Design Methodology for Realizing Higher Performances of Table and Its Driving System in Machine Tool

实现机床工作台及其驱动系统更高性能的设计方法

• 批准号: 03452110
• 负责人: ITO Yoshimi
• 金额: $ 4.1万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (B)
• 财政年份: 1991
• 资助国家: 日本
• 起止时间: 1991 至 1992
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-03452110/
• 关键词: Machine tool; Design methodology; Structural design; Ultra-precision Machine tool; Table system; Driving system; Connecting mechanism; Electro-reological effect; テ-ブルシステム; 工作機械結合部; 運動精度評価

In this research project, to establish a design methodology for realizing higher performances of table slide and its driving system, the connecting mechanisms based on a new design concept have been proposed. Furthermore, the validity and effectiveness of those connecting mechanisms were ascertained by incorporating them between the table and its driving system of table system in the ultra-precision machine tool. As a result, it has been make clear that the proposed and developed mechanisms have high rigidity only in the feed direction, i.e. direction-oriented rigidity, simultaneously having the high flexibility in other directions to isolate the unfavorable vibration and disturbance.And also, the active table system using electro-reological effect based on a new design concept has been developed and the performances of its table system were evaluated.

在本研究项目中，为了建立一种实现工作台滑台及其驱动系统更高性能的设计方法，提出了一种基于新设计理念的连接机构。通过将这些连接机构整合到超精密机床转台系统的转台及其驱动系统中，验证了这些连接机构的正确性和有效性。结果表明，所提出和研制的机构只在进给方向上具有较高的刚性，即方向上的刚性，同时在其他方向上具有较高的柔性，以隔离不利的振动和干扰；同时，基于一种新的设计理念，开发了基于电流变效应的主动转台系统，并对其转台系统的性能进行了评估。

项目成果

新野 秀憲,橋詰 等,伊東 誼,佐藤 忠一: "加工環境制御超精密加工機(CAPSULE)" 1992年度精密工学会春季大学学術講演会講演論文集. 549-550 (1992)

新野英德等。

橋詰 等,新野 秀憲,伊東 誼: "超精密加工機におけるテ-ブルと駆動系の連結機構ー加工環境制御超精密加工機CAPSULEへの組込みー" 日本機械学会第69期通常総会講演会講演論文集. (1992)

Hashizume et al.、Hidenori Niino、Yoshi Ito：“超精密加工机工作台与驱动系统的耦合机构 - 与加工环境控制的超精密加工机 CAPSULE 的结合”在日本第 69 届常务大会上的演讲论文机械工程师协会收藏（1992）。

新野 秀憲,橋詰 等,伊東 誼: "精密テ-ブルとその送り駆動系の連結機構に関する二,三の新提案" 日本機械学会論文集(C編). 57ー542. 3286-3292 (1991)

Hidenori Niino、Hashizume 等人、Yoshi Ito：“关于精密工作台耦合机构及其进给驱动系统的一些新建议”，日本机械工程师学会汇刊（ed. C） 3286-3292。 (1991)

H,Hashizume,H.Shinno and Y.Ito: "Connecting Mechanism of Table to Its Driving System in Ultraprecision Machine tool -Application to "CAPSULE"-" The 69th JSME Spring Annual Meeting. Vol.C. 510-512 (1992)

H,Hashizume,H.Shinno和Y.Ito：“超精密机床中工作台与其驱动系统的连接机构-在“CAPSULE”中的应用-”第69届JSME春季年会。

H.Shinno, H.Hashizume and Y.Ito: "New Proposals for Connecting Mechanism of Table to Its Driving System in Precision Machine Tools" Transactions of the Japan Society of Mechanical Engineers. 57-5428 Vol.C. 3286-3292 (1992)

H.Shinno、H.Hashizume 和 Y.Ito：“精密机床中工作台机构与其驱动系统连接的新建议”日本机械工程师学会会刊。