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Development of Micromachines by Use of Ultraprecision Milling Machine

利用超精密铣床开发微型机械

基本信息

批准号：
07555038
负责人：
TAKEUCHI Yoshimi
金额：
$ 5.44万
依托单位：
University of Electro-Communications
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1996
项目状态：
已结题

项目摘要

With the rapid Progress of electronic and optical devices, ultraprecision machining and micromanufacturing technologies are increasingly required. Micromanufacturing technology, called micromachining in recent years, plays an important role in the field of LSI manufacture on the basis of etching and lithography technologies. However, etching and lithography technologies have limitation of kinds of material and complicated 3-dimensional shape creation. On the other hand, the machining technology has advantages of high machining efficiency, wide spectrum of material selection, good surface roughness and so on.The requirement of producing metallic microparts for micromachine and/or micromechanism is increasining rapidly. Thus, the study deals at first with manufacturing of tiny parts in mm-size, using a micromachining technology by an ultraprecision milling machine, which consists of z-motion table, positionable spindle on it as c-rotational axis and x-motion table. The spindle with a pseudo ball end mill composed of a single crystal diamond is mounted on the x-table. A new manufacturing procedure is devised to create a propeller of 3 mm in diameter as an example of microparts, based on CAD data of the propeller. As a result, it is found that the machined propeller with the surface roughness of 0.1 mum can be mounted to the micromotor shaft of 0.7 mm in diameter and works well.In terms of the necessity of processing brittle materials, the study secondly deals with ultraprecision 3D micromachining of glass in the ductile mode, using the lathe-type ultraprecision milling machine and improved pseudo ball end mills. The condition of ductile mode cutting is experimentally derived, and it is found that the roughly cut surface with cracks can be changed to the mirror surface by the ductile mode cutting. As a result, it becomes possible to obtain a glass mask of 1 mm in diamter and 30 mm in height with the surface roughness of 50 nm (Rmax).

随着电子和光学器件的快速发展，对超精密加工和微制造技术的要求越来越高。微制造技术，近年来被称为微机械加工，在大规模集成电路制造领域发挥着重要作用的基础上的蚀刻和光刻技术。然而，蚀刻和光刻技术具有材料种类的限制和复杂的三维形状创建。另一方面，微细加工技术具有加工效率高、选材范围广、表面粗糙度好等优点，对微机械和/或微机械用金属微零件的需求日益增加。因此，本研究首先涉及在毫米尺寸的微小零件的制造，使用超精密铣床，其中包括Z-运动工作台，可定位的主轴上作为C-旋转轴和X-运动工作台的微加工技术。具有由单晶金刚石构成的伪球端铣刀的主轴安装在X工作台上。基于螺旋桨的CAD数据，设计了一种新的制造过程，以创建直径为3 mm的螺旋桨作为微零件的示例。结果表明，加工后的螺旋桨表面粗糙度为0.1 μ m，可以安装在直径为0.7 mm的微电机轴上，并且工作良好。根据加工脆性材料的必要性，本研究采用车床型超精密铣床和改进的伪球头米尔斯铣刀，对玻璃进行了延性模式下的超精密三维微加工。实验推导了延性切削条件，发现延性切削可将含裂纹的粗加工表面加工成镜面。结果，可以获得直径为1 mm、高度为30 mm、表面粗糙度为50 nm（Rmax）的玻璃掩模。