Connecting Mechanism of Precision Table to Its Driving System

为了构建精密进给工作台系统，本文提出了基于四球式和气垫层式两种新概念的连接机构。此外，通过将这些连接机构与精密工作台的滚珠丝杠驱动系统结合在一起，确定了这些连接机构的有效性。并且明确了所提出和开发的机构仅在进给方向上具有高刚度，即定向刚度，同时在其他方向上具有高柔性，以隔离不利的振动和干扰。

In this research, to establish a precision feed table system, the connecting two mechanisms based on a new concept, i. e., the four-ball type and air-cushioned layer type have been proposed. Furthermore, we ascertained the validity and effectiveness of those connecting mechanisms by incorporating them between the table and its ball screw type driving system of a precision table. And it has been make clean that the proposed and developed mechanisms the high rigidity only in the feed direction, i, e., direction-oriented rigidity, simultaneously having the high flexibility in other directions to isolate the unfavorable vibration and disturbance.