Toxicity of specialty chemical substances for manufacturing semiconductors

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1) DiboraneDiborane of 00.1,1 ppm (nominal value) was exposed to 12 male Wister rats in each group for 6 hours a day, 5 days a week for 8 weeks. After exposure, the rats were sacrificed and analysis of bronchoalveolar lavage fluid (BALF) and histopathological examination of the lung were performed. No histopathological changes were observed in all groups. However, dose dependent significant changes of such parameters of lung inflammation, impairment of lung epithelial cells or recovery from the inflammations as increases of polynuclear leucocyte count, enzymic activity of LDH,ALP,SOD and alpha-1-antitrypsin, and total and differential phospholipid in BALF were detected in diboraneexposed groups. These results suggest thet exposure to 0.1 ppm diborane is not safe for preventing lung impairments.2) Induim phosphideOne, ten or a hundred mg/kg body weight of very fine particles of indium phosphide single crystal (InP,mean diameter=0.2 micrometer) was instilled into the lung of male Fisher 344 rats. Dose-dependent increases of such inflammatory parameters in BALF as polynuclear leucocyte, LDH activity and total phospholipid were observed. Indium consentrations in blood, liver and spleen were also detected dose-dependently. Further studies are necessary to clarify th emechanism of lung inflammation induced by InP,chemical form of indium in the organs and NOAEL or LOAEL of InP inhalation.