Active Controlled Type Ultra-precision Table System Using Electro-Rheological Liquid

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Development of advanced ultra-precision table system has recently become the most important problem to materialize an ultra-precision machine tool of the future, a high-performance scanning probe measuring system, etc.However, there is no effective ultra-precision table system to realize the high performances, i.e., static and dynamic rigidities, ultra-precision movement function, compactness, ease of operation, active control function, etc.In this research project, therefore, to develop a design methodology of advanced table system, actual aerostatic table systems based on a new design concept have been proposed and investigated. The proposed table system using Electro-reological liquid can be actively controlled by operation the electric field under the actual moving conditions. Validity of the proposed table structures have also been verified through experimental investigations under various constraints.