Development of super-tribological duplex coatings due to 3-dimensional femtosecond-laser processing

利用 3 维飞秒激光加工开发超摩擦学双层涂层

基本信息

批准号：
14350392
负责人：
YASUMARU Naoki
金额：
$ 4.74万
依托单位：
Fukui National College of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2002
资助国家：
日本
起止时间：
2002 至 2004
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-14350392/
关键词：
femtosecond laser ablation ceramic thin film DLC solid lubricant coating duplex thin film tribology

项目摘要

(1) Femtosecond-laser-induced nanostructure formed on hard thin films of TiN and DLCTribological hard coatings of TiN and DLC were irradiated by 800- and 267-nm, femtosecond (fs) laser pulses in air at an energy fluence slightly above the ablation threshold. On the ablated thin-film surfaces, the linearly-polarized fs pulses produce arrays of fine periodic structures that are almost oriented to the direction perpendicular to the laser polarization, while the circularly-polarized light forms fine dot structures. The size of these surface structures is 1/10 〜 1/5 of the laser wavelength and decreases with a decrease in the laser wavelength. Furthermore, the size of these structures increased with an increase in the fluence. The results suggest that the surface morphology can be controlled precisely with the fs-laser polarization and wavelength and fluence.(2) Development of DLC-MoS_2 duplex thin films and the influence of micro grooves against the tribological propertyMicro-sized grooves were mechanically created in the center of the sliding path of a ball-on-disk friction testing machine on a DLC coating and then deposited with a solid lubricant film of MoS_2 with a thickness of about 3 μm utilizing a sputtering method. The friction coefficient was lowered from 0.16 to 0.09 due to the micro-grooves against the bearing steel ball. These results suggest that the micro-grooves act as MoS_2 lubricant reservoirs. The fs-laser processing should be applied to create the more fine micro-grooves.(3) The influence of femtosecond-laser-induced nanostructure against the tribological propertyWe developed the technique to create a nanostructured area (10mm X 10mm) on a DLC film utilizing the fs-laser pulses. It was found that the nanostructured DLC surface showed the improved tribological properties against the bearing steel ball.

（1）飞秒激光诱导的纳米结构在锡和DLC的硬质薄膜和Dlctribological硬涂层上形成，由800 nm和267 nm（FS）激光脉冲的800- nm和267 nm辐射，在能量的高度上方，在空气中，在空气中略微上方。在消融的薄膜表面上，线性偏振的FS脉冲产生的细胞周期性结构阵列几乎定向垂直于激光极化的方向，而圆形光线的光线形成细点结构。这些表面结构的大小为激光波长的1/10至1/5，随激光波长降低而降低。此外，这些结构的尺寸随着通量的增加而增加。 The results suggest that the surface morphology can be controlled precisely with the fs-laser polarization and wavelength and fluence.(2) Development of DLC-MoS_2 duplex thin films and the Influence of micro grooves against the tribological propertyMicro-sized grooves were mechanically created in the center of the sliding path of a ball-on-disk friction testing machine on a DLC coating and then deposited with a solid lubricant film使用溅射方法，厚度约为3μm的MOS_2。由于微型跨轴向球对轴承钢球，摩擦系数从0.16降低到0.09。这些结果表明，微峰起着MOS_2润滑剂储量。 FS激光处理应应用于创建更精细的微型环境。（3）飞秒激光诱导的纳米结构对Tribologation Property We开发了该技术，开发了使用FS-LASER脉冲的DLC膜创建纳米结构区域（10mm x 10mm）的技术。发现纳米结构的DLC表面显示出针对轴承钢球的摩擦学特性。