Control Performance of Micro Optical Servo System Using Optical Actuator

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With an optical actuator, which is driven by the U.V.beam irradiation, energy/information transmission system is proposed. The control method of the optical actuator is studied. The composite of the PLZT material is examined by changing La, P_bZ_rO_3, P_bT_iO_3 ratio. The characteristics of the actuator is examined. The bimorph type PLZT is made and the characteristics is examined. Response time is improved and the displacement is increased. Based on the bimorph type actuator, the optical servo system is developed and the control performance is improved. WPM type U.V.beam irradiation mechanism is employed, and the U.V.beam is irradiated from both sides of the PLZT.The hysteresis is improved by differentiating the U.V.beam irradiators.