Functionalization of Microsystems with Coatings

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The production of customized three-dimensional structures on the micro- and nanometer scale by femtosecond laser micromachining technology has only been possible for almost a dekade of years. An important aspect is the ability to subsequently modify the structures such that certain applications in microoptics, micromechanics, microelectronics and microchemistries become possible. Such a modification often requires the introduction of metals or metal compounds into these micro- or nanosystems. Chemical vapour deposition of organometallic compounds (OMCVD) represents a coating technology, which permits the deposition of metals or metal compounds from the gas phase without damaging the often very temperature-sensitive micro- or nanostructured substrate material. The essential objective of this application is in the first step to obtain novel complex microstructures by femtosecond laser micromachining technology and functionalize these complex microstructures in the second step with interesting metals using OMCVD with regards to their use in potential new applications like in micro(nano)optics, micro(nano)mechanics, micro(nano)electronics and micro(nano)chemistries.