3-Dimensional Microparts Machining by Ultraprecision 5-Axis control Machinig Center

研究开发了自由驱动1 nm分辨率5轴控制超精密加工中心的CAD/CAM系统，建立了单独或同时控制多轴控制加工中心的微加工技术。此外，本研究旨在探讨制造微型零件的基本技术。研究结果总结如下：1.利用单晶金刚石立铣刀加工出刃口锋利、斜面和/或曲面光滑的微槽。研究中提出的新加工方法可以加工出具有足够形状精度和表面粗糙度且没有毛刺的V型微槽。并将该方法应用于小编码板和小菲涅耳透镜的制作。这项研究提出了一种新的方法，利用每个零件表面的超精密V型微槽，在不使用任何粘合剂的情况下将两个小零件连接在一起。实验发现，由于楔形效应和配合表面之间的粘接现象，V型微槽可以将小零件粘接在一起，具有很高的定位精度。除了开发三轴控制微加工外，还开发了一种基于3D-CAD数据或复杂工件形状扫描数据生成五轴联动控制CL数据的主处理器。实验证明，该系统能有效地加工出微小的3D零件。

The study deals with the development or CAD/CAM system to freely drive a 5-axis control ultraprecision machining center having 1 nm resolution and with the establishment of the micromachining technology by individual or simultaneous control of multi-axis control machining center. In addition, the study aims at investigating the fundamental technology to manufacture microparts. The result was summarized as follows ;1. Manufacture of microgrooves with sharp edges and smooth oblique and/or curved surfaces was conducted, using single crystal diamond endmills. The new machining method proposed in the study allows to produce V-shaped microgrooves with enough shape accuracy and surface roughness and without burr. The method was also applied to create small encoder code plate and tiny Fresnel lens.2. The study proposes a new method of bonding two small parts without the use of any adhesive by making use of ultraprecision V-shaped microgrooves on the surfaces of each part. It is experimentally found that V-shaped rnicrogrooves allow small parts to be bonded together with high positioning accuracy due to a wedge effect and an adhesion phenomenon between the mating surfaces.3. As well as 3-axis control micromachining, a main processor to generate 5-axis simultaneous control CL data was developed, based on 3D-CAD data or scanning data for complex workpiece shapes. The system is experimentally proved effective to produce tiny 3D workpieces.