning errors of the supporting axis. When increasing the tool spindle speed (from 2,000min-1 to 20,000min-1) also increased parasitic oscillations of the tool are expected due to minimal residual imbalances. These will be suppressed by the exploration of methods for active vibration damping in the nanometer range as far as possible.

该拟议项目的目标是为超精密高性能切削做出贡献，这将在全球范围内首次通过使用高精度电磁线性滑块来实现，该滑块可补偿铣削过程中的静态、动态和热误差。电磁波导将在第一个应用阶段进行设计、建造和探索。最令人感兴趣的是纳米范围内磁导精度的鉴定。为此，将探索提高测量精度和带宽、控制采样率和执行器动态的新方法。第二个应用阶段的重点是研究补偿静态、动态和热引起的误差的方法。因此，滑块将被致动以补偿任何线性或装配误差。除了减少设置和调整时间外，补偿导轨和滑块的制造误差也将成为可能，鉴于300毫米行程上500纳米偏差的线性要求，这将导致部件制造成本显着降低。与引导方向正交的滑动件的自由度进一步允许补偿支撑轴线的定位误差。当增加刀具主轴速度（从 2,000min-1 到 20,000min-1）时，由于残余不平衡极小，预计刀具的寄生振荡也会增加。这些将通过探索纳米范围内的主动减振方法来尽可能地抑制。