Combined electron microscopy for in-situ direct atomistic observation of surface dynamics

我们已经开发的电子显微镜、扫描隧道显微镜和原子力显微镜的组合电子显微镜被改进，以应用于各种类型的研究领域。在先前的方法中，样品的操作通过手动操作进行，并且观察温度被限制为环境温度。本研究旨在厘清这一限制条件，发展这一方法，使之能应用于各类科技领域的研究。我们改进了原子操作的空间分辨率和压电电压、电导和力的图像和光谱的记录方法。结果，本科四年级的学生在几个月的指导后就可以操作组合电子显微镜。我们还开发了几个样品台和新的力测量系统。作为在先进材料中的应用实例，用该方法合成了宽2mm、长70nm的硅纳米线。用该方法制备了碳纳米管，并对其性能进行了分析。实例表明，本研究完成了该方法的最高功能潜力。

The combined electron microscopy of electron microscopy, scanning tunneling microscopy and atomic force microscopy that we had developed was improved for the application in various types of research fields. In the previous method the operation of samples was performed by a manual operation and the observation temperature was restricted to an ambient temperature. In this study, we cleared the restriction and developed the method in order to apply it in researches in various types of scientific and technological fields. We improved spatial resolution of an atom operation and recording method of the image and spectra of the piezo voltage, electric conductance and force. As a result, students of 4th grade in a bachelor course could operate the combined electron microscopy after the instruction of a few months. We also developed several sample stages and new force measurement system. As examples of the application to advanced materials, silicon nanowires of 2 rim in width and 70 nm in length were synthesized by the method. Carbon nanotubes were also fabricated by this method and their properties were analyzed The examples show a highest potential of functions in this method was completed by this study.