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3D Thin-Film Coating for Micro/Nanodevice Study and Prototyping

3D Thin-Film Coating for Micro/Nanodevice Study and Prototyping
用于微/纳米器件研究和原型制作的 3D 薄膜涂层
批准号:
RTI-2016-00280
负责人:
Takahata, Kenichi
金额:
$10.89万
依托单位国家:
加拿大
项目类别:
Research Tools and Instruments
财政年份:
2015
资助国家:
加拿大
项目状态:
已结题
起止时间:
2015-01-01 至 2016-12-31
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中文摘要
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英文摘要
The research programs to be supported by the requested equipment will develop revolutionary micro-electro-mechanical systems (MEMS) and other emerging devices based on three-dimensional (3D) micro/nanostructures for a variety of applications, ranging from “smart” medical implants and electronic skins to carbon-nanotube-based devices and next-generation integrated-circuit (IC) manufacturing.
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Medical Microsystems and Enabling Technologies for Precision Medicine
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Smart Material Transducers and Applications to In Vivo Microsystems
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海外基金