Trial Manufacture and Research of Micromanipulators for Multi Input-Output Optical Switches

多输入输出光开关微操作器的试制与研究

基本信息

批准号：
11555050
负责人：
KAMIYA Daiki
金额：
$ 8.83万
依托单位：
Tokyo Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B).
财政年份：
1999
资助国家：
日本
起止时间：
1999 至 2000
项目状态：
已结题

项目摘要

Studies on optical switches have been researched and developed for optical information networks for a highly developed information technology society. In reality, however, a manipulator cannot apply for multi input and output due to a rather small output displacement at mirror parts inside the manipulator. Therefore, in order to reduce the output errors of micromechanisms, our study has suggested the use of new micro-hinges with a rigidity that has been made suitable enough to decrease the differences between the hinge end locus and the circular locus. Based on this, we have conducted theoretical analyses, while at the same time creating micro-hinge models using a semiconductor minute processing technique for our experiments. Afterwards, we will discuss and study the effectiveness of the use of the suggested microhinges, through comparisons with conventional shaped micro-hinges. The results clarified that the suggested hinge models could reduce errors with the circular locus. This ulti … More mately confirms the effectiveness of our newly reinforced micro-hinge. Next, in order to develop optical switches capable of switching multi input and output, we suggested an electrostatic driving-type 2-DOF micro-manipulator that was composed of many beams as well as a micro mirror that is capable of large angular output displacement. After having studied shapes and sizes of micro-manipulators capable of large angular displacement based on theoretical analysis, we also discovered that the suggested micro-manipulator can have a large angular displacement. Moreover, our study suggested the manufacturing process using a minute manufacturing process and then confirmed the adequacy of the suggested electrostatic driving-type micro-manipulator after having manufactured and studied a micro-manipulator model. In the results, we obtained an electrostatic driving-type micro-manipulator that is capable of large angular output displacement by low applied voltage. The manipulator is driven by the method of suction between the beam supporting a mirror and the fixed plate with a insulating membrane on it. From the theoretical analyses, the manipulator output the 32degrees angular displacement with an applied voltage of 95 volts. Less

针对高度发达的信息技术社会的光学信息网络进行了研究和开发有关光学开关的研究。但是，实际上，由于操纵器内部的镜像部件的输出位移相当小，因此操纵器无法申请多输入和输出。因此，为了减少微观力学的输出误差，我们的研究表明，使用具有刚度的新微铰链，已使其适当地使用足以减少铰链端基因座和圆形基因座之间的差异。基于此，我们进行了理论分析，同时使用半导体分钟处理技术为我们的实验创建微铰链模型。之后，我们将通过与常规形状的微铰链进行比较，讨论和研究建议的微铰链使用的有效性。结果阐明了建议的铰链模型可以通过圆形位点减少误差。这个终极……更奇怪地证实了我们新增强的微铰链的有效性。接下来，为了开发能够切换多输入和输出的光学开关，我们建议使用由许多梁和能够具有大角度输出位移的微镜组成的静电驾驶型2-DOF微型仪。在具有基于理论分析的大角度位移的研究形状和大小的微型操纵剂的大小之后，我们还发现建议的微型操纵器可以具有较大的角度位移。此外，我们的研究建议使用微小的制造工艺进行制造过程，然后确认了在制造和研究微型操纵器模型后，建议的静电驾驶型微型操作器的适当性。在结果中，我们获得了一个静电驾驶型微型操纵器，该微型操纵器能够通过低施加电压通过低角度输出位移。操纵器是由支撑镜子的光束和固定板上带有绝缘膜的梁之间的任务驱动的。从理论分析中，操纵器输出32度角位移，施加电压为95伏。较少的