Creation of Ultraprecision Micro Parts with High Aspect Ratio and Complex Shape and its Application

研究了利用多轴联动控制的超精密加工中心加工高深宽比、形状复杂的高、小、复杂形状的超精密微细零件的方法。高纵横比的形状通常很难创建。创建这样的形状的可能性可能导致在新领域的应用。在过去的一年里，利用各种金刚石工具，建立了长度为1 mm、长宽比为40的微型梯形槽、圆柱体和棱柱体零件等基本形状创造技术。今年创造了以下形状：(1)由多个圆柱体和棱镜部件组成的高纵横比微针阵列，(2)作为下一代步进机光学系统的镜片阵列，(3)形状复杂的微佛头。(1)基于不再与已加工零件接触的刀具轨迹，利用旋转金刚石刀具可加工出9针的微针阵列。金属成型技术是生产这种形状所必需的，因为制造它需要花费很多时间。镜片阵列的表面粗糙度为1 nm，从半径为660 mm的球体不同位置切割出一系列1 mm×15 mm的镜片。采用五轴联动加工，加工出半径约660 mm的线段，但表面粗糙度仅为10 nm。基于佛珠的形状数据，考虑刀具碰撞的影响，对直径约3 mm的佛头进行了五轴联动加工。成功地完成了形状，但由于对刀困难，表面上有过切零件。

The study deals with the creation method of ultraprecision micro parts with high aspect ratio and complex shape, i.e. tall, small and complex shape, by making use of a multi-axis control ultraprecision machining center. The shape with high aspect ratio is usually difficult to create. The possibility of creating such a shape may lead to the application to new fields. In the previous year, the fundamental shape creation technology such as micro trapezoid groove, cylinder and prismatic parts of 1 mm in length with aspect ratio of 40, etc. was established by use of various kinds of diamond tools. This year, the following shapes were created; (1) micro pin array consisting of several cylinders and prismatic parts with high aspect ratio, (2) mirror segments array as an optical system for the next generation stepper and (3) micro Buddha head with complex shape. With regard to each item, the study is summarized as follows:(1) Micro pin array with 9 needles could be machined with a rotational diamond tool, based on the tool path generated by the way of not making contact any more with already machined portions. The metal molding technology is required to produce such a shape since it takes much time to create it. Thus, the electro plating was tried for molding, however the uniform electro plating was difficult to achieve.(2) Mirror segments array, whose surface roughness is 1 nm, consists of a series of 1mm* 15mm segment being cut from different positions of the sphere of 660 mm in radius. With 5-axis control machining, the segments of about 660mm in radius were machined, however the surface roughness was 10 nm. Farther improvement is required.(3) Based on the shape data of Buddha bead, 5-axis control machining of Buddha head of about 3 mm in diameter was carried out, taking account of tool collision. The shape was successfully completed, however has overcut parts on the surface due to the difficulty of tool setting.