Duplex Surface Treatment due to Combined ECR Plasma Nitriding and Ceramic Coatings

(1)高密度等离子体源电弧离子镀(AIP)系统的制作将2.45GHz微波引入等离子体端口，通过石英窗利用稀土磁体产生尖点型磁场。该等离子体端口设置在AIP设备的真空室的上法兰处。在该室中，将试样安装在可加热至600℃并偏置至-1 kV的工作台上，在该系统中进行等离子渗氮和陶瓷涂层。(2)双相表面处理钢的力学性能TiN(Hv2200)和CrN(Hv2000)氮化膜、TiC(Hv3000)碳化物膜、氢化物膜本研究对TiH_2(Hv500)、TiO_2氧化膜(Hv1200)和DLC类金刚石碳膜(Hv2600)进行了研究。双相处理钢的机械性能如下。 (1)等离子渗氮后的TiN或CrN涂层试样即使在重载荷下也表现出最好的耐磨性。 (2)陶瓷膜大多表现出良好的耐腐蚀性能。特别是，我们发现TiH_2薄膜的腐蚀电流密度非常小。 (3)双相处理试件的疲劳极限较未处理的显着提高。氮化层的质量对于抗疲劳性是最有效的。

(1) Production of Arc Ion Plating (AIP) system with high density plasma source2.45 GHz microwave was introduced into the plasma port where the cusp-type magnet field was generated by utilizing a rare earth magnet through a quartz window. This plasma port was set up at an upper flange of a vacuum chamber of AIP equipment. In this chamber, the specmens were mounted on the stage which could be heated up to 600ﾟC and biased untill -1 kV.Plasma nitriding and ceramic coating were done in this system.(2)Mechnical properties of duplex suraface treated steelsNitride films of TiN (Hv2200) and CrN (Hv2000), carbide film of TiC (Hv3000), hyderide film of TiH_2 (Hv500), oxide film of TiO_2 (Hv1200) and diamond like carbon film of DLC (Hv2600) were examined in this study. The mechanical properties of the duplex treated steels are as follows. (1) TiN or CrN-coated specimens after plasma nitriding showed the best wear resistance even under a heavy load. (2) Ceramic films showed good resistance tocorrosion mostly. Especially, we found the corrosion current density of TiH_2 film is very small. (3) The fatigue limit of the duplex treated specimens increased largely compared to that of the untreated one. The quality of the nitrided layr is most effective according to the fatigue resistance.