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X-ray reflection study of layred structures in multilayrs for magnetic recording

磁记录多层层状结构的X射线反射研究

基本信息

批准号：
06452310
负责人：
HASHIZUME Hiroo
金额：
$ 3.46万
依托单位：
Tokyo Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (B)
财政年份：
1994
资助国家：
日本
起止时间：
1994 至 1995
项目状态：
已结题

项目摘要

Designing a practical X-ray reflectometer, we have determined the layr structures and surface/interface structures in various magnetic multilayrs. The reflectometer uses a two-axis diffractometer and asymmetric silicon channel-cut crystals for the monochromator and analyzer at a rotating-anode X-ray generator. The asymmetric Si 111 reflection used in the monochromatorprovides a three times more intense CuK alpha beam than the conventional design. For the analyzer a mechanical slit and an asymmetric channel-cut crystal can be used depending on the resolution requirement. The software correction extended the linear range of photon counting to 5*10^5 cps. The X-ray source is run at a constant output to avoid the shift of the optics setting due to the slight displacement of the X-ray focus on the rotating anode. The reflectometer is controlled by a HITACHI UNIX workstation, which allows rheta, 2rheta and rheta-2rheta scans exploring reciprocal space. Specular reflection profiles are recorded in an overnight measurement and non-specular diffuse scattering profiles can be measured in reasonably short time. The data analysis software developed uses the distorted-wave Born approximation of X-ray scattering, which allows the thickness and interface roughness of individual layrs tp be determined by least-squares fit of specular profiles. The software also includes routines to determine the intra and inter-interface correlations of the roughness structures, and the fractal dimension, from nonspecular data.

我们设计了一个实用的x射线反射计，测定了各种磁性多层材料的层结构和表面/界面结构。该反射计在旋转阳极x射线发生器的单色仪和分析仪上使用双轴衍射仪和不对称硅通道切割晶体。单色仪中使用的不对称Si 111反射提供了比传统设计三倍强的CuK α光束。对于分析仪来说，根据分辨率要求，可以使用机械狭缝和不对称通道切割晶体。软件校正将光子计数的线性范围扩展到5*10^5 cps。x射线源以恒定输出运行，以避免由于x射线聚焦在旋转阳极上的轻微位移而引起光学设置的移位。反射计由日立UNIX工作站控制，允许rheta， 2rheta和rheta-2rheta扫描探索互反空间。镜面反射剖面在夜间测量中记录，非镜面漫射散射剖面可以在相当短的时间内测量。开发的数据分析软件使用x射线散射的畸变波玻恩近似，允许通过镜面轮廓的最小二乘拟合来确定单个层的厚度和界面粗糙度。该软件还包括从非镜面数据中确定粗糙度结构的内部和界面间相关性以及分形维数的例程。