Ultra-precision machining of optoelectronics and microsystems (UPROAR)

光电和微系统超精密加工（UPROAR）

• 批准号: EP/W024772/1
• 负责人: James Gates
• 金额: $ 107.8万
• 依托单位: University of Southampton
• 依托单位国家: 英国
• 项目类别: Research Grant
• 财政年份: 2023
• 资助国家: 英国
• 起止时间: 2023 至 无数据
• 项目状态: 未结题
• 来源: https://gtr.ukri.org/projects?ref=EP%2FW024772%2F1
• 关键词: Ultra; precision; machining; optoelectronics; microsystems

Our overall goal is to develop an ultraprecision dicing / grinding system that will be applicable to photonics and microsystems. Working with a set of UK companies we will develop the system as a test-bed and implement a set of cutting edge instrumentation add-ons to better control the machining of materials with sub-nanometre surface finishes and sub-100 nanometre overall tolerancing on complex objects.Dicing relies on a diamond-impregnated cutting disc driven at up to 150,000 rpm on a spindle being accurately translated relative to a workpiece. Any vibration or lack of perfection in the system will result in degraded surfaces, chipping of diced facets and edge chipping on grooves and channels. Importantly when placing the dicing blade on the spindle, there are inevitable errors in truism, for example, whether the blade is accurately at 90 degrees to the spindle axis, whether the blade is perfectly concentric, and whether the translation is truly along the direction of the blade. Of course, in the real world, these things are never truly perfect, and so a goal of the project is to implement feedback and control, which allows adaptive compensation. In the project, we will build a system using 900kg of granite to hold and create an ultra-stiff system, then use air-bearing elements and control signals to identify and create feedback loops to achieve incredible levels of surface finish and overall precision. Critically we will work in the ductile machining regime where operation in the elastic limit of the material allows us to avoid brittle fracture and the sort of damage which majorly degrades the performance of optical and microsystem elements.We will be looking at a range of optical and electronic materials, including glasses, crystals and semiconductors. In the latter phase of the project, we will be looking to adopt and create new ways to 'true' the blade, using state-of-the-art metrology to control issues of blade side-wall wear, blade flutter, non-concentricity originated machining rates and load-related vibration. From this work, we expect to gain valuable insights that will help our commercial partners. Firstly, by creating new ultra-precision machine tools in the UK, secondly understanding how best to implement advanced techniques and thirdly, by making exemplar devices in technologically important materials to really prove our approaches work.

我们的总体目标是开发一种适用于光子学和微系统的超重新划分 /研磨系统。与一系列英国公司合作，我们将作为测试床开发该系统，并实施一套最先进的仪器附加组件，以更好地控制具有亚纳米表面表面饰面的材料的加工，并在复杂对象上进行亚纳米的总体公差。DICICTICTICTICTICTICTICTICTICTICTICTICTICTICTICTICKETICT的切割盘的盘子以精确翻译为spindepece pockiept of spindepece of 150,000 rpm。系统中的任何振动或缺乏完美都会导致降解的表面，切成丁的小面和凹槽和通道上的边缘碎屑。重要的是，当将dICing刀片放在主轴上时，truism中存在不可避免的错误，例如，刀片是否在90度与纺锤体轴上准确地正确，是否完全同心，以及该翻译是否真的沿刀片的方向。当然，在现实世界中，这些事情永远都不是真正完美的，因此该项目的目标是实施反馈和控制，这可以自适应补偿。在该项目中，我们将使用900公斤的花岗岩构建一个系统来固定和创建一个超强系统，然后使用空气元素和控制信号来识别和创建反馈循环，以达到令人难以置信的表面表面处理水平和整体精确度。至关重要的是，我们将在延性加工状态下工作，在材料的弹性极限中运行使我们能够避免脆性断裂以及主要降低光学和微型系统元素的性能的损坏。我们将查看一系列的光学和电子材料，包括眼镜，晶体，晶体和半管。在项目的后阶段，我们将寻求采用并创建新的方法来“真实”刀片，利用最先进的计量学来控制刀片侧壁磨损，刀片颤动，非浓缩起源加工速率和与负载相关的振动的问题。通过这项工作，我们希望获得有价值的见解，从而帮助我们的商业合作伙伴。首先，通过在英国创建新的Ultra-Precision机床，其次，了解如何最好地通过在技术上重要的材料中制作示例性设备来真正证明我们的方法起作用。

项目成果

Grating-incoupled waveguide-enhanced Raman sensor.

• DOI: 10.1371/journal.pone.0284058
• 发表时间: 2023
• 期刊: PloS one
• 影响因子: 3.7

Dual-Level Silicon Grating Coupler with a Record -0.8 dB Coupling Efficiency

具有创纪录的 -0.8 dB 耦合效率的双级硅光栅耦合器

• DOI: 10.1364/cleo_si.2023.sm2g.8
• 发表时间: 2023
• 作者: Vitali V

Mechanical dicing of optical quality facets and waveguides in a silicon nitride platform

氮化硅平台中光学质量面和波导的机械切割

• DOI: 10.1049/ell2.13138
• 发表时间: 2024
• 期刊: Electronics Letters
• 影响因子: 1.1
• 作者: Gow P

Fully-Integrated and Broadband Si-Rich Silicon Nitride Wavelength Converter Based on Bragg Scattering Intermodal Four-Wave Mixing

• DOI: 10.1364/prj.506691
• 发表时间: 2023-11
• 期刊: Photonics Research
• 影响因子: 7.6
• 作者: Valerio Vitali;T. Domínguez Bucio;Hao Liu;J. Luque‐González;F. Jurado-Romero;A. Ortega-Moñux;Glenn M Churchill;J. Gates;J. Hillier;N. Kalfagiannis,;D. Melati;J. Schmid;Ilaria Cristiani;P. Cheben;J. Wangüemert-Pérez;Í. Molina-Fernández;F. Gardes;C. Lacava;Periklis Petropoulos