Duplex Surface Treatment due to Combined ECR Plasma Nitriding and Ceramic Coatings

(1)高密度等离子体源弧光离子镀(AIP)系统的研制将2.45 GHz微波引入到等离子体端口，利用稀土磁体通过石英窗产生尖型磁场。该等离子体端口设置在AIP设备真空室的上法兰上。(2)研究了TiN(Hv2200)、CrN(Hv2000)、TiC(Hv3000)碳化物薄膜、TiH2(Hv500)氢化物薄膜、TiO2(Hv1200)氧化物薄膜和类金刚石薄膜(Hv2600)双表面处理钢的力学性能。双相处理钢的力学性能如下。(1)经离子氮化处理后的TiN或CrN涂层试件即使在重载下也表现出最好的耐磨性。(2)陶瓷膜具有较好的耐腐蚀性。特别是，我们发现TiH_2膜的腐蚀电流密度很小。(3)复合处理试件的疲劳极限较未处理试件有较大幅度的提高。根据抗疲劳性能，渗氮层的质量是最有效的。

(1) Production of Arc Ion Plating (AIP) system with high density plasma source2.45 GHz microwave was introduced into the plasma port where the cusp-type magnet field was generated by utilizing a rare earth magnet through a quartz window. This plasma port was set up at an upper flange of a vacuum chamber of AIP equipment. In this chamber, the specmens were mounted on the stage which could be heated up to 600ﾟC and biased untill -1 kV.Plasma nitriding and ceramic coating were done in this system.(2)Mechnical properties of duplex suraface treated steelsNitride films of TiN (Hv2200) and CrN (Hv2000), carbide film of TiC (Hv3000), hyderide film of TiH_2 (Hv500), oxide film of TiO_2 (Hv1200) and diamond like carbon film of DLC (Hv2600) were examined in this study. The mechanical properties of the duplex treated steels are as follows. (1) TiN or CrN-coated specimens after plasma nitriding showed the best wear resistance even under a heavy load. (2) Ceramic films showed good resistance tocorrosion mostly. Especially, we found the corrosion current density of TiH_2 film is very small. (3) The fatigue limit of the duplex treated specimens increased largely compared to that of the untreated one. The quality of the nitrided layr is most effective according to the fatigue resistance.