Combined electron microscopy for in-situ direct atomistic observation of surface dynamics

我们开发的电子显微镜、扫描隧道显微镜和原子力显微镜的组合电子显微镜是为了在各种类型的研究领域中的应用而改进的。在以前的方法中，样品的操作是通过人工操作进行的，并且观察温度被限制在环境温度。在本研究中，我们清除了限制，发展了该方法，以便将其应用于各种类型的科学技术领域的研究。我们改进了原子操作的空间分辨率和记录压电压、电导和力的图像和光谱的方法。结果，经过几个月的指导，本科四年级的学生就可以操作组合电子显微镜了。我们还开发了几个样机和新的测力系统。作为先进材料的应用实例，用该方法合成了宽2圈、长70 nm的硅纳米线。用该方法制备了碳纳米管，并对其性能进行了分析，实例表明该方法具有最高的功能潜力。

The combined electron microscopy of electron microscopy, scanning tunneling microscopy and atomic force microscopy that we had developed was improved for the application in various types of research fields. In the previous method the operation of samples was performed by a manual operation and the observation temperature was restricted to an ambient temperature. In this study, we cleared the restriction and developed the method in order to apply it in researches in various types of scientific and technological fields. We improved spatial resolution of an atom operation and recording method of the image and spectra of the piezo voltage, electric conductance and force. As a result, students of 4th grade in a bachelor course could operate the combined electron microscopy after the instruction of a few months. We also developed several sample stages and new force measurement system. As examples of the application to advanced materials, silicon nanowires of 2 rim in width and 70 nm in length were synthesized by the method. Carbon nanotubes were also fabricated by this method and their properties were analyzed The examples show a highest potential of functions in this method was completed by this study.