Design Methodology for Realizing Higher Performances of Table and Its Driving System in Machine Tool

在本研究计画中，为了建立一套能实现高效能工作台滑轨及其驱动系统的设计方法，本研究提出了一种新的设计概念，并将其应用于连接机构的设计。并将其应用于超精密机床工作台系统的工作台及其驱动系统中，验证了这些连接机构的正确性和有效性。结果表明，所提出的机构仅在进给方向具有高刚度，即方向刚度，同时在其他方向具有高柔性，以隔离不利的振动和干扰，并基于新的设计理念，开发了利用电流变效应的主动工作台系统，并对其工作台系统的性能进行了评估。

In this research project, to establish a design methodology for realizing higher performances of table slide and its driving system, the connecting mechanisms based on a new design concept have been proposed. Furthermore, the validity and effectiveness of those connecting mechanisms were ascertained by incorporating them between the table and its driving system of table system in the ultra-precision machine tool. As a result, it has been make clear that the proposed and developed mechanisms have high rigidity only in the feed direction, i.e. direction-oriented rigidity, simultaneously having the high flexibility in other directions to isolate the unfavorable vibration and disturbance.And also, the active table system using electro-reological effect based on a new design concept has been developed and the performances of its table system were evaluated.