Active Controlled Type Ultra-precision Table System Using Electro-Rheological Liquid

先进的超精密工作台系统的开发近年来已成为实现未来超精密机床、高性能扫描探针测量系统等的最重要的问题。然而，没有有效的超精密工作台系统来实现高性能，即，静态和动态刚度、超精密运动功能、紧凑性、易于操作、主动控制功能等。因此，在本研究项目中，为了开发先进工作台系统的设计方法，提出并研究了基于新设计概念的实际空气静力工作台系统。所提出的使用电流变液的工作台系统可以在实际运动条件下通过操作电场来主动控制。所提出的表结构的有效性也已通过实验研究在各种约束条件下进行了验证。

Development of advanced ultra-precision table system has recently become the most important problem to materialize an ultra-precision machine tool of the future, a high-performance scanning probe measuring system, etc.However, there is no effective ultra-precision table system to realize the high performances, i.e., static and dynamic rigidities, ultra-precision movement function, compactness, ease of operation, active control function, etc.In this research project, therefore, to develop a design methodology of advanced table system, actual aerostatic table systems based on a new design concept have been proposed and investigated. The proposed table system using Electro-reological liquid can be actively controlled by operation the electric field under the actual moving conditions. Validity of the proposed table structures have also been verified through experimental investigations under various constraints.