Development of funcitionality ceramics by laser implantation method

激光注入法开发功能陶瓷

• 批准号: 04650027
• 负责人: NAKAYAMA Takeyoshi
• 金额: $ 0.9万
• 依托单位: Kinki University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1992
• 资助国家: 日本
• 起止时间: 1992 至 1993
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-04650027/
• 关键词: Laser implantation; Surface modification; Ceramics; Biocompatible materials; Silica; Alumina; Interconnection; セラミック

The object of this project is a development of functionality matericals by kaser implantation method. Ceramics (SiO_2, Al_2O_3) which surfaces were covered by metal thin films (Cu, Au, Ca, etc.) were irradiated by KrF excimer laser of CO_2 gas laser. Metal atoms were implanted into the substrate by laser irradiation. A surface modification of ceramics by using synchrotron radiation (SR) was also attempted.The results obtained in this project are as follows.(1)Cu atoms implanted into SiO_2 by KrF laser irradiation form a chemical bond with O atom in SiO_2.(2)Drawing of metal lines on SiO_2 was schieved by using a mask pattern and KrF laser irradiation.(3)Implantation of Ca atoms Al_2O_3 was achieved by CO_2 gas laser irradiation. Development of biocompatible materials was achieved.(4)A surface modification of ceramics with SR was attempted. The result obtained is extremely different from that obtained with laser light. Further studies are required for this study.

本计画的目标是利用雷射离子植入法来开发功能性材料。在陶瓷（SiO_2、Al_2O_3）表面镀覆金属薄膜（Cu、Au、Ca等）。用KrF准分子激光器或CO_2气体激光器照射。通过激光辐照将金属原子注入到衬底中。同时，还尝试了利用同步辐射对陶瓷材料进行表面改性。(1)Cu KrF激光注入SiO_2中的原子与SiO_2中的O原子形成化学键。（2）利用掩膜图形和KrF激光照射实现了SiO_2上金属线的绘制。（3）用CO_2气体激光器实现了Ca原子注入Al_2O_3。实现了生物相容性材料的开发。(4)A尝试了用SR对陶瓷进行表面改性。所获得的结果与用激光获得的结果截然不同。这项研究需要进一步的研究。

项目成果

Takeyoshi Nakayama: "Laser-induced adhesion of metal thin films onto ceramics" The Review of Laser Engineering. 22(発表予定). (1994)

Takeyoshi Nakayama：“激光诱导金属薄膜在陶瓷上的粘附”，《激光工程评论》22（待发表）。

T.Nakayama, K.Oakada and U.Kubo: "Laser-enhanced adhesion of metal thin films onto ceramics" Rev.Laser Eng.22 (to be published). (1994)

T.Nakayama、K.Oakada 和 U.Kubo：“金属薄膜在陶瓷上的激光增强粘附”Rev.Laser Eng.22（待出版）。

Takeyoshi Nakayama: "Laser-induced adhesion of metal thin films onto ceramics(発表予定)" The Review of Laser Engineering. 22. (1994)

Takeyoshi Nakayama：“激光诱导金属薄膜在陶瓷上的粘附（待提交）”《激光工程评论》22。（1994 年）