Direct Bonding of Small Parts by Means of Ultraprecision Microgrooving Technology

该研究提出了一种不使用任何粘合剂粘合两个小零件的新方法，即利用每个零件表面的超精密v形微槽。由于楔形效应和配合表面之间的粘附现象，这些v形微槽允许小零件以高定位精度粘合在一起。超精密v形微槽是使用具有1 nm定位分辨率的超精密加工中心和金刚石铣刀创建的。研究总结如下：1。结果表明，粘结强度总体上随楔角的减小而增大。楔形长度对粘接强度的影响随楔角的增大而增大，大于8°的楔角强度随长度的增大而增大，小于8°的楔角强度随长度的减小而增大。这些v形微槽的深度和角度分别为20 μm和13.5度，由于楔形效应和两个配合表面之间的粘附现象，可以将小零件紧密地粘合在一起，具有很高的定位精度。4 mm * 4 mm * 4 mm两个方向有v型微槽的小零件可以紧密粘接，定位精度为0.380 μm。这种新方法有可能将不同的材料粘合在一起。两个带有v形微槽的小部件，由无氧铜和铝制成，进行粘接测试。结果表明，该方法能有效地实现小零件的精确连接。实验表明，微沟槽技术也适用于制造各种菲涅耳透镜和光学元件。

The study proposes a new method of bonding two small parts without the use of any adhesive by making use of ultraprecision V-shaped microgrooves on the surfaces of each part. These V-shaped microgrooves allow small parts to be bonded together with high positioning accuracy due to a wedge effect and an adhesion phenomenon between the mating surfaces. Ultraprecision V-shaped microgrooves are created by using an ultraprecision machining center having 1 nm positioning resolution and a diamond milling cutter. The study is summarized as follows :1. It is found that the bonding strength in general increases with decreasing wedge angle. The effect of the wedge length on bonding strength though varies with the wedge angle where the strength increases with increasing length for wedge angles greater than 8 degrees but increases with decreasing length for wedge angles less than 8 degrees.2. These V-shaped microgrooves, whose depth and angle are 20 μm and 13.5 degree respectively, allow small parts to be tightly bonded together with high positioning accuracy due to a wedge effect and an adhesion phenomenon between two mating surfaces.3. Small parts of 4 mm * 4 mm * 4 mm that have V-shaped microgrooves in two direction could be tightly bonded with 0.380 μm positioning accuracy.4. The new method has a possibility to bond different materials each other. Two small parts with V-shaped microgrooves that are made of oxygen-free copper and aluminum are subjected to bonding test. As a result, the proposed bonding method is found to be effective to connect small parts accurately.5. It is experimentally found that the microgrooving technology is also applicable to manufacture various Fresnel lenses and optical elements.