Duplex Surface Treatment due to Combined ECR Plasma Nitriding and Ceramic Coatings

ECR 等离子渗氮和陶瓷涂层相结合的双重表面处理

基本信息

批准号：
06650823
负责人：
YASUMARU Naoki
金额：
$ 1.34万
依托单位：
Fukui National College of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (C)
财政年份：
1994
资助国家：
日本
起止时间：
1994 至 1995
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-06650823/
关键词：
plasma treatment nitriding ceramic coating surface treatment duplex treatment

项目摘要

(1) Production of Arc Ion Plating (AIP) system with high density plasma source2.45 GHz microwave was introduced into the plasma port where the cusp-type magnet field was generated by utilizing a rare earth magnet through a quartz window. This plasma port was set up at an upper flange of a vacuum chamber of AIP equipment. In this chamber, the specmens were mounted on the stage which could be heated up to 600ﾟC and biased untill -1 kV.Plasma nitriding and ceramic coating were done in this system.(2)Mechnical properties of duplex suraface treated steelsNitride films of TiN (Hv2200) and CrN (Hv2000), carbide film of TiC (Hv3000), hyderide film of TiH_2 (Hv500), oxide film of TiO_2 (Hv1200) and diamond like carbon film of DLC (Hv2600) were examined in this study. The mechanical properties of the duplex treated steels are as follows. (1) TiN or CrN-coated specimens after plasma nitriding showed the best wear resistance even under a heavy load. (2) Ceramic films showed good resistance tocorrosion mostly. Especially, we found the corrosion current density of TiH_2 film is very small. (3) The fatigue limit of the duplex treated specimens increased largely compared to that of the untreated one. The quality of the nitrided layr is most effective according to the fatigue resistance.

（1）将具有高密度等离子体源的弧离子板（AIP）系统的产生引入到血浆端口中，在该端口中，通过使用石英窗口利用稀土磁铁来生成尖尖型磁铁场。该等离子体端口设置在AIP设备真空室的上部法兰。 In this chamber, the specmens were mounted on the stage which could be heated up to 600ﾟC and biased until -1 kV.Plasma nitriding and ceramic coating were done in this system.(2)Mechnical properties of duplex suraface treated steelsNitride films of TiN (Hv2200) and CrN (Hv2000), carbide film of TiC (Hv3000), hydride film在这项研究中检查了TIH_2（HV500），TIO_2（HV1200）的氧化膜和类似DLC的碳膜（HV2600）的钻石。双链处理钢的机械性能如下。（1）血浆硝化物后的锡或CRN涂层标本，即使在沉重的负载下，也表现出最佳的耐磨性。（2）陶瓷膜主要表现出良好的抵抗性腐败。特别是，我们发现TIH_2膜的腐蚀电流密度很小。（3）与未经处理的样品相比，双链治疗样品的疲劳极限大大增加。根据疲劳性抗性，硝基甲列的质量最有效。