Connecting Mechanism of Precision Table to Its Driving System

本研究建立一精密进给工作台系统，两机构间的连接采用一种新的概念，即：例如，已经提出了四球型和空气密封层型。此外，我们通过将这些连接机构与精密工作台的滚珠丝杠式驱动系统相结合，验证了这些连接机构的正确性和有效性。并且已经清楚地表明，所提出和开发的机构仅在进给方向上具有高刚度，即，方向性的刚性，同时在其他方向上具有很高的柔性，以隔离不利的振动和干扰。

In this research, to establish a precision feed table system, the connecting two mechanisms based on a new concept, i. e., the four-ball type and air-cushioned layer type have been proposed. Furthermore, we ascertained the validity and effectiveness of those connecting mechanisms by incorporating them between the table and its ball screw type driving system of a precision table. And it has been make clean that the proposed and developed mechanisms the high rigidity only in the feed direction, i, e., direction-oriented rigidity, simultaneously having the high flexibility in other directions to isolate the unfavorable vibration and disturbance.