3-Dimensional Microparts Machining by Ultraprecision 5-Axis control Machinig Center

本研究涉及开发CAD/CAM系统，以自由驱动具有1 nm分辨率的5轴控制超精密加工中心，并通过多轴控制加工中心的单独或同时控制建立微加工技术。此外，本研究的目的是探讨制造微小零件的基本技术。研究结果如下：1.利用单晶金刚石立铣刀加工出了具有锋利边缘和光滑斜面和/或曲面的微槽。本研究所提出之新加工方法可加工出具有足够形状精度及表面粗糙度且无毛刺之V形微槽。该方法还用于制作小型编码器码盘和微型菲涅尔透镜.本研究提出一种利用超精密V形微槽在两个小零件表面进行粘接的新方法，该方法无需使用任何胶粘剂。实验发现，V形微槽由于楔效应和配合面之间的粘附现象，可以使小零件以高定位精度粘结在一起.除了3轴控制微加工外，还开发了一个主处理器，用于根据复杂工件形状的3D-CAD数据或扫描数据生成5轴同时控制CL数据。实验证明，该系统是有效的生产微小的三维工件。

The study deals with the development or CAD/CAM system to freely drive a 5-axis control ultraprecision machining center having 1 nm resolution and with the establishment of the micromachining technology by individual or simultaneous control of multi-axis control machining center. In addition, the study aims at investigating the fundamental technology to manufacture microparts. The result was summarized as follows ;1. Manufacture of microgrooves with sharp edges and smooth oblique and/or curved surfaces was conducted, using single crystal diamond endmills. The new machining method proposed in the study allows to produce V-shaped microgrooves with enough shape accuracy and surface roughness and without burr. The method was also applied to create small encoder code plate and tiny Fresnel lens.2. The study proposes a new method of bonding two small parts without the use of any adhesive by making use of ultraprecision V-shaped microgrooves on the surfaces of each part. It is experimentally found that V-shaped rnicrogrooves allow small parts to be bonded together with high positioning accuracy due to a wedge effect and an adhesion phenomenon between the mating surfaces.3. As well as 3-axis control micromachining, a main processor to generate 5-axis simultaneous control CL data was developed, based on 3D-CAD data or scanning data for complex workpiece shapes. The system is experimentally proved effective to produce tiny 3D workpieces.