Structural Layout Optimization for MEMS Sensors and Actuators via Coupled PDEs

通过耦合偏微分方程优化 MEMS 传感器和执行器的结构布局

• 批准号: 25556034
• 负责人: Professor Dr. Jan Gerrit Korvink
• 金额: --
• 依托单位: Institut für Mikrostrukturtechnik (IMT)
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2006
• 资助国家: 德国
• 起止时间: 2005-12-31 至 2011-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/25556034?language=en
• 关键词: Structural; Layout; Optimization; MEMS; Sensors

The design process in microsystem technology is still largely based on intuition. This is in contrast to other engineering endeavours, and is largely attributed to the fact that the component micro sensors and micro actuators are inherently multiphysical devices and hence often counter-intuitive in behaviour and subject to complex manufacturing process related design constraints. In this project we want to contribute to remedying this situation. Based on a method to cast the layout optimization problem of a multiphysics scenario in terms of a set of partial differential equations, we evolve the design in time towards optimality. Key questions to address are the flexible and general handling of constraints, expressing the sensitivity analysis correctly, maintaining accuracy with mesh adaptivity, and finally testing the predictions of the algorithms and procedures on manufactured devices which provide physical measurement data for feedback. We believe that achieving these goals will greatly benefit the microsystem community, and will provide new insights into topology optimization.

微系统技术的设计过程仍然主要基于直觉。这与其他工程努力形成对比，并且主要归因于以下事实：组件微传感器和微致动器本质上是多物理设备，因此在行为上通常是反直觉的，并且受到复杂的制造工艺相关的设计约束。在这个项目中，我们希望为纠正这种情况做出贡献。基于一种方法来铸造的布局优化问题的多物理场的情况下，在一组偏微分方程，我们发展的设计在时间上的最优性。要解决的关键问题是灵活和通用的处理约束，正确表达灵敏度分析，保持精度与网格自适应，并最终测试的算法和程序的预测制造设备提供物理测量数据的反馈。我们相信，实现这些目标将大大有利于微系统社区，并将提供新的见解拓扑优化。

项目成果

Design Rule and Orientation Layout for MEMS Curved Beams on Silicon

硅基 MEMS 曲梁的设计规则和方向布局

• DOI: 10.1109/jmems.2010.2048416
• 发表时间: 2010
• 期刊: Journal of Microelectromechanical Systems
• 影响因子: 2.7
• 作者: T Chen;JG Korvink;U Wallrabe
• 通讯作者: U Wallrabe

Simulation approaches for magnetic resonance imaging sensors

磁共振成像传感器的仿真方法

• DOI: 10.1109/esime.2009.4938507
• 发表时间: 2009
• 期刊: EuroSimE 2009 - 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
• 作者: JG Korvink;A Peter;A Del Tin;J Feng;R Zohair;I El-Khair
• 通讯作者: I El-Khair

Topology Optimization for Micro Rotational Mirror Design and Safe Manufacturing

微旋转镜设计和安全制造的拓扑优化

• DOI: 10.1109/memsys.2009.4805559
• 发表时间: 2009
• 期刊: 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems
• 作者: T Chen;JG Korvink;U Wallrabe
• 通讯作者: U Wallrabe