Development of funcitionality ceramics by laser implantation method

本计画的目标是利用雷射离子植入法来开发功能性材料。在陶瓷（SiO_2、Al_2O_3）表面镀覆金属薄膜（Cu、Au、Ca等）。用KrF准分子激光器或CO_2气体激光器照射。通过激光辐照将金属原子注入到衬底中。同时，还尝试了利用同步辐射对陶瓷材料进行表面改性。(1)Cu KrF激光注入SiO_2中的原子与SiO_2中的O原子形成化学键。（2）利用掩膜图形和KrF激光照射实现了SiO_2上金属线的绘制。（3）用CO_2气体激光器实现了Ca原子注入Al_2O_3。实现了生物相容性材料的开发。(4)A尝试了用SR对陶瓷进行表面改性。所获得的结果与用激光获得的结果截然不同。这项研究需要进一步的研究。

The object of this project is a development of functionality matericals by kaser implantation method. Ceramics (SiO_2, Al_2O_3) which surfaces were covered by metal thin films (Cu, Au, Ca, etc.) were irradiated by KrF excimer laser of CO_2 gas laser. Metal atoms were implanted into the substrate by laser irradiation. A surface modification of ceramics by using synchrotron radiation (SR) was also attempted.The results obtained in this project are as follows.(1)Cu atoms implanted into SiO_2 by KrF laser irradiation form a chemical bond with O atom in SiO_2.(2)Drawing of metal lines on SiO_2 was schieved by using a mask pattern and KrF laser irradiation.(3)Implantation of Ca atoms Al_2O_3 was achieved by CO_2 gas laser irradiation. Development of biocompatible materials was achieved.(4)A surface modification of ceramics with SR was attempted. The result obtained is extremely different from that obtained with laser light. Further studies are required for this study.