Fundamental technology for nano-device fabrication utilizing nanocomposite substrates

利用纳米复合材料基板制造纳米器件的基础技术

• 批准号: 14350362
• 负责人: KOSHIZAKI Naoto
• 金额: $ 9.66万
• 依托单位: National Institute of Advanced Industrial Science and Technology (AIST)
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2002
• 资助国家: 日本
• 起止时间: 2002 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-14350362/
• 关键词: Nanocomposite; Nanodevice; Substrate; Carbon Nanotube; Microplasma; Low temperature; Catalyst; Supercritical fluid plasma

Final goal of this study is to develop fundamental technology for nano-device fabrication utilizing precisely controlled nanocomposite substrates and microplasma technology. We applied these techniques to carbon nanotube (CNT) fabrication and studied low-temperature processing technique for inorganic nano-parts aiming for future part-to-part contact in nanodevice.(1)Carbon nanotube array fabrication on nanocomposite thin film substratesWe succeeded in fabrication of forest-like CNT al-rays by plasma-enhanced chemical vapor deposition method using nanocomposite substrate composed of nickel metal as a catalyst for CNT growth and inert substances such as Mo, TiO_2 and SiO_2. Such CNT arrays have twice higher field emission current compared to simple CNT arrays, suggesting the possibility of a self-sustainable and long-life field emission device. Nanocomposite substrate is also applied for a substrate organic molecular arrangement.(2) Basic technology for nano-wiring utilizing microplasmaWe tried to fabricate CNTs at low temperature under atmospheric pressure using a microplasma confined in small space. CNTs were successfully formed under the atmospheric pressure without substrate heating by introducing CH_4 as a raw material and Fe-containing substance as a catalyst into a microplasma in a glass capillary whose diameter is less than 100 micron. At this stage, CNTs were formed on metal wire inserted into the capillary for ignition or on inner surface of glass capillary. We are planning to improve this technique to be able to deposit CNT at any arbitrary position.We also developed a new technique, laser ablation in liquid media, for high quality nanoparticle preparation.

这项研究的最终目标是开发利用精确控制的纳米复合基板和微等离子体技术制造纳米器件的基础技术。我们将这些技术应用于碳纳米管(CNT)的制备中，并研究了无机纳米器件的低温加工技术，以期在未来的纳米器件中实现部件对部件的接触。(1)纳米复合薄膜衬底上碳纳米管阵列的制备我们采用等离子体增强化学气相沉积的方法成功地制备出了森林状的碳纳米管阵列，这种碳纳米管阵列以Mo、TiO_2和SiO_2等惰性物质作为碳纳米管生长的催化剂。这种碳纳米管阵列的场发射电流是简单碳纳米管阵列的两倍，这表明这种碳纳米管阵列具有自持续和长寿命的场发射器件的可能性。纳米复合衬底还可用于衬底有机分子的排列。(2)利用微等离子体进行纳米布线的基础技术我们尝试在常压下利用受限于小空间的微等离子体低温制备碳纳米管。在直径小于100微米的玻璃毛细管中，以甲烷为原料，以含铁物质为催化剂，在常压下不加热衬底的情况下，成功地制备了碳纳米管。在这个阶段，碳纳米管是在插入毛细管点火的金属丝上或在玻璃毛细管的内表面上形成的。我们正在计划改进这项技术，使其能够在任何位置沉积碳纳米管。我们还开发了一种新的技术，即液体介质中的激光烧蚀，以制备高质量的纳米颗粒。

项目成果

Tsuyohito Ito: "Carbon nanotube and nanopolyhedron syntheses by a discharge under supercritical fluid"Journal of Materials Chemistry. 14. 1513-1515 (2004)

Tsuyohito Ito：“超临界流体下放电合成碳纳米管和纳米多面体”材料化学杂志。

Z.Wang et al.: "Catalyst-free fabrication of single crystalline boron nanobelts by laser ablation"Chemical Physics Letters. 368(5-6). 663-667 (2003)

Z.Wang 等人：“通过激光烧蚀无催化剂制造单晶硼纳米带”《化学物理快报》。

Y.Shimizu et al.: "Fabrication of carbon nanotube assemblies on Ni-Mo substrates mimics law of natural forest growth"Chemical Physics Letters. 370(5-6). 774-780 (2003)

Y.Shimizu 等人：“在 Ni-Mo 基底上制造碳纳米管组件模仿天然森林生长规律”《化学物理快报》。

C.Liang et al.: "Pulsed-laser ablation of Mg in liquids : surfactant-directing nanoparticle assembly for magnesium hydroxide nanostructures"Chemical Physics Letters. 389(1-3). 58-63 (2004)

C.Liang 等人：“液体中镁的脉冲激光烧蚀：用于氢氧化镁纳米结构的表面活性剂引导纳米粒子组装”《化学物理快报》。

Changhao Liang: "Preparation of layered zinc hydroxide/surfactant nanocomposite by pulsed-laser ablation is a liquid medium"Chemistry of Materials. 16. 963-965 (2004)

梁长浩：“液体介质脉冲激光烧蚀制备层状氢氧化锌/表面活性剂纳米复合材料”《材料化学》。