Functionalization of Microsystems with Coatings

利用飞秒激光微加工技术在微纳米尺度上生产定制三维结构已经有近十年的历史了。一个重要的方面是随后修改结构的能力，以便在微光学，微力学，微电子学和微化学方面的某些应用成为可能。这种修饰通常需要在这些微或纳米系统中引入金属或金属化合物。有机金属化合物的化学气相沉积（OMCVD）代表了一种涂层技术，它允许从气相沉积金属或金属化合物，而不会损坏通常非常温度敏感的微或纳米结构衬底材料。本应用程序的基本目标是在第一步中通过飞秒激光微加工技术获得新的复杂微结构，并在第二步中使用OMCVD将这些复杂微结构与有趣的金属功能化，并将其用于微（纳米）光学，微（纳米）力学，微（纳米）电子学和微（纳米）化学等潜在的新应用。

The production of customized three-dimensional structures on the micro- and nanometer scale by femtosecond laser micromachining technology has only been possible for almost a dekade of years. An important aspect is the ability to subsequently modify the structures such that certain applications in microoptics, micromechanics, microelectronics and microchemistries become possible. Such a modification often requires the introduction of metals or metal compounds into these micro- or nanosystems. Chemical vapour deposition of organometallic compounds (OMCVD) represents a coating technology, which permits the deposition of metals or metal compounds from the gas phase without damaging the often very temperature-sensitive micro- or nanostructured substrate material. The essential objective of this application is in the first step to obtain novel complex microstructures by femtosecond laser micromachining technology and functionalize these complex microstructures in the second step with interesting metals using OMCVD with regards to their use in potential new applications like in micro(nano)optics, micro(nano)mechanics, micro(nano)electronics and micro(nano)chemistries.