Behavior of hydrogen in alloy films and their structures

合金膜及其结构中氢的行为

• 批准号: 05452274
• 负责人: TANAKA Kazuhide
• 金额: $ 4.1万
• 依托单位: Nagoya Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (B)
• 财政年份: 1993
• 资助国家: 日本
• 起止时间: 1993 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-05452274/
• 关键词: Alloy films; Multilayrs; Hydrogen; Amorphous; Atomic structure; X-ray diffraction; Sputtering; Evaporation; アモルファス合金; 表面分析; 相互拡散; 多層穂; 表面状態; 構造; オージェ分析

Studies have been made of the behavior of hydrogen in metallic alloy films and multilayrs and of the structure and electronic and thermal properties of hydrgenated alloy films. These films were prepared using a high-vacuum evaporation apparatus which had been self-designed and manufactured with the Grant-in-Aid for Scientific Research. The following researches have been Chiefly performed :Interdiffusion and solid-state amorphization phenomena in bilayred and multilayred Pd/Ti and Ni/Ti films have been investigated. In these films, interdiffusion or intermixing of component atoms takes place at around 250-350'C via the interfaces, which induces metastable phases througehout the films. Amorphous phase formations have been observed by grazing-incidence X-ray diffraction and cross-sectional transmission electron microscopy, and the kinetics of the indterdiffusion has been revealed by Auger-electon depth profiling. When hydrogen is introduced in the multilayred films, Ti-dihydrides are formed in the Ti layrs, which are thermally stable and impedes and suppresses the amorphous-phase formation significantly. A thermodynamic analysis for the solid-state amorphization and the effect of hydriding has been made.

研究了氢在金属合金膜和多层膜中的行为，以及氢化合金膜的结构、电子和热性质。这些薄膜的制备是利用科研资助项目自行设计制造的高真空蒸发装置进行的。主要研究内容如下：研究了双层和多层Pd/Ti和Ni/Ti薄膜中的互扩散和固态非晶化现象。在这些薄膜中，组分原子通过界面在250- 350 ℃之间发生相互扩散或混合，从而在薄膜中产生亚稳相。非晶相的形成已被观察到掠入射X射线衍射和横截面透射电子显微镜，和动力学的interdiffusion已被揭示的俄歇电子深度剖析。当在多层膜中引入氢时，在Ti层中形成了热稳定的Ti双晶，它显著地阻碍和抑制了非晶相的形成。对固态非晶化过程及退火效应进行了热力学分析。

项目成果

S.M.Tadayyon: "Interdiffusion in Pd/Ti bilayer films studied by Auger electron depth profiling" Japanese Journal of Applied Physics. 32. 3928-3932 (1993)

S.M.Tadayyon：“通过俄歇电子深度剖析研究 Pd/Ti 双层薄膜中的相互扩散”，《日本应用物理学杂志》。

田中一英: "アモルファス合金の水素吸蔵とその物性" 日本金属学会報“まてりあ". 34. 134-140 (1995)

Kazuhide Tanaka：“非晶态合金的储氢及其物理性能”日本金属研究所通报《材料》34. 134-140（1995）。

S.M.Tadayyon: "Interdiffusion in amorphous Ni_<65>Ti_<35>/Ni_<35>Ti_<65> bilayer film studied by AES" Materials Science and Engineering22GD03:A179/180. 337-340 (1994)

S.M.Tadayyon：“通过 AES 研究非晶态 Ni_<65>Ti_<35>/Ni_<35>Ti_<65> 双层膜中的相互扩散”材料科学与工程22GD03:A179/180。

S.M.Tadayyon: "Interdiffusion in amorphous Ni_<65>Ti_<35>/Ni_<35>Ti_<65> bilayr film studied by AES" Mater.Sci.Eng.A179/180. 337-340 (1994)

S.M.Tadayyon：“通过 AES 研究非晶 Ni_<65>Ti_<35>/Ni_<35>Ti_<65> 双层膜中的相互扩散”Mater.Sci.Eng.A179/180。

S.M.Tadayyon: "Interdiffusion in Pd/Ti bilayr films studied by Auger electron depth profiling" Jpn.J.Appl.Phys.32. 3928-3932 (1993)

S.M.Tadayyon：“通过俄歇电子深度分析研究 Pd/Ti 双层薄膜中的相互扩散”Jpn.J.Appl.Phys.32。