Toxicity of specialty chemical substances for manufacturing semiconductors

用于制造半导体的特种化学物质的毒性

• 批准号: 06454231
• 负责人: SAKURAI Haruhiko
• 金额: $ 4.74万
• 依托单位: KEIO UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (B)
• 财政年份: 1994
• 资助国家: 日本
• 起止时间: 1994 至 1995
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-06454231/
• 关键词: Semiconductor; Diborane; Indium Phosphide; Reproductive Toxicity; Respiratory Toxicity; 精子; 気管支肺胞洗浄液; ラット; 許容曝露限界

1) DiboraneDiborane of 00.1,1 ppm (nominal value) was exposed to 12 male Wister rats in each group for 6 hours a day, 5 days a week for 8 weeks. After exposure, the rats were sacrificed and analysis of bronchoalveolar lavage fluid (BALF) and histopathological examination of the lung were performed. No histopathological changes were observed in all groups. However, dose dependent significant changes of such parameters of lung inflammation, impairment of lung epithelial cells or recovery from the inflammations as increases of polynuclear leucocyte count, enzymic activity of LDH,ALP,SOD and alpha-1-antitrypsin, and total and differential phospholipid in BALF were detected in diboraneexposed groups. These results suggest thet exposure to 0.1 ppm diborane is not safe for preventing lung impairments.2) Induim phosphideOne, ten or a hundred mg/kg body weight of very fine particles of indium phosphide single crystal (InP,mean diameter=0.2 micrometer) was instilled into the lung of male Fisher 344 rats. Dose-dependent increases of such inflammatory parameters in BALF as polynuclear leucocyte, LDH activity and total phospholipid were observed. Indium consentrations in blood, liver and spleen were also detected dose-dependently. Further studies are necessary to clarify th emechanism of lung inflammation induced by InP,chemical form of indium in the organs and NOAEL or LOAEL of InP inhalation.

1)将00.1.1 ppm（标称值）的乙硼烷暴露于每组12只雄性Wister大鼠，每天6小时，每周5天，持续8周。暴露后处死大鼠，进行支气管肺泡灌洗液（BALF）分析和肺组织病理学检查。所有组均未观察到组织病理学变化。而乙硼烷染毒组肺组织炎症指标、肺上皮细胞损伤或炎症恢复呈剂量依赖性变化，多核白细胞计数、LDH、ALP、SOD和α 1-抗胰蛋白酶活性、BALF中总磷脂和差别磷脂含量升高。这些结果表明暴露于0.1ppm乙硼烷对于预防肺损伤是不安全的。2）磷化铟将1、10或100 mg/kg体重的磷化铟单晶（InP，平均直径=0.2 μ m）的极细颗粒滴入雄性Fisher 344大鼠的肺中。BALF中多核白细胞、LDH活性和总磷脂等炎症指标呈剂量依赖性增加。血、肝、脾中的铟含量也呈剂量依赖性。对InP致肺部炎症的机制、铟在各器官中的化学形态以及吸入InP的NOAEL或LOAEL的研究尚需进一步深入。

项目成果

Nomiyama T,Omae K,Uemura T,et al.: "No-observed-effect level of diborane on the respiratory organs of male mice in acute and subacute inhalation experiments" Journal of Occupational Health. 37. 157-160 (1995)

Nomiyama T、Omae K、Uemura T 等人：“在急性和亚急性吸入实验中，未观察到乙硼烷对雄性小鼠呼吸器官的影响水平”职业健康杂志。

Kabe I,Omae K,Nakashima H,et al.: "In vitro solubility and in vivotoxicity of indium phosphide" Journal of Occupational Health. (in press). (1996)

Kabe I，Omae K，Nakashima H，et al.：“磷化铟的体外溶解度和体内毒性”职业健康杂志。

Kabe I, Omae K, Nakashima H, et al.: "In vitro solubility and in vivo toxicity of indium phosphide" Journal of Occupational Health. 38(in press). (1996)

Kabe I、Omae K、Nakashima H 等人：“磷化铟的体外溶解度和体内毒性”职业健康杂志。

桜井治彦編著: "半導体製造用特殊材料の生体影響" SEMIジャパン, 114 (1994)

樱井晴彦主编：《半导体制造用特殊材料的生物效应》SEMI Japan，114（1994）

Nomiyama T,Omae K,Uemura T,et al.: "No-observed-effect level of diborane on the respiratory organs of male mice in acute and subacute inhalation experiments." Journal of Occupational Health. 37. 157-160 (1995)

Nomiyama T、Omae K、Uemura T 等人：“在急性和亚急性吸入实验中，未观察到乙硼烷对雄性小鼠呼吸器官的影响水平。”