Effects of liquid organic compounds on health used in semiconductor manufacturing processes

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Because amount of consumption was the largest and information of toxicity was poor, toxicity of tetraethoxysilane [TEOS,Si(OC_2H_5)_4] on ICR male mice was firstly investigated.TEOS intraperitoneal administration study showed that LD_<50> was around 500mg/kg, and the target organ was the kidney characterized by developing acute tubular necrosis (ATN) and tubulointerstitial nephritis (TIN).Acute inhalation study (1000 ppm TEOS for 1, 2, 4 or 8 hours) indicated that LD_<50> (4 hours) was greater than 1000 ppm and that the kidney and nasal mucosa were the target organs. Subacute inhalation studies (200, 100, or 50 ppm TEOS for 6 hours/day, 5 day/week, for 2 or 4 weeks) indicated that no-effect level of TEOS inhalation on the kidney was 50 ppm and that on the nasal cavity was less than 50 ppm. From these results, exposure level should be strictly controlled below 10 ppm, the current recommended exposure limit, and that renal tubular function should be assessed and monitored long-term TEOS-exposed workers.Time course study of TEOS effect on the kidney suggested that the kidney developed renal tubular injury until 12 hours after TEOS i.p., started to recover 3 days after TEOS i.p., and developed TIN by 2 weeks.