Nanostructured absorption and emission layers for thermal infrared detectors and emitters

用于热红外探测器和发射器的纳米结构吸收和发射层

基本信息

批准号：
267557604
负责人：
Professor Dr.-Ing. Gerald Gerlach
金额：
--
依托单位：
Institut für Festkörperelektronik (IFE)
依托单位国家：
德国
项目类别：
Research Grants
财政年份：
2015
资助国家：
德国
起止时间：
2014-12-31 至 2018-12-31
项目状态：
已结题

来源：
https://gepris.dfg.de/gepris/projekt/267557604?language=en
关键词：
Nanostructured absorption emission layers thermal

项目摘要

Fast thermal infrared detectors with high detectivity must show a sufficiently high thermal insulation to ambient as well as a low thermal mass (heat capacity). It is possible to manufacture very thin detector elements having a thickness of less than 1 µm. However, absorption layers or stacked layer systems are required to ensure high absorptivity, which leads to thick layers with disadvantageous high heat capacities and poor heat conduction. Preliminary tests showed that very thin layers manufactured with glancing angle deposition (GLAD) provide a good refractive index matching between air and sensitive material and, therefore, combine a high absorptivity with a very low layer thickness. The properties of the layer can be specifically influenced by variation of the deposition angle allowing the manufacturing of layers with high and broadband absorption behavior. At the same time these absorption layers can be used as electrodes in pyroelectric sensors. All those relationships should be modelled and experimentally investigated and should lead to design guidelines, which can be used to derive process parameters of the GLAD-technology from given technical requirements.The layers described above can also be used as thermal emitters. However, it has to be stable at very high temperatures, because the radiated power increases with operating temperature. Therefore, an investigation of the GLAD-technology for high-temperature materials and integration in silicon technology should be carried out in the second part of the project. Such ultra-thin radiant heaters with very low heat capacity are more efficient, i.e. have a lower electrical power consumption, than state of the art heaters and can be operated at higher frequencies. This would lead to tremendous advantages for many applications and is to be proven on demonstrators.

具有高检测的快速热红外探测器必须显示到环境和低热量（热容量）的足够高的热绝缘材料（热容量）。可以生产厚度小于1 µm的非常薄的检测器元件。但是，需要有损耗的层或堆叠层系统来确保高吸收，这导致较厚的层，高热量和热传导不良。初步测试表明，用瞥见角度沉积（Glad）制造的非常薄的层提供了良好的折射率匹配空气和敏感材料之间的匹配，因此将高吸收和非常低的层厚度结合在一起。该层的特性可以特别受沉积角度变化的影响，从而允许制造具有较高和宽带损失行为的层。同时，这些吸收层可以用作pyroelectric传感器中的电子。所有这些关系都应进行建模和实验研究，并应导致设计准则，该指南可用于从给定的技术要求中得出GLANT技术的过程参数。上面描述的层也可以用作热发射器。但是，它必须在非常高的温度下保持稳定，因为辐射功率随工作温度的增加而增加。因此，在项目的第二部分中，应对高温材料的Glad技术和硅技术的整合进行投资。这种具有非常低热容量的超薄辐射加热器比最先进的加热器更有效，即电力消耗较低，并且可以以较高的频率运行。这将导致许多应用程序具有巨大的优势，并将在示威者身上得到证明。