Real Time Electron Beam Testing Method

随着集成电路向更快的运行速度和更高的封装密度发展的趋势，利用扫描电子显微镜频闪技术进行电子束测试已成为不可缺少的重要方法，并已广泛应用于半导体制造的各个阶段。本文介绍了一种由扫描电子显微镜、宽带信号检测系统和数字化示波器组成的真实的时间电子束测试系统，该系统利用电子束的真实的时间系统，对电子束进行了测试。集成电路上具有0.1ms- 20 ms的低重复率的电压信号可以以10 ns的高时间分辨率测量。

With the trend in integrated circuit developments towards faster operating speed and increasing packing density, electron beam testing by scanning electron microscope stroboscopy has becme an indispensably important method and has been widely used in the various phases of semiconductor manufacturing. This stroboscopic method, however, has a basic drawback that signals with low repetition rates or nonrepetitive signals cannot be detected.To overcme this drawback, a real time electron beam testing system which consists of a scanning electron microscope, a broadband signal detection system, and a digitizing oscilloscope has been developed.By using the real time system, voltage signals on the integrated circuits with low repetition rates of 0.1 ms- 20 ms can be measured with a high time resolution of 10 ns.